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Flexible capacitive pressure sensor based on interdigital electrodes with porous microneedle arrays for physiological signal monitoring

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Nanotechnology and Precision Engineering 2024年第1期7卷 18-31页

作者： Jiahui Xu Minghao Wang Minyi Jin Siyan Shang Chuner Ni Yili Hu Xun Sun Jun Xu Bowen Ji Le Li Yuhua Cheng Gaofeng Wang School of Electronics&Information MOE Engineering Research Center of Smart Microsensors and MicrosystemsHangzhou Dianzi UniversityHangzhou 310018China Wenzhou Institute of Hangzhou Dianzi University Wenzhou 310018China Key Laboratory of Intelligent Operation and Maintenance Technology&Equipment for Urban Rail Transit of Zhejiang Province College of EngineeringInstitute of Precision Machinery and Smart StructureZhejiang Normal UniversityJinhua 321004China Institute of Guizhou Aerospace Measuring and Testing Technology Guiyang 550009China Unmanned System Research Institute Northwestern Polytechnical UniversityXi’an 710072China Research&Development Institute of Northwestern Polytechnical University in Shenzhen Shenzhen 518057China

Flexible pressure sensors have many potential applications in the monitoring of physiological signals because of their good biocompatibil-ity and ***,their relatively low sensitivity,linearity,and stability have hindered their large-scale commercial ***,aﬂexible capacitive pressure sensor based on an interdigital electrode structure with two porous microneedle arrays(MNAs)is *** porous substrate that constitutes the MNA is a mixed product of polydimethylsiloxane and *** to its porous and interdigital structure,the maximum sensitivity(0.07 kPa-1)of a porous MNA-based pressure sensor was found to be seven times higher than that of an imporous MNA pressure sensor,and it was much greater than that of aﬂat pressure sensor without a porous MNA ***-element analysis showed that the interdigital MNA structure can greatly increase the strain and improve the sensitivity of the *** addition,the porous MNA-based pressure sensor was found to have good stability over 1500 loading cycles as a result of its bilayer parylene-enhanced conductive electrode *** importantly,it was found that the sensor could accurately monitor the motion of aﬁnger,wrist joint,arm,face,abdomen,eye,and Adam’s ***,preliminary semantic recognition was achieved by monitoring the movement of the Adam’s ***,multiple pressure sensors were integrated into a 33 array to detect a spatial pressure distribu-×*** to the sensors reported in previous works,the interdigital electrode structure presented in this work improves sensitivity and stability by modifying the electrode layer rather than the dielectric layer.

关键词： Capacitive pressure sensor microneedle array Porous PDMS Interdigital electrode

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Scalable fabrication of microneedle arrays via spatially controlled UV exposure

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Microsystems & Nanoengineering 2016年第1期2卷 73-81页

作者： Hidetoshi Takahashi Yun Jung Heo Nobuchika Arakawa Tesuo Kan Kiyoshi Matsumoto Ryuji Kawano Isao Shimoyama Department of Mechano-Informatics Graduate School of Information Science and Technologythe University of Tokyo7-3-1 HongoBunkyo-kuTokyo 113-8656Japan Department of Mechanical Systems Engineering Graduate School of EngineeringTokyo University of Agriculture and Technology2-24-16 Naka-choKoganei-shiTokyo 184-8588Japan Department of Mechanical Engineering and Intelligent Systems Graduate School of Informatics and Engineeringthe University of Electro-Communications1-5-1 ChofugaokaChofu-shiTokyo 182-8585Japan IRT Research Initiative the University of Tokyo7-3-1 HongoBunkyo-kuTokyo 113-8656Japan Department of Biotechnology and Life Science Graduate School of EngineeringTokyo University of Agriculture and Technology2-24-16 Naka-choKoganei-shiTokyo 184-8588Japan

This paper describes a theoretical estimation of the geometry of negative epoxy-resist microneedles prepared via inclined/rotated ultraviolet(UV)lithography based on spatially controlled UV exposure *** comparison with other methods based on UV lithography,the present method can create microneedle structures with high *** negative photoresist is exposed to inclined/rotated UV through circular mask patterns,a three-dimensional,needle-shaped distribution of the exposure dose forms in the irradiated *** the inclination angles and the exposure dose modifies the photo-polymerized portion of the photoresist,thus allowing the variation of the heights and contours of microneedles formed by using the same mask *** an experimental study,the dimensions of the fabricated needles agreed well with the theoretical predictions for varying inclination angles and exposure *** results demonstrate that our theoretical approach can provide a simple route for fabricating microneedles with on-demand *** fabricated microneedles can be used as solid microneedles or as a mold master for dissolving microneedles,thus simplifying the microneedle fabrication *** envision that this method can improve fabrication accuracy and reduce fabrication cost and time,thereby facilitating the practical applications of microneedle-based drug delivery technology.

关键词： inclined/rotated lithography microneedle array UV exposure ratio

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Dry electrode for the measurement of biopotential signals

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Science China(Information Sciences) 2011年第11期54卷 2435-2442页

作者： WANG Yu 1,2,PEI WeiHua 2,GUO Kai 2,GUI Qiang 2,LI XiaoQian 2,CHEN HongDa 2 & YANG JianHong 11 Institute of Microelectronics,School of Physical Science and Technology,Lanzhou University Lanzhou 730000,China 2 State Key Laboratory on Integrated Optoelectronics,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China 1. Institute of Microelectronics School of Physical Science and Technology Lanzhou University Lanzhou 730000 China2. State Key Laboratory on Integrated Optoelectronics Institute of Semiconductors Chinese Academy of Sciences Beijing 100083 China

This paper introduces a kind of silicon-based dry electrode for measuring biological *** uses microneedle arrays to penetrate into the stratum corneum to reduce skin *** dry electrode requires neither skin preparation nor the electrolytic gel,is easy to use and causes no skin *** different technologies are chosen to manufacture microneedle arrays of dry *** is deep dry etching combined with isotropic wet *** other is mechanical dicing combined with chemical wet etching (including isotropic wet etching and anisotropic wet etching).microneedle arrays are coated with metal and divided into 25 mm 2 as dry electrode *** testing shows that the impedance value of dry electrode can be comparable with that of commercial electrode in the 20 Hz-10 kHz frequency *** steady-state visual evoked potential recording and analysis prove that the dry electrode can be used to detect electroencephalography.

关键词： dry electrode microneedle array dry etching wet etching EEG

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