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Indirect Measurement Methods forQuality and Process Control in nanomanufacturing

nanomanufacturing and Metrology 2022年第3期5卷 209-229页

作者： Zhaoyan Fan Xiaochen Hu Robert X.Gao School of Mechanical Industrialand Manufacturing EngineeringOregon State UniversityCorvallisOR97331USA Department of Mechanical and Aerospace Engineering Case Western Reserve UniversityClevelandOH44106USA

Rapid advancement over the past decades in nanomanufacturing has led to the realization of a broad range of nanostructures such as nanoparticles,nanotubes,and *** unique mechanical,chemical,and electrical properties of these nanostructures have made them increasingly desired as key components in industrial and commercial *** the geometric dimension of nano-manufactured products is on the sub-micron to nanometer scale,different mechanisms and effects are involved in the nanomanufacturing process as compared to those for macro-scale *** direct measurement methods using atomic force microscopy and electron beam microscopy can determine the dimensions of the nano structure with high accuracy,these methods are not suited for online process control and quality *** comparison,indirect measurement methods analyze in-process parameters as the basis for inferring the dimensional variations in the nano products,thereby enabling online feedback for process control and quality *** paper provides a comprehensive review of relevant indirect measurement methods,starting with their respective working principles,and subsequently discussing their characteristics and applications in terms of two different approaches:data-based and physicsbased *** mathematical and physics models for each of the methods are summarized,together with the associated effect of key process parameters on the quality of the final *** on the comprehensive literature conducted,it was found that:(1)indirect measurement,especially the data-based method,plays a critical role when it comes to online process control and quality assurance in nanomanufacturing,because of the short processing time compared to the direct method,and(2)physics-based method is providing a way to optimize the process set up for desired geometrical dimensions.

关键词： Measurement Modeling nanomanufacturing Quality control

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CAD/CAM for scalable nanomanufacturing:A network-based system for hybrid 3D printing

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Microsystems & Nanoengineering 2017年第1期3卷 135-145页

作者： Hae-Sung Yoon Hyun-Taek Lee Ki-Hwan Jang Chung-Soo Kim Hyunseo Park Dae-Wook Kim Kunwoo Lee Sangkee Min Sung-Hoon Ahn BK21 Plus Transformative Training Program for Creative Mechanical and Aerospace Engineers Seoul National UniversitySeoul 08826Republic of Korea Department of Mechanical and Aerospace Engineering Seoul National UniversitySeoul 08826Republic of Korea Department of Mechanical Engineering University of Wisconsin-MadisonMadisonWI 53706USA Institute of Advanced Machines and Design Seoul National UniversitySeoul 08826Republic of Korea

Micro-and nano-structuring have been highlighted over several decades in both science and engineering *** addition to continuous efforts in fabrication techniques,investigations in scalable nanomanufacturing have been pursued to achieve reduced feature size,fewer constraints in terms of materials and dimensional complexity,as well as improved process *** this study,based on recent micro-/nanoscale fabrication processes,characteristics and key requirements for computer-aided design and manufacturing(CAD/CAM)systems for scalable nanomanufacturing were *** include a process knowledge database,standardized processing,active communication,adaptive interpolation,a consistent coordinate system,and management of peripheral *** scalable nanomanufacturing,it is important to consider the flexibility and expandability of each process,because hybrid and bridging processes represent effective ways to expand process *** an example,we describe a novel CAD/CAM system for hybrid three-dimensional(3D)printing at the *** novel hybrid process was developed by bridging aerodynamically focused nanoparticle printing,focused ion beam milling,micromachining,and spincoating *** system developed can print a full 3D structure using various inorganic materials,with a minimum process scale of 50 *** most obvious difference versus CAD/CAM at‘conventional’scales is that our system was developed based on a network to promote communication between users and process *** the network-based system,it is also possible to narrow the gap among different processes/*** anticipate that this approach can contribute to the development of CAD/CAM for scalable nanomanufacturing and a wide range of hybrid processes.

关键词： Computer-aided design and manufacturing(CAD/CAM) nanomanufacturing network-based 3D printing

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Surface Nanopatterning Using the Self-Assembly of Linear Polymers on Surfaces after Solvent Evaporation

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nanomanufacturing and Metrology 2022年第3期5卷 297-309页

作者： Emmanouil Glynos Alexandros Chremos Philip J.Camp Vasileios Koutsos School of Engineering Institute for Materials and ProcessesTheUniversity of EdinburghRobert Stevenson RoadEdinburgh EH93FBUK School of Chemistry The University of EdinburghDavid Brewster RoadEdinburgh EH93FJUK Department of Materials Science and Technology University of Crete71003 HeraklionGreece Section on Quanitative Imaging and Tissue Sciences Eunice Kennedy Shriver National Institute of Child Health and Human DevelopmentNational Institutes of HealthBethesdaMD 20892USA

The morphology of linear polybutadiene physisorbed on freshly cleaved mica from a dilute polymer solution is investigated through atomic force microscopy.A fine-structure study shows that the monolayer morphology in air(after rapid solvent evaporation)depends strongly on the molecular weight(Mw)of the linear polymer,the adsorbed amount,and the conformation adopted by the adsorbed polymer chains under good solvent *** dependence of the observed polymer structure on Mw is most significant for samples with high surface density,where the intermolecular interactions among the adsorbed polymers are *** high surface density,the adsorbed polymers tend to aggregate and minimize unfavorable contacts with air for all of the different Mw samples,leading to an isotropic structural *** structural phenomena with increasing surface density are explained on the basis of the intermolecular interactions of the adsorbed polymers under good solvent conditions,and after the abrupt solvent evaporation corresponding to poor solvent *** experimental observations are further discussed using the results obtained from molecular dynamics simulations of a simple coarse-grained model.

关键词： Surface nanopatterning Self-assembly nanomanufacturing

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Sub-10 nm fabrication:methods and applications

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International Journal of Extreme Manufacturing 2021年第3期3卷 17-47页

作者： Yiqin Chen Zhiwen Shu Shi Zhang Pei Zeng Huikang Liang Mengjie Zheng Huigao Duan National Engineering Research Center for High Efficiency Grinding State Key Laboratory of Advanced Design and Manufacturing for Vehicle BodyCollege of Mechanical and Vehicle EngineeringHunan UniversityChangsha 410082People’s Republic of China Advanced Design&Manufacturing Group for Micro/Nanophotonics Jihua LaboratoryFoshan 528000People’s Republic of China

Reliable fabrication of micro/nanostructures with sub-10 nm features is of great significance for advancing nanoscience and *** the capability of current complementary metal-oxide semiconductor(CMOS)chip manufacturing can produce structures on the sub-10 nm scale,many emerging applications,such as nano-optics,biosensing,and quantum devices,also require ultrasmall features down to single digital *** these emerging applications,CMOS-based manufacturing methods are currently not feasible or appropriate due to the considerations of usage cost,material compatibility,and exotic ***,several specific methods have been developed in the past decades for different *** this review,we attempt to give a systematic summary on sub-10 nm fabrication methods and their related *** the first and second parts,we give a brief introduction of the background of this research topic and explain why sub-10 nm fabrication is interesting from both scientific and technological *** the third part,we comprehensively summarize the fabrication methods and classify them into three main approaches,including lithographic,mechanics-enabled,and post-trimming *** fourth part discusses the applications of these processes in quantum devices,nano-optics,and high-performance ***,a perspective is given to discuss the challenges and opportunities associated with this research topic.

关键词： extremely small manufacturing sub-10 nm fabrication nanolithography nanomanufacturing atomic-scale manufacturing

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A Novel Approach to Fabricate Carbon Nanomaterials-Nanoparticle Solids through Aqueous Solutions and Their Applications

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nanomanufacturing and Metrology 2021年第4期4卷 226-236页

作者： Hammad Younes Haiping Hong G.P.Peterson Department of Electrical Engineering South Dakota School of Mines and TechnologySouth DakotaRapid City 57701USA Department of Mechanical Engineering Khalifa University of Science and TechnologyMasdar InstitutePO Box 54224Abu DhabiUAE Woodruff School of Mechanical Engineering Georgia Institute of TechnologyAtlantaGA 30332USA

A better understanding of the bonding and aggregation processes occurring between carbon nanomaterials and metal oxide particles in aqueous solutions is important in the development of novel nanosolids for applications in the areas of sensor development,highly conductive paint,nanotube alignment,polymer composites,Li-ion batteries,and many other *** current investigation reviews these processes and presents a detailed description of the aggregation processes occurring between carbon nanomaterials and metal oxide particles(metals)in various aqueous *** results indicate that the charge attraction between the particles results in a strong homogeneous bonding that occurs within the aqueous solution and for the first time demonstrate and describe the aggregation process of these *** relative importance of many parameters that impact the aggregation process is identified and discussed,and guidelines for controlling the aggregation process are *** is a simple and cost-effective process to manufacture a novel nano-solid based on carbon nanomaterial and metal *** addition,the process is easy to scale up and *** methodology could lead to many significant applications as well as commercialization.

关键词： Nanosolid Aggregation technique Nanofluids Charge attraction Nanoparticles nanomanufacturing

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Tip-and Laser-based 3D Nanofabrication in Extended Macroscopic Working Areas

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nanomanufacturing and Metrology 2021年第3期4卷 132-148页

作者： Ingo Ortlepp Thomas Frohlich Roland FuBl Johann Reger Christoph Schaffel Stefan Sinzinger Steffen Strehle ReneTheska Lena Zentner Jens-Peter Zollner Ivo WRangelow Carsten Reinhardt Tino Hausotte Xinrui Cao Oliver Dannberg Florian Fern David Fischer Stephan Gorges Martin Hofmann Johannes Kirchner Andreas Meister Taras Sasiuk Ralf Schienbein Shraddha Supreeti Laura Mohr-Weidenfeller Christoph Weise Christoph Reuter Jaqueline Stauffenberg Eberhard Manske Institute of Process Measurement and Sensor Technology Technische Universitat IlmenauEhrenbergstrasse 2998693 IlmenauGermany Control Engineering Group Technische Universitat IlmenauIlmenauGermany Optical Engineering Group.Technische Universitat Ilmenau IlmenauGermany Microsystems Technology Group.Technische Universitat Ilmenau IlmenauGermany Precision Engineering Group.Technische Universitat Ilmenau IlmenauGermany Compliant Systems Group Technische Universitat IlmenauIlmenauGermany Micro-and Nanoelectronic Systems Group Technische Universitat IlmenauIlmenauGermany Nanoscale Systems Group.Technische Universitat Ilmenau IlmenauGermany Division for Research Service and Technology Transfer Technische Universitat IlmenauIlmenauGermany Electronics Technology Group.Technische Universitat Ilmenau IlmenauGermany IMMS Institut flir Mikroelektronik-und Mechatronik-Systeme Gemeinniitzige GmbH(IMMS GmbH) IlmenauGermany Fachgebiet Technische Physik City University of Applied SciencesBremenGermany Lehrstuhl fiir Fertigungsmesstechnik Friedrich-Alexander-U niversitat(FAU)Erlangen-NiirnbergGermany JUMO GmbH&Co.KG FuldaGermany Asphericon GmbH JenaGermany

The field of optical lithography is subject to intense research and has gained enormous ***,the effort necessary for creating structures at the size of 20 nm and below is considerable using conventional *** effort and the resulting financial requirements can only be tackled by few global companies and thus a paradigm change for the semiconductor industry is conceivable:custom design and solutions for specific applications will dominate future development(Fritze in:Panning EM,Liddle JA(eds)Novel patterning *** society for optics and ***,Bellingham,***://***/10.1117/12.2593229).For this reason,new aspects arise for future lithography,which is why enormous effort has been directed to the development of alternative fabrication ***,the technologies emerging from this process,which are promising for coping with the current resolution and accuracy challenges,are only demonstrated as a proof-of-concept on a lab scale of several square *** scale is not adequate for the requirements of modern lithography;therefore,there is the need for new and alternative cross-scale solutions to further advance the possibilities of unconventional *** challenges arise because of the technical progress in various other fields,realizing new and unique functionalities based on nanoscale effects,e.g.,in nanophotonics,quantum computing,energy harvesting,and life *** platforms for basic research in the field of scale-spanning nanomeasuring and nanofabrication are necessary for these tasks,which are available at the Technische Universitiit Ilmenau in the form of nanopositioning and nanomeasuring(NPM)*** this equipment,the limits of technical structurability are explored for high-performance tip-based and laser-based processes for enabling real 3D nanofabrication with the highest precision in an adequate working range of several thousand cubic millimete

关键词： Nanomeasuring Nanopositioning nanomanufacturing Scale-spanning Tip-based Laser-based Nanofabrication

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Rapid synthesis of transition metal dichalcogenide-carbon aerogel composites for supercapacitor electrodes

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Microsystems & Nanoengineering 2017年第1期3卷 212-220页

作者： Matthew J.Crane Matthew B.Lim Xuezhe Zhou Peter J.Pauzauskie Department of Chemical Engineering University of WashingtonSeattleWA 98195-1750USA Department of Materials Science&Engineering University of WashingtonSeattleWA 98195-2120USA Fundamental&Computational Sciences Directorate Pacific Northwest National LaboratoryRichlandWA 99352USA

Transition metal dichalcogenide(TMD)materials have recently demonstrated exceptional supercapacitor properties after conversion to a metallic phase,which increases the conductivity of the ***,freestanding,exfoliated transition metal dichalcogenide films exhibit surface areas far below their theoretical maximum(1.2%),can fail during electrochemical operation due to poor mechanical properties,and often require pyrophoric chemicals to *** the other hand,pyrolyzed carbon aerogels exhibit extraordinary specific surface areas for double layer capacitance,high conductivity,and a strong mechanical network of covalent chemical *** this paper,we demonstrate the scalable,rapid nanomanufacturing of TMD(MoS2 and WS2)and carbon aerogel composites,favoring liquid-phase exfoliation to avoid pyrophoric *** aerogel matrix support enhances conductivity of the composite and the synthesis can complete in 30 *** find that the addition of transition metal dichalcogenides does not impact the structure of the aerogel,which maintains a high specific surface area up to 620 m^(2) g−1 with peak pore radii of 10 *** supercapacitor tests of the aerogels yield capacitances around 80 F g^(−1) at the lowest applied currents,the aerogels loaded with TMD’s exhibit volumetric capacitances up to 127% greater than the unloaded *** addition,the WS2 aerogels show excellent cycling stability with no capacitance loss over 2000 cycles,as well as markedly better rate capability and lower charge transfer resistance compared to their MoS2-loaded *** hypothesize that these differences in performance stem from differences in contact resistance and in the favorability of ion adsorption on the chalcogenides.

关键词： aerogel molybdenum disulfide nanomanufacturing rapid resorcinol-formaldehyde supercapacitor transition metal dichalcogenide tungsten disulfide

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