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20th Congress of the International Commission for Optics

作者： Yuan Zhao Zhongxian Chen Yu Zhang Meng Tang Liping Liu XiuDong Sun Department of Applied Physics Harbin Institute of Technology Harbin 150001 China

In optical remote sensing systems especially the imaging systems the quality of the scanner is the key element for obtaining high quality 2-D image of the target. There must be a detection device to v

关键词： Laser imaging system optical scanner large area CCD scanner performance

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An optical scanner Based on Cantilever-type Electrostatic Zipping Actuators

An Optical Scanner Based on Cantilever-type Electrostatic Zi...

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2007亚洲光电子会议微电子机械系统/微型光机电系统技术及应用分会场

作者： Smitha M.N.Rao Praveen Pandojirao-Sunkojirao Naresh Dhaubanjar Mu Chiao J.-C.Chiao Department of Electrical Engineering The University of Texas at ArlingtonUSA Department of Mechanical Engineering The University of British ColumbiaCanada

This paper discusses modeling, design, fabrication and characterization of an optical scanner based on cantilever-type electrostatic zipping actuators. The electrostatic actuator has been designed to achieve high displacements for large optical scanning angles at lower actuation voltages. The zipping actuators are fabricated using multi-layer polysilicon foundry fabrication processes. The electrostatic force between the cantilever and the bottom electrode on the substrate pulls the cantilever down. With a warped cantilever, the force closes the gap from the anchored end and gradually the zipping effect actuates the entire cantilever. In our design, mechanical structures are arranged to avoid electrical short-circuit. With various annealing temperatures, the warped angles are controllable. The cantilever serves as a reflective surface and the high out-of-plane displacement is used to steer a reflected laser beam for imaging and scanning applications. In this paper we present the design considerations in electrostatic zipping actuator displacement and control as well as the arrangement for optical scanning.

关键词： optical scanner cantilever-type zipping actuator electrostatic actuator

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Programmable agile beam steering based on a liquid crystal prism

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Chinese Physics B 2011年第11期20卷 317-322页

作者：徐林黄子强杨若夫 School of Optoelectronic Information University of Electronic Science and Technology of China

To meet the application need for agile precision beam steering, a novel liquid crystal prism device with a simple structure, convenient control, low cost and applicable performance is presented, and analysed theoretically and experimentally. The relationships between the optical path and the thickness of the liquid crystal cell under different voltages are investigated quantitatively by using a theoretical model. Analysis results show that the optical path profile of the liquid crystal prism has a quasi-linear slope and the standard deviation of the linear slope is less than 16 nm. The slope ratio can be changed by a voltage, which achieves the programmable beam steering and control. Practical liquid crystal prism devices are fabricated. Their deflection angles and wavefront profiles with different voltages are experimentally tested. The results are in good agreement with the simulated results. The results imply that the agile beam steering in a scope of 100μrad with a micro-rad resolution is substantiated in the device. The two-dimensional beam steering is also achieved by cascading two liquid crystal prism devices.

关键词： liquid crystal polarization devices beam steering optical scanner

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