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Mechatronic design of a novel linear compliant positioning stage with large travel range and high out-of-plane payload capacity

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Frontiers of Mechanical Engineering 2017年第2期12卷 265-278页

作者： Hua LIU Xin XIE Ruoyu TAN Lianchao ZHANG Dapeng FAN College of Mechatronic Engineering and Automation NationalUniversity of Defense Technology Changsha 410073 China

Most of the XY positioning stages proposed in previous studies are mainly designed by considering only a single performance indicator of the stage. As a result, the other performance indicators are relatively weak. In this study, a 2-degree-of-freedom linear compliant positioning stage （LCPS） is developed by mechatronic design to balance the interacting performance indicators and realize the desired positioning stage. The key parameters and the coupling of the structure and actuators are completely considered in the design. The LCPS consists of four voice coil motors （VCMs）, which are conformally designed for compactness, and six spatial leaf spring parallelograms. These parallelograms are serially connected for a large travel range and a high out-of-plane payload capacity. The mechatronic model is established by matrix structural analysis for structural modeling and by Kirchhof^s law for the VCMs. The sensitivities of the key parameters are analyzed, and the design parameters are subsequently determined. The analytical model of the stage is confirmed by experiments. The stage has a travel range of 4.4 mm 7.0 mm and a 0.16% area ratio of workspace to the outer dimension of the stage. The values of these performance indicators are greater than those of any existing stage reported in the literature. The closed-loop bandwidth is 9.5 Hz in both working directions. The stage can track a circular trajectory with a radius of 1.5 mm, with 40 Ixm error and a resolution of lower than 3 ~tm. The results of payload tests indicate that the stage has at least 20 kg out- of-plane payload capacity.

关键词： mechatronic design linear compliant posi-tioning stage large travel range high out-of-plane payload

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