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第36届中国控制会议

作者： Han Chen Peng Yan Zhen Zhang School of Automation Science and Electrical Engineering Beihang University Key Laboratory of High-efficiency and Clean Mechanical Manufacture Ministry of EducationSchool of Mechanical EngineeringShandong University Department of Mechanical Engineering Tsinghua University

ISBN: (纸本)9781538629185

In this paper, a robust repetitive control for time delay systems is investigated supporting high precision tracking of nano-manipulating systems. To handle the time delay of such systems, the repetitive control structure is reformulated and the design of q filter is converted to the mixed sensitivity optimization of infinite dimensional systems, where Skew-Toeplitz based approach is used for controller synthesis. Real time experiments on a nano-manipulator are also deployed, where various periodic tracking results demonstrate the effectiveness of the proposed algorithm. The proposed algorithm has good potentials for high speed scanning applications such as AFM（Atomic Force Microscope） and STM（Scanning Tunneling Microscopy）.

关键词： Robust repetitive control time delay nano manipulation piezoelectric actuator

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A compact design of four-degree-of-freedom transmission electron microscope holder for quasi-four-dimensional characterization

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Science China(Technological Sciences) 2020年第7期63卷 1272-1279页

作者： ZHANG YiZhi BU YeQiang FANG XiaoYang WANG HongTao Center for X-Mechanics Zhejiang UniversityHangzhou 310027China Institute of Applied Mechanics Zhejiang UniversityHangzhou 310027China

Electron tomography(ET) has been demonstrated to be a powerful tool in addressing challenging problems, such as understanding 3 D interactions among various microstructures. Advancing ET to broader applications requires novel instrumentation design to break the bottlenecks both in theory and in practice. In this work, we built a compact four-degree-of-freedom(threedirectional positionings plus self-rotation) nano-manipulator dedicated to ET applications, which is called X-nano transmission electron microscope(TEM) holder. All the movements of the four degrees of freedom are precisely driven by built-in piezoelectric actuators, minimizing the artefacts due to vibration and drifting of the TEM stage. Full 360° rotation is realized with an accuracy of 0.05° in the whole range, which solves the missing wedge problem. Meanwhile, the specimen can move to the rotation axis with an integrated 3D nano-manipulator, greatly reducing the effort in tracking sample locations during ***, in-situ stimulation function can be seamlessly integrated into the X-nano TEM holder so that dynamic information can be uncovered. We expect that more delicate researches, such as those about 3D microstructural evolution, can be carried out extensively by means of this holder in the near future.

关键词： electron tomography in-situ transmission electron microscopy nano manipulation

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