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optical measurements,Techniques and Application: optical measurements,Techniques and ***.2001 2nd corr. ed.

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丛书名： Heat and mass transfer

2001年

作者：匿名

来源：畅想之星图书光盘版（南... 评论

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Recording Spatially Resolved Plasma Parameters in Microwave-Driven Plasmas

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Plasma Science and Technology 2013年第1期15卷 43-51页

作者： Gerhard FRANZ Florian SCHAMBERGER Igor KRSTEV Stefan UMRATH Munich University of Applied Sciences Munich D-80335

In an almost cubical reactor 90 1 in volume which is intended to deposit organic polymers by plasma-enhanced chemical vapor deposition （PECVD）, microwave power is coupled into the volume via a quartz window which extends to approximately 1/10 of the sidewall area. Since the plasma is excited locally, plasma parameters like electron temperature and plasma density are expected to exhibit a spatial variation. The compilation of these plasma quantities has been accomplished with a bendable single Langmuir probe. To isolate the tungsten wire against its grounded housing tube, it was coated with polyparylene. After having compared this construction with our Langmuir probe, which has been now in use for more than a decade, we have taken data of more than half the volume of the reactor with argon and have found a definitive radial inhomogenity for all plasma parameters. To investigate whether this conduct can be determined applying optical emission spectroscopy, we improved our spectrometer which had been used for endpoint detection purposes and plasma diagnostics in chlorine-containing ambients where we could detect also a spatial dependence. This behavior is discussed in terms of Lieberman＇s global model.

关键词： high frequency and RF discharges optical measurements electric and mag-netic measurements

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optical Diagnostics in Rarefied Flows

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Chinese Journal of Aeronautics 2006年第2期19卷 151-159页

作者： Jean-Pierrer TARAN ONERA DSG/RS 92320ChtillonFrance

This article reviews the instrumental developments accomplished at ONERA in order to perform precise non-intrusive measurements of hypersonic flows using laser- and electron-beam-based optical techniques. Point line of sight and imaging measurements are possible. Point measurements have been implemented with Electron Beam Fluorescence （EBF） using detection of X-ray radiation and Coherent anti-Stokes Raman Scattering （CARS）. When spatial resolution is not required, diode laser absorption spectroscopy yields results integrated along a line. EBF imaging using a high energy pulsed electron gun is also quite promising. Rotational and vibrational populations of nitrogen and nitric oxide have been measured in various hypersonic hyperenthalpic facilities, as well as rotational state-resolved velocities in shocks and boundary layers.

关键词： hypersonics optical measurements CARS EBF lasers absorption

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