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Synthesis of indium tin oxide nano-polycrystalline powders by ultrasonic spray pyrolysis

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Rare Metals 2022年第10期41卷 3579-3584页

作者： Li-Hua Zhang Sheng-Hui Guo Chao-Jin Zhou Jin-Hui Peng Shao-Hua Ju Jian-Bo Lan Yunnan Provincial Key Laboratory of Intensification Metallurgy Kunming650093China Key Laboratory of Unconventional Metallurgy Ministry of EducationKunming650093China National Local Joint Laboratory of Engineering Application of Microwave Energy and Equipment Technology Kunming650093China Faculty of Metallurgical and Energy Engineering Kunming University of Science and TechnologyKunming650093China State Key Laboratory of Complex Nonferrous Metal Resources Clean Utilization Kunming650093China

indium tin oxide(ITO) nano-polycrystalline powders were prepared by ultrasonic spray pyrolysis(USP) method using a precursor solution of indium and tin chlorides in a simple one-step process without any post-heat treatment,additives and other complex *** morphology and crystal structure of ITO powders were studied by thermogravimetric and differential thermal analysis(TG-DTA),X-ray diffraction(XRD),energy-dispersive spectrometer(EDS),scanning electron microscopy(SEM),laser particle size analyzer(LPSA),transmission electron microscope(TEM),high-resolution transmission electron microscopy(HRTEM) and selected area electron diffraction(SAED),*** results indicate that pure cubic ITO solid solution could be obtained at and above the pyrolysis temperature of 600℃.Through adjusting the size of atomized precursor droplets,the particles with regular spherical shape and smooth surface are also *** spherical particles have a narrow size distribution with a dominant diameter size in the range of 0.52-1.28 μm,and the average value is 1.01 μ*** clear lattice fringes in HRTEM image confirm a polycrystalline structure of ITO particles with the growth direction along(222) direction.

关键词： indium tin oxide Ultrasonic spray pyrolysis Nano-polycrystalline powder Chloride precursor

Novel seed-assisted synthesis of indium tin oxide submicro-cubes and their resistivity

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Frontiers of Chemical Science and Engineering 2023年第5期17卷 557-569页

作者： ting Liu Zhucheng Jiang Jiaxiang Liu Beijing Key Laboratory of Electrochemical Process and Technology for Materials College of Materials Science and EngineeringBeijing University of Chemical TechnologyBeijing 100029China

indium tin oxide films,an important n-type semiconductor oxide,show great prospects in optoelectronic device ***,as a key raw material of targets for sputtering films,it is important to prepare low-resistivity indium tin oxide ***,low-resistivity indium tin oxide submicro-cubes are synthesized by a seed-assisted coprecipitation *** effects of seed content,In^(3+)concentration,aging time,reaction temperature and calcination temperature on resistivity were investigated by single factor and orthogonal *** ensure reliability and reproducibility of data,each experiment was repeated three times and resistivity of each sample was measured three times to obtain average *** results indicated that optimal sample was matched with cubic phase In_(2)O_(3).The single-crystal indium tin oxide particles exhibited a regular cubic shape with a size of nearly 500 nm and low resistivity of 0.814Ω·*** with particles prepared by the conventional coprecipitation method,indium tin oxide submicro-cubes showed good *** presence of seed particles provided nucleation sites with lower energy barriers and promoted formation of *** face-to-face contact among particles and good dispersion contributed to electron transfer,resulting in lower *** seed-assisted synthesis provides a novel way to prepare low-resistivity indium tin oxide submicro-cubes.

关键词： indium tin oxide submicro-cubes resistivity seed-assisted coprecipitation method orthogonal experiment

Preparation of High Quality indium tin oxide Film on a Microbial Cellulose Membrane Using Radio Frequency Magnetron Sputtering

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Chinese Journal of Chemical Engineering 2011年第2期19卷 179-184页

作者：杨加志赵成刚刘晓丽于俊伟孙东平唐卫华 School of Chemislxy and Chemical Engineering Nanjing University of Science and Technology Nanjing 210094 China School of Mechanical Engineering Anyang Institute of Technology Anyang 455000 China

Microbial cellulose （MC） membranes produced by Acetobacter xylinum NUST4.1,were used as flexible substrates for the fabrication of transparent indium tin oxide （ITO） *** and conductive ITO thin films were deposited on MC membrane at room temperature using radio frequency （RF） magnetron *** optimum ITO deposition conditions were achieved by examining crystalline structure,surface morphology and op-toelectrical characteristics with X-ray diffraction （XRD）,scanning electron microscopy （SEM）,atomic force mi-croscopy （AFM）,and UV *** sheet resistance of the samples was measured with a four-point probe and the resistivity of the film was *** results reveal that the preferred orientation of the deposited ITO crystals is strongly dependent upon with oxygen content （O2/Ar,volume ratio） in the sputtering *** the ITO crystalline structure directly determines the conductivity of ITO-deposited *** conductive [sheet resis-tance ～120 Ω·square-1 （Ω·sq-1）] and transparent （above 76%） ITO thin films （240 nm thick） were obtained with a moderate sputtering power （about 60 W） and with an oxygen flow rate of 0.25 ml·min-1 （sccm） during the *** results show that the ITO-MC electrodes can find their potential application in optoelectrical devices.

关键词： thin films magnetron sputtering microbial cellulose membrane optical properties indium tin oxide

Optimization of Sputtering Parameters for the Deposition of Low Resistivity indium tin oxide Thin Films

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Acta Metallurgica Sinica(English Letters) 2014年第2期27卷 324-330页

作者： Navid Yasrebi Behrang Bagheri Payam Yazdanfar Bizhan Rashidian Pezhman Sasanpour Department of Electrical Engineering Sharif University of Technology Department of Medical Physics and Biomedical Engineering Faculty of MedicineShahid Beheshti University of Medical Sciences

indium tin oxide （ITO） thin films have been deposited using RF sputtering technique at different pressures, RF powers, and substrate temperatures. Variations in surface morphology, optical properties, and film resistances were measured and analyzed. It is shown that a very low value of sheet resistance （1.96 Ω/sq.） can be achieved with suitable arrangement of the deposition experiments. First, at constant RF power, deposition at different pressure values is done, and the condition for achieving minimum sheet resistance （26.43 Ω/sq.） is found. In the next step, different values of RF powers are tried, while keeping the pressure fixed on the previously found minimum point （1-2 Pa）. Finally, the minimum resistivity is obtained by sweeping the substrate temperatures, while keeping RF power and the working pressure at their optimum values. Furthermore, the effects of process parameters on properties, such as the surface morphology and the optical transmission, are discussed. Although the point of minimum resistivity does not coincide with that of the maximum transparency of ITO film, relatively acceptable values of transmittance （approximately 75% on a glass substrate with intrinsic transparency of 89%） can be obtained.

关键词： indium tin oxide Sputtering Deposition Parameters optimization

Isothermal thermo-analytical study and decomposition kinetics of non-activated and mechanically activated indium tin oxide(ITO) scrap powders treated by alkaline solution

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Transactions of Nonferrous Metals Society of China 2015年第5期25卷 1657-1676页

作者： B.JANKOVI Department for Dynamics and Matter Structure Faculty of Physical ChemistryUniversity of Belgrade

Isothermal decomposition process of chemically transforming indium tin oxide（ITO） powders into indium（III） hydroxide powders was investigated. Two types of powders were analyzed, i.e., non-activated and mechanically activated. It has been found that in the case of activated sample, shorter induction periods appear, which permits growth of smaller crystals, while in the case of non-activated sample, long induction periods appear, characterized by the growth of larger crystals. DAEM approach has shown that decomposition processes of non-activated and mechanically activated samples can be described by contracting volume model with a linear combination of two different density distribution functions of apparent activation energies（Ea）, and with first-order model, with a single symmetrical density distribution function of Ea, respectively. It was established that specific characteristics of particles not only affect the mechanism of decomposition processes, but also have the significant impact on thermodynamic properties.

关键词： indium tin oxide mechanical activation chemical preparation grain boundaries thermal properties decomposition kinetics

Fabrication and Significant Photoelectrochemical Activity of Titania Nanotubes Modified with Thin indium tin oxide Film

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Acta Metallurgica Sinica(English Letters) 2017年第12期30卷 1210-1220页

作者： Katarzyna Siuzdak Mariusz Szkoda Jakub Karczewski Jacek Ryl Kazimierz Darowicki Katarzyna Grochowska Centre for Plasma and Laser Engineering The Szewalski Institute of Fluid-Flow Machinery Polish Academy of Sciences Fiszera 14 80-231 Gdansk Poland Department of Chemistry and Technology of Functional Materials Chemical Faculty Gdańsk University of Technology Narutowicza 11/12 80-233 Gdansk Poland Faculty of Applied Physics and Mathematics Gdansk University of Technology Narutowicza 11/12 80-233 Gdafisk Poland Department of Electrochemistry Corrosion and Materials Engineering Gdansk University of Technology Narutowicza 11/12 80-233 Gdafisk Poland

Ordered titanium dioxide nanotubes （TiOaNTs） modified with indium tin oxide （ITO） films were obtained via magnetron sputtering, in which ITO plate was used as a target, onto the as-anodized titania support followed by the calcination process. The morphology of fabricated material with deposited oxide was investigated using scanning electron microscopy. Raman and UV-Vis spectroscopies were utilized to characterize crystalline phase and optical properties of prepared samples, whereas X-ray photoelectron spectroscopy allowed determining the binding energy of present elements. In the case of titanium, three various oxidation states were identified and also the presence of indium and tin was confirmed. The electrochemical test carried out when the sample was exposed to light allows for selection of the most photoactive material. The highest photocurrent was registered when only 5-nm ITO layer was sputtered, and it equals 256 and 133 μA cm^-2 for the electrode material immersed in 0.5 M KOH and K2SO4 electrolytes, respectively, that is accordingly 3.5 and 4.4 times higher than the one observed for pristine titania. Furthermore, ITO-modified titania exhibits excellent photostability upon prolonged illumination that is of key importance for possible application in light-driven processes.

关键词： Titania nanotubes indium tin oxide Photoactivity Anodization Magnetron sputtering Electrochemical activity

Synthesis and sintering of indium tin oxide nanoparticles by citrate-nitrate combustion method

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Rare Metals 2010年第4期29卷 355-360页

作者： WANG Haiwen XU Xiujuan LI Xiuhua ZHANG Jianrong LI Chunzhong Department of Chemistry Key Laboratory for Advanced Materials of the Ministry of Education of China East China University of Science and Technology Shanghai 200237 China Key Laboratory for Ultrafine Materials of the Ministry of Edueation of China East China University of Science and Technology Shanghai 200237 China

Spherical indium tin oxide （ITO） nanoparticles were synthesized by combustion method using citric acid as fuel and nitrates as oxidizer. The obtained ITO nanoparticles were characterized by TG-DSC, FT-IR, XRD, BET, TEM, and SEM. The ITO nanoparticles grew steadily with the increase of heat treatment temperature, and the 700~C calcined particles had a crystallite size of 25.3 nm and a specific surface area of 26.1 m2.g i The avoidance of chlorine ions in the synthesis process decreases particle agglomeration and promotes powder densification. The 900~C sintered pellet had a density of 67.6% of theoretical density （TD） and increased steadily to 97.3% for the 1400℃ sintered ceramics, respectively.

关键词： oxide materials ceramics sintering indium tin oxide

Fabrication and Properties of DC Magnetron Sputtered indium tin oxide on Flexible Plastic Substrate

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Journal of Materials Science & Technology 2009年第1期25卷 119-122页

作者： Hui Lin Junsheng Yu Nana Wang Shuangling Lou Yadong Jiang State Key Laboratory of Electronic Thin Films and Integrated Devices School of Optoelectronic Information University of Electronic Science and Technology of China （UESTC） Chengdu 610054 China

indium tin oxide （ITO） thin films deposited on flexible polyethylene terephthalate （PET） substrates at low temperature by DC magnetron sputtering from an In-Sn （90-10 wt pct） alloy target were studied. The correla- tion between deposition conditions and ITO property was systematically investigated and characterized. These as-deposited ITO films were used as the anode contact for flexible organic light-emitting diodes （FOLEDs）. The fabricated FOLEDs with a structure of PET/ITO/NPB （50 nm）/Alq （20 nm）/Mg：Ag （100 nm） showed a maximum luminance of 2125 cd/m^2 at 13 V.

关键词： Flexible Organic light-emitting diodes indium tin oxide DC sputtering

A Cost-Effective Co-precipitation Method for Synthesizing indium tin oxide Nanoparticles without Chlorine Contamination

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Journal of Materials Science & Technology 2010年第11期26卷 1037-1040页

作者： Haiwen Wang Xiujuan Xu Jianrong Zhang Chunzhong Li Department of Chemistry Key Laboratory for Advanced Materials of Ministry of Education East China University of Science and Technology Shanghai 200237 China Key Laboratory for Ultrafine Materials of Ministry of Education East China University of Science and Technology Shanghai 200237 China

indium tin oxide （ITO） nanoparticles with crystallite size of 12.6 nm and specific surface area of 45.7 m 2 ·g-1 were synthesized by co-precipitation *** indium solution was obtained by dissolving metal indium in *** tin solution was obtained by dissolving metal tin in HNO3 and followed by stabilizing with citric *** free of chlorine ions in the synthesis process brought several advantages：shortening the synthesis time,decreasing the particle agglomeration,decreasing the chlorine content in the ITO nanoparticles and improving the particle *** is the first time to report the synthesis of ITO nanoparticles free from chlorine contamination without using the expensive metal alkoxides as starting materials.

关键词： Nanomaterials Powder technology indium tin oxide Coprecipitation method