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Deposition of Diamond-Like Carbon on Inner Surface by hollow cathode discharge

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Plasma Science and Technology 2014年第1期16卷 63-67页

作者：李世超何锋郭琦欧阳吉庭 School of Physics Beijing Institute of Technology

A cylindrical hollow cathode discharge （HCD） in CH4/Ar gas mixture at pressure of 20-30 Pa was used to deposit diamond-like carbon （DLC） films on the inner surface of a stainless steel tube. The characteristics of the HCD including the voltage-current curves, the plasma im- ages and the optical emission spectrum （OES） were measured in Ar and CHn/Ar mixtures. The properties of DLC films prepared under different conditions were analyzed by means of Raman spectroscopy and scanning electron microscopy （SEM）. The results show that the electron exci- tation temperature of HCD plasma is about 2400 K. DLC films can be deposited on the inner surface of tubes. The ratio of sp3/sp2 bonds decreases with the applied voltage and the deposition time. The optimizing CH4 content was found to be around CH4/Ar =1/5 for good quality of DLC films in the present system.

关键词： diamond-like carbon hollow cathode discharge film deposition inner surface

Deposition of diamond-like carbon on inner surface by hollow cathode discharge

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Deposition of diamond-like carbon on inner surface by hollow...

Best Magnetic Condition to Generate hollow cathode Glow Plasma in High Vacuum

第十六届全国等离子体科学技术会议暨第一届全国等离子体医学研讨会

作者： LI Shi-Chao HE Feng GUO Qi OUYANG Ji-Ting School of Physics Beijing Institute of Technology

A cylindrical hollow cathode discharge(HCD) in CH/Ar gas mixture at pressure of 20-30 Pa was used to deposit the diamond-like carbon(DLC) films on the inner surface of stainless steel *** discharge characteristics of HCD including the current-voltage curves,the plasma images and the optical emission spectrum(OES) were measured in Ar and CH/Ar *** DLC films under different conditions were prepared and the properties were analyzed by means of Raman spectroscopy and scanning electron microcopy(SEM).The results show that the ratio of sp/sp decreases with voltage supply and deposition *** optimizing CH content was found around CH/Ar =1/5 for good quality of DLC films under the present system.

关键词： diamond-like carbon hollow cathode discharge film deposition inner surface

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Plasma Science and Technology 2014年第1期16卷 21-25页

作者：赵小令陈仕修陈堃陈柏恺 School of Electronic Information and Electrical Engineering Shanghai Jiao Tong University School of Electrical Engineering Wuhan University

Based on magnetron hollow cathode discharge, the magnetic condition of glow plasma generation in high vacuum, including both direction and magnitude of the applied mag- netic field, is theoretically derived and experimentally evaluated in this paper. Single particle orbital theory is introduced to discuss the possibilities to generate glow plasma at gas pressure under 10-2 Pa when the magnetic field direction is parallel or perpendicular or oblique to the electric field direction. A quantitative estimation criterion of magnetic induction intensity is also proposed in theory. The comparison with experiments suggests that glow plasma in high vacuum will form more easily in oblique magnetic field condition and that the criterion is accurate enough to estimate magnetic induction intensity at a certain gas pressure.

关键词： high vacuum magnetic condition glow plasma hollow cathode discharge

The Interaction of C-Band Microwaves with Large Plasma Sheets

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Plasma Science and Technology 2012年第1期14卷 9-13页

作者： DING Liang HUO Wenqing YANG Xinjie XU Yuemin Center for Space Science and Applied Research Chinese Academy of SciencesBeijing 100190China Graduate University of Chinese Academy of Sciences Beijing 100049China

A large plasma sheet 60 cm×60 cm×2 cm in size was generated using a hollow cathode, and measurements were conducted for interactions including transmission, reflection and absorption. With different discharge parameters, plasma sheets can vary and influence microwave strength. Microwave reflection decreases when the discharge current rises, and the opposite occurs in transmission. The C-band microwave is absorbed when it is propagated through large plasma sheets at higher pressure. When plasma density and collision frequency are fitted with incident microwave frequency, a large amount of microwave energy is consumed. Reflection, transmission and absorption all exist simultaneously. Plasma sheets are an attractive alternative to microwave steering at low pressure, and the microwave reflection used in receiving radar can be altered by changing the discharge parameters.

关键词： hollow cathode discharge microwave effect large plasma sheet density distribution

Different Shapes of Nano-ZnO Crystals Grown in Catalyst-Free DC Plasma

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Plasma Science and Technology 2009年第5期11卷 564-568页

作者：霍纯青张跃飞刘福平陈强孟月东 Laboratory of Plasma Material and Physical Department of Low Temperature Plasma and Application Institute of plasma physics

Nano-ZnO crystals grown in hollow-cathode discharge （HCD） driven by direct current （DC） power on p-silicon （100） substrates were presented. With Ar as the diluted gas, 02 as the reactive gas and high purity zinc powder as the metallic source, the nano-ZnO structure was grown in a catalyst-free process. The crystal ZnO morphology was measured by scanning electron microscopy （SEM）. Photoluminescence （PL） spectroscopy was employed to evaluate the crystal nano-ZnO＇s properties. Effect of several parameters, such as the temperature, 02 ratio, deposition time and polarity during nanostructure growth, was also investigated.

关键词： hollow cathode discharge ZnO property

discharge characteristics of the DUHOCAMIS with a high magnetic bottle-shaped field

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Chinese Physics C 2014年第10期38卷 102-106页

作者：付东坡赵渭江郭鹏朱昆王景辉华景山任晓堂薛建明赵红卫刘克新 Institute of Heavy Ion Physics & State Key Laboratory of Nuclear Physics and Technology Peking University The Ohio State University Nuclear Engineering ProgramColumbusOH 43210USA Institute of Modern Physics Chinese Academy of Science

For the purpose of producing high intensity, multiply charged metal ion beams, the dual hollow cathode ion source for metal ions （DUHOCAMIS） was derived from the hot cathode Penning ion source combined with the hollow cathode sputtering experiments in 2007. To investigate the behavior of this discharge geometry in a stronger magnetic bottle-shaped field, a new test bench for DUHOCAMIS with a high magnetic bottle-shaped field up to 0.6 T has been set up at the Peking University. The experiments with magnetic fields from 0.13 T to 0.52 T have indicated that the discharge behavior is very sensitive to the magnetic flux densities. The slope of discharge curves in a very wide range can be controlled by changing the magnetic field as well as regulated by adjusting the cathode heating power; the production of metallic ions would be much greater than gas ions with the increased magnetic flux density; and the magnetic field has a much higher influence on the DHCD mode than on the PIG mode.

关键词： ion source metal ion beams Penning discharge hollow cathode discharge hollow cathode sputtering,magnetic bottle-shaped field

Calculation of incident ion distribution in a rectangular hollow cathode in magnetic field

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Chinese Physics B 2005年第7期14卷 1423-1427页

作者：房同珍张龙王龙 InstituteofPhysics ChineseAcademyofSciencesBeijing100080China

Incident ion distribution inside a rectangular hollow cathode in a uniform magnetic field is studied *** analysis shows that the ion distribution on one sidewall is not interfered by the other sidewall when the depth and width of the cathode are equal, and the ion distribution on the bottom surface related to the depth of the cathode and the number of ions on the bottom surface decrease monotonically from the centre to the sidewall.

关键词： hollow cathode discharge incident ion distribution magnetic field

Effect of C-Band microwave with large plasma sheet

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Effect of C-Band microwave with large plasma sheet

The Characteristics of hollow cathode Glow Plasma with Magnet in Low Pressure

第十五届全国等离子体科学技术会议

作者：丁亮霍文青杨新杰徐跃民 Center for Space Science and Applied Research Chinese Academy of Sciences Graduate University of Chinese Academy of Sciences

A large plasma sheet with 60cm×60cm×2cm is generated by hollow *** have been conducted for the C-Band microwave effect including transmission,reflection and *** different discharge parameters, plasma inside the chamber varies and influences the microwave strength collection. Microwave reflection decreases along with the discharge current rising up and transmission is opposite with *** C-Band microwave is absorbed when it is propagating through large plasma sheet with higher *** plasma density and collision frequency are fitting with the incident microwave frequency,large amount of microwave energy is *** the reflection,transmission and absorption exist *** plasma sheet is an attractive alternative for microwave steering with low ***,we can alter the microwave reflection for radar receiving by changing the discharge parameters.

关键词： hollow cathode discharge microwave effect large plasma sheet density distribution

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The Characteristics of Hollow Cathode Glow Plasma with Magne...