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Al-doped ZnO/WO_(3) heterostructure films prepared by magnetron sputtering for isopropanol sensors

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Rare metals 2024年第1期43卷 247-256页

作者： Wei-Xiang Gao Xue-Ting Chang Xiao-Jie Zhu Jun-Feng Li Ying-Chang Jiang Dong-Sheng Wang Chuan-Xiao Yang Shi-Bin Sun College of Logistics Engineering Shanghai Maritime UniversityShanghai 201306China College of Ocean Science and Engineering Shanghai Maritime UniversityShanghai 201306China Institute of Logistics Science and Engineering Shanghai Maritime UniversityShanghai 201306China

metal oxide semiconductors(MOSs) are ideal sensing materials for detecting volatile organic compounds due to their low cost, diversity, high stability, and ease of production. However, it remains a grand challenge to develop the MOSs-based gas sensors for sensing isopropanol with desired performance via a simple, effective,and controllable method. Herein, we reported the preparation of the Al-doped Zn O(AZO)/WO_(3) heterostructure films by directly depositing the AZO coating onto the WO_(3) coating using a strategy of magnetron sputtering. The AZO/WO_(3) heterostructure films were constructed by numbers of irregular nanoparticles that were interconnected with each other. The AZO/WO_(3) heterostructure films-based gas sensors exhibited excellent isopropanolsensing performance with high response, promising selectivity, low detection limit, fast response rate, wide detection range, and ideal reproducibility. The promising isopropanol-sensing performance of the AZO/WO_(3) heterostructure films arises mainly from their high uniformity, unique microstructures with high surface roughness,and the construction of the heterostructure between the AZO and WO_(3) coatings. This work provides a versatile approach to prepare the MOSs-based heterostructure films for assembling the gas sensors.

关键词： metal oxide semiconductors Gas sensors Aldoped ZnO/WO_(3) Heterostructure films Isopropanol Magnetron sputtering

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Simple point contact WO_3 sensor for NO_2 sensing and relevant impedance analysis

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International Journal of Minerals,metallurgy and Materials 2012年第12期19卷 1142-1148页

作者： Wu-bin Gao Yun-han Ling Xu Liu Jia-lin Sun School of Materials Science and Engineering University of Science and Technology Beijing Beijing 100083 China Department of Materials Science and Engineering Tsinghua University Beijing 100084 China

A simple and new point contact tungsten trioxide （WO3） sensor, which can be prepared by the oxidation of tungsten filaments via in-situ induction heating, likely detects low concentration （ppm level） environmental pollutants such as NO2. X-ray diffraction （XRD） and field emission scanning electron microscopy （FE-SEM） were applied to characterize the phase and the microstructure of the samples, respec-tively. It was found that the synthesized WO3 films exhibited a monoclinic phase and were composed of hierarchical microcrystals and nanocrystals. The point contact WO3 sensor （W-WO3-W） showed rectifying characteristics and an ideal sensing performance of about 110 C. A single semicircle in Nyquist plots was recorded by electrochemical impedance spectroscopy （EIS） at a relatively low temperature of 150 C but faded away above 200 C, which revealed that the sensing process was governed by a determining factor, i.e., grain boundaries at the contact site.

关键词： gas sensors tungsten trioxide metal oxide semiconductors thin fills microcrystals nanocrystals electrochemical impedancespectroscopy (EIS)

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Room temperature H2S micro-sensors with anti-humidity properties fabricated from NiO-In2O3 composite nanofibers

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Science Bulletin 2013年第7期58卷 821-826页

作者： YUE XueJun HONG TianSheng YANG Zhou HUANG ShuangPing Key Laboratory of Key Technology on Agricultural Machine and Equipment Ministry of EducationCollege of EngineeringSouth China Agricultural University

NiO-In2O3 composite nanofibers are synthesized via electrospinning and calcining ***-sensors are fabricated by sputtering Pt electrodes on Si chips to form sensor substrates,and then spinning the NiO-In2O3 composite nanofibers onto the sensor substrate *** as-fabricated micro-sensors exhibit excellent H2S sensing properties at room *** sensitivity of the micro-sensors is up to 6 when the sensors are exposed to 3μL/LH2S,and the corresponding response and recovery times are 14 and 22 s,*** micro-sensors also exhibit high selectivity and good ***,the micro-sensors can operate at various humidity *** sensitivity of the micro-sensors is 3.8 to 3μL/LH2S at 75% relative *** characteristics make the micro-sensors good candidates for practical H2S sensors with high performance.

关键词： gas sensors nanofibers micro-sensors metal oxide semiconductors nanomaterials

Room temperature H_2S micro-sensors with anti-humidity properties fabricated from NiO-In_2O_3 composite nanofibers

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Science China(Technological Sciences) 2013年第3期56卷 821-826页

NiO-In2O3 composite nanofibers are synthesized via electrospinning and calcining techniques. Micro-sensors are fabricated by sputtering Pt electrodes on Si chips to form sensor substrates, and then spinning the NiO-In2O3 composite nanofibers onto the sensor substrate surface. The as-fabricated micro-sensors exhibit excellent H2S sensing properties at room temperature. The sensi- tivity of the micro-sensors is up to 6 when the sensors are exposed to 3 μL/L HzS, and the corresponding response and recovery times are 14 and 22 s, respectively. The micro-sensors also exhibit high selectivity and good stability. Especially, the micro-sensors can operate at various humidity conditions. The sensitivity of the micro-sensors is 3.8 to 3 μL/L HzS at 75% relative humidity. These characteristics make the micro-sensors good candidates for practical H2S sensors with high performance.

关键词： gas sensors nanofibers micro-sensors metal oxide semiconductors nanomaterials

Improved and excellent ethanol sensing properties of SnO2/multiwalled carbon nanotubes

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Science Bulletin 2010年第Z1期 382-385页

作者： LIU Li1, ZHUANG Juan2, LIU KuiXue3, WANG LianYuan1, LI ShouChun1, LI Wei1 & LI XiaoLong41National Laboratory of Superhard Materials, College of Physics, Jilin University, Changchun 130012, China 2School of Physics and Optoelectronic Engineering, Dalian University of Technology, Dalian 116024, China 3State Key Laboratory on Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, Changchun 130012, China 4College of Instrumentation and Electrical Engineering, Jilin University, Changchun 130026, China

SnO2/multiwalled carbon nanotubes (MWNTs) have been studied as gas sensing materials. Compared with pure SnO2, SnO2/MWNTs exhibit improved ethanol sensing properties such as higher sensitivity and quicker response/recovery at 300°C. The sensitivity is 35, 65, 166 and 243 to 500, 1000, 2000 and 3000 ppm ethanol, respectively. The response time is about 1 s, and the recovery time is about 5 s. The sensing improvement is explained in terms of the appropriate basal resistance and enhanced signal transfer brought by MWNTs.

关键词： metal oxide semiconductors gas sensors SnO2 multiwalled carbon nanotubes ethanol

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