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Active Vibration Isolation of micro-manufacturing platform Based on Neural Network

厦门大学学报（自然科学版） 2002年第S1期41卷 67-68页

作者： ZHANG Chun-liang, MEI De-qing, CHEN Zi-chen (Institute of Production Engineering, Zhejiang University, Hangzhou 310027, China)

The micromation and precision of the micro-Electromechanical System demand that its manufacturing, measuring and assembling must work in a micro-manufacturing platform with good ability to isolate vibrations. This paper develops a vibration isolation system of micro-manufacturing platform. The brains of many kinds of birds can isolate vibrations well, such as woodpecker’s brain. When a woodpecker pecks the wood at the speed as 1.6 times as the velocity of sound, its brain will tolerate the wallop 1 500 times of the weight of itself without any damage. The isolation mechanics and organic texture of woodpecker’s brain that has good isolation characteristics were studied. A structure model of vibration isolation system for the micro-manufacturing platform is established based on the bionics of the bird’s brain vibration isolation mechanism. In order to isolate effectively the high frequency vibrations from the ground, a rubber layer is used to isolate vibrations passively between the micro-manufacturing platform’s pedestal and the ground. This layer corresponds to the cartilage and muscles in the outer meninges of the bird’s brain. The active vibration isolation technique is adopted to isolate vibrations between the micro-manufacturing platform and the pedestal. Air springs are used as elastic components, which correspond to the interspaces between the outer meninges and the encephala of the bird’s brain. Actuators are made of giant magnetostrictive material, and it corresponds to the nerves and neural muscles linking the meninges and the encephala. The actuators and air springs are arranged vertically in parallel to make use of the giant magnetostrictive actuators effectively. The air springs support almost all weight of the micro-manufacturing platform and the giant magnetostrictive actuators support almost no weight. In order to realize high performance to isolate complex micro-vibration, the control method using a three-layer neural network is presented. This vibra

关键词： micro-manufacturing platform active vibration isolation bionic mechanics neural network

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