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Performance of beam-type piezoelectric vibration energy harvester based on ZnO film fabrication and improved energy harvesting circuit

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Chinese Physics B 2020年第8期29卷 507-515页

作者： Shan Gao Chong-Yang Zhang Hong-Rui Ao Hong-Yuan Jiang School of Mechatronics Engineering Harbin Institute of TechnologyHarbin 150001China

We demonstrate a piezoelectric vibration energy harvester with the ZnO piezoelectric film and an improved synchronous electric charge extraction energy harvesting circuit on the basis of the beam-type mechanical structure,especially investigate its output performance in vibration harvesting and ability to generate *** establishing the theoretical model for each of vibration and circuit,the numerical results of voltage and power output are *** fabricating the prototype of this harvester,the quality of the sputtered film is *** and experimental analyses are conducted in open-circuit and closed-circuit conditions,where the open-circuit mode refers to the voltage output in relation to the ZnO film and external excitation,and the power output of the closed-circuit mode is relevant to *** findings show good agreement with the theoretical ones,in the output *** is observed that the properties of ZnO film achieve regularly direct proportion to output performance under different ***,a maximum experimental power output of 4.5 mW in a resistance range of 3 kΩ-8 kΩis achieved by using an improved synchronous electric charge extraction *** result is not only more than three times the power output of classic circuit,but also can broaden the resistance to a large range of 5 kΩunder an identical maximum value of power *** this study we demonstrate the fundamental mechanism of piezoelectric materials under multiple conditions and take an example to show the methods of fabricating and testing the ZnO ***,it may contribute to a novel energy harvesting circuit with high output performance.

关键词： piezoelectric vibration energy harvester beam-type structure ZnO film improved synchronous electric charge extraction circuit

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