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Ultrafast growth of large single crystals of monolayer WS2 and WSe2

National Science Review 2020年第4期7卷 737-744页

作者： Zhengwei Zhang Peng Chen Xiangdong Yang Yuan Liu Huifang Ma Jia Li Bei Zhao Jun Luo Xidong Duan Xiangfeng Duan State Key Laboratory for Chemo/Biosensing and Chemometrics College of Chemistry and Chemical Engineering Hunan University Department of Applied Physics School of Physics and Electronics Hunan University Center for Electron Microscopy Institute for New Energy Materials and Low-Carbon Technologies School of Materials Tianjin University of Technology Department of Chemistry and Biochemistry University of California

Monolayer transition metal dichalcogenides（TMDs） have attracted considerable attention as atomically thin semiconductors for the ultimate transistor scaling. For practical applications in integrated electronics,large monolayer single crystals are essential for ensuring consistent electronic properties and high device yield. The TMDs available today are generally obtained by mechanical exfoliation or chemical vapor deposition（CVD） growth, but are often of mixed layer thickness, limited single crystal domain size or have very slow growth rate. Scalable and rapid growth of large single crystals of monolayer TMDs requires maximization of lateral growth rate while completely suppressing the vertical growth, which represents a fundamental synthetic challenge and has motivated considerable efforts. Herein we report a modified CVD approach with controllable reverse flow for rapid growth of large domain single crystals of monolayer TMDs. With the use of reverse flow to precisely control the chemical vapor supply in the thermal CVD process, we can effectively prevent undesired nucleation before reaching optimum growth temperature and enable rapid nucleation and growth of monolayer TMD single crystals at a high temperature that is difficult to attain with use of a typical thermal CVD process. We show that monolayer single crystals of 450 μm lateral size can be prepared in 10 s, with the highest lateral growth rate up to 45 μm/s. Electronic characterization shows that the resulting monolayer WSe2material exhibits excellent electronic properties with carrier mobility up to 90 cm2V-1s-1, comparable to that of the best exfoliated monolayers. Our study provides a robust pathway for rapid growth of high-quality TMD single crystals.

关键词： monolayer transition metal dichalcogenides large single crystal CVD ultrafast growth

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