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System on chip thermal vacuum sensor based on standard CMOS process

Journal of Semiconductors 2009年第3期30卷 104-108页

作者：李金凤唐祯安汪家奇 Department of Electronic Engineering Dalian University of Technology College of Information Engineering Shenyang Institute of Chemical Technology

An on-chip microelectromechanical system was fabricated in a 0.5μm standard CMOS process for gas pressure detection. The sensor was based on a micro-hotplate （MHP） and had been integrated with a rail to rail operational amplifier and an 8-bit successive approximation register （SAR） A/D converter. A tungsten resistor was manufactured on the MHP as the sensing element, and the sacrificial layer of the sensor was made from polysilicon and etched by surface-micromachining technology. The operational amplifier was configured to make the sensor operate in constant current mode. A digital bit stream was provided as the system output. The measurement results demonstrate that the gas pressure sensitive range of the vacuum sensor extends from 1 to 105 Pa. In the gas pressure range from 1 to 100 Pa, the sensitivity of the sensor is 0.23 mV/Pa, the linearity is 4.95%, and the hysteresis is 8.69%. The operational amplifier can drive 200 Ω resistors distortionlessly, and the SAR A/D converter achieves a resolution of 7.4 bit with 100 kHz sample rate. The performance of the operational amplifier and the SAR A/D converter meets the requirements of the sensor system.

关键词： micro-hotplate thermal vacuum sensor monolithic operational amplifier SAR ADC

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A NOVEL micro-PELLISTOR BASED ON NANOPOROUS ALUMINA BEAM SUPPORT

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Journal of Electronics(China) 2012年第5期29卷 469-472页

作者： Chen Qingyong Dong Hanpeng Xia Shanhong State Key Laboratory of Transducer Technology Institute of Electronics Chinese Academy of Sciences Graduate University of Chinese Academic of Sciences

The traditional design of the catalytic combustion gas sensor in micro ElectroMechanical Systems (MEMS) micro-hotplate employs a Pt resistive track as the micro-heater. The realized structure and fabrication are the key elements of the micro-hotplate. Directly fabrication of micro-pellsitor catalyst is very difficult because of the small dimensions of the active area. In this paper, a novel micro-pellistor was designed by combining micro fabrication technique and nano technology. The supporting beams and micro-hotplate of the micro-pellistor were made of nonoporous alumina film. The active area of the designed and fabricated micro-pellistors ranges from 200×200 μm2 to 450×300 μm2. The micro- pellistor was heated by platinum thin film heater and the Pd catalyst was deposited by dipping the PdCl2 solution on the detecting element. The lowest power consumption is 50 mW at 500 °C and the maximum temperature can reach 900 °C before rupture. The response of the devices to methane is also tested. The new design provides a new way to fabricate micro-pellistor.

关键词： micro-hotplate Pellistor Gas sensor

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