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Ultra-Short Pulsed Laser Manufacturing and Surface Processing of microdevices

Engineering 2018年第6期4卷 779-786页

作者： Yongchao Yu Shi Bai Shutong Wang Anming Hu Department of Mechanical Aerospace and Biomedical EngineeringUniversity of TennesseeKnoxvilleTN 37996USA Institute of Laser Engineering Beijing University of TechnologyBeijing 100124China College of Electronics and Information Engineering Sichuan UniversityChengdu 610064China

Ultra-short laser pulses possess many advantages for materials *** laser has a significantly low thermal effect on the areas surrounding the focal point;therefore,it is a promising tool for micro-and submicro-sized precision *** addition,the nonlinear multiphoton absorption phenomenon of focused ultra-short pulses provides a promising method for the fabrication of various structures on transparent material,such as glass and transparent polymers.A laser direct writing process was applied in the fabrication of high-performance three-dimensional(3D)structured multilayer microsupercapacitors(MSCs)on polymer substrates exhibiting a peak specific capacitance of 42.6 mF·cm^-2 at a current density of 0.1 mA·cm^-***,a flexible smart sensor array on a polymer substrate was fabricated for multi-flavor *** surface treatments such as gold plating,reducedgraphene oxide(rGO)coating,and polyaniline(PANI)coating were accomplished for different measurement *** applying principal component analysis(PCA),this sensing system showed a promising result for flavor *** addition,two-dimensional(2D)periodic metal nanostructures inside 3D glass microfluidic channels were developed by all-femtosecond-laser processing for real-time surfaceenhanced Raman spectroscopy(SERS).The processing mechanisms included laser ablation,laser reduction,and laser-induced surface *** works demonstrate the attractive potential of ultra-short pulsed laser for surface precision manufacturing.

关键词： Ultra-short pulsed laser processing microdevices Supercapacitor Electronic tongue Surface-enhanced Raman spectroscopy

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Applications of ER fluid on microdevices and Single-phase ER effect

Applications of ER fluid on Microdevices and Single-phase ER...

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第六届全国电磁流变液及其应用学术会议

作者： Weijia Wen Department of Physics The Hong Kong University of Science and Technology, Hong Kong

Electrorheological(ER)fluid is considered as a kind of smart material which is able to be used for microdevice systems to achieve active and precise control of fluid by electrical signal,while such materials with"smart"character can broaden and enhance the functionalities of micro/nano ***,especially droplet microfluidic,attracts much attention recently from diverse research fields due to its highly integration,

关键词： ER fluid Single-phase ER effect microdevices

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Microstructuring of carbon/tin quantum dots via a novel photolithography and pyrolysis-reduction process

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Nano Research 2017年第11期10卷 3743-3753页

作者： Xufeng Hong Liang He Xinyu Ma Wei Yang Yiming Chen Lei Zhang Haowu Yan Zhaohuai Li Liqiang Mai State Key Laboratory of Advanced Technology for Materials Synthesis and Processing Wuhan University of Technology Wuhan 430070 China Department of Materials Science and NanoEngineering Rice University Houston TX 77005 USA Department of Chemistry University of California Berkeley CA 94720 USA

A novel microfabrication process based on optimized photolithography combined with pyrolysis-reduction is proposed to fabricate interdigital porous carbon/tin quantum dots （C/Sn QDs） microelectrodes.C/Sn QDs active microelectrodes are also employed as current collectors of a micro-supercapacitor （MSC）.A uniform dispersion of Sn QDs （diameter of ～3 nm） in the carbon matrix is achieved using our facile and controllable microfabrication *** as-fabricated C/Sn QDs MSC obtained by carbonization at 900 ℃ exhibits a higher areal specific capacitance （5.79 mF＆#183;cm-2） than that of the pyrolyzed carbonbased MSC （1.67 mF＆#183;cm-2） and desirable cycling stability （93.3% capacitance retention after 5,000 cyclic voltammetry cycles）.This novel microfabrication process is fully compatible with micromachining technologies,showing great potential for large-scale fine micropatterning of carbon-based composites for applications in micro/nano devices.

关键词： carbon micro-supercapacitors quantum dots photolithography microdevices

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3D printed millireactors for process intensification

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Chinese Journal of Chemical Engineering 2020年第1期28卷 180-190页

作者： Harrson S.Santana Alan C.Rodrigues Mariana G.M.Lopes Felipe N.Russo Joao L.Silva Jr Osvaldir P.Taranto School of Chemical Engineering University of CampinasBrazil Federal Institute of Education Science and Technology of South of Minas GeraisBrazil

The scope of the present research aims at demonstrating the 3D printing use in the manufacturing of microchannels for chemical process applications. A comparison among digital model processing applications for 3D print(slicers) and a print layer thickness analysis were performed. The 3D print fidelity was verified in several devices, including the microchannels’ printing with and without micromixer zones. In order to highlight the 3D print potential in Chemical Engineering, the biodiesel synthesis was also carried out in a millireactor manufactured by 3D printing. The millireactor operated under laminar flow regime with a total flow rate of 75.25 ml·min^-1(increment of about 130 times over traditional microdevices used for biodiesel production).The printed millireactor provided a maximum yield of Ethyl Esters of 73.51% at 40 ℃, ethanol:oil molar ratio of7 and catalyst concentration of 1.25 wt% and residence time about 10 s. As a result of flow rate increment attained in the millireactor, the number of required units for scaling-up the chemical processes is reduced. Using the approach described in the present research, anyone could produce their own millireactor for chemical process in a simple way with the aid of a 3D printer.

关键词： Process intensification 3D printer Millireactors Micromixers microdevices Biodiesel

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Casimir Effect in Optoelectronic Devices Using Ferrofluids

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Journal of Electronic Science and Technology 2020年第1期18卷 76-82页

作者： Elena N.Velichko Galina L.Klimchitskaya Elina N.Nepomnyashchaya Institute of Physics Nanotechnology and TelecommunicationsPeter the Great St.Petersburg Polytechnic UniversitySt.Petersburg 195251 Department of Astrophysics Central Astronomical Observatoryat Pulkovo of the Russian Academy of SciencesSt.Petersburg 196140

Some of the modern electronic and optoelectronic devices exploit ferrofluids contained in narrow gaps between two material plates. When the width of the gap becomes below a micrometer, the boundary plates are subjected to the Casimir force arising from the zero-point and thermal fluctuations of the electromagnetic field. These forces should be taken into account in microdevices with the dimensions decreased to below a micrometer. In this paper, we review recently performed calculations of the attractive Casimir pressure in three-layer systems containing a ferrofluid. We also find the ferrofluidic system where the Casimir pressure is repulsive. This result is obtained in the framework of the fundamental Lifshitz theory of van der Waals and Casimir forces. The conclusion is made that enhanced repulsion due to the presence of a ferrofluid may prevent from sticking of closely spaced elements of a microdevice.

关键词： Casimir pressure ferrofluids microdevices repulsion

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Microfabricated platforms to investigate cell mechanical properties

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Medicine in Novel Technology and Devices 2022年第1期13卷 49-58页

作者： Amir M.Esfahani Grayson Minnick Jordan Rosenbohm Haiwei Zhai Xiaowei Jin Bahareh Tajvidi Safa Justin Brooks Ruiguo Yang Department of Mechanical and Materials Engineering University of Nebraska-LincolnLincolnNE68516USA Nebraska Center for Integrated Biomolecular Communication University of Nebraska-LincolnLincolnNE68588USA Mary and Dick Holland Regenerative Medicine Program University of Nebraska Medical CenterOmahaNE68198USA Department of Bioengineering School of MedicineJohns Hopkins UniversityBaltimoreMD21205USA

Mechanical stimulation has been imposed on living cells using several *** early investigations were conducted on groups of cells,utilizing techniques such as substrate deformation and flow-induced *** investigate the properties of cells individually,many conventional techniques were utilized,such as AFM,optical traps/optical tweezers,magnetic beads,and micropipette *** specific mechanical interrogations,microelectro-mechanical systems(MEMS)have been designed to probe single cells in different interrogation *** exert loads on the cells,these devices often comprise piezo-electric driven actuators that attach directly to the cell or move a structure on which cells are *** and biaxial pullers,micropillars,and cantilever beams are examples of MEMS *** this review,the methodologies to analyze single cell activity under external loads using microfabricated devices will be *** will focus on the mechanical interrogation in three different regimes:compression,traction,and tension,and discuss different microfabricated platforms designed for these purposes.

关键词： BioMEMS Single cell Mechanical properties microdevices

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