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Nano Materials Science 2023年第4期5卷 439-446页

作者： Zilian Qi Tianwei Zhang Xiao-Dong Zhang Qing Xu Kun Cao Rong Chen State Key Laboratory of Digital Manufacturing Equipment and Technology School of Mechanical Science and EngineeringHuazhong University of Science and TechnologyHubei430074China State Key Laboratory of Materials Processing and Die&Mold Technology School of Materials Science and EngineeringHuazhong University of Science and TechnologyHubei430074China

The flexible pressure sensor has been credited for leading performance including higher sensitivity,faster response/recovery,wider detection range and higher mechanical durability,thus driving the development of novel sensing materials enabled by new processing *** atomic layer infiltration,Pt nanocrystals with dimensions on the order of a few nanometers can be infiltrated into the compressible lamellar structure of Ti3C2Tx MXene,allowing a modulation of its interlayer spacing,electrical conductivity and piezoresistive *** flexible piezoresistive sensor is further developed from the Pt-infiltrated MXene on a paper *** is demonstrated that Pt infiltration leads to a significant enhancement of the pressure-sensing performance of the sensor,including increase of sensitivity from 0.08 kPa^(-1)to 0.5 kPa^(-1),extension of detection limit from 5 kPa to 9 kPa,decrease of response time from 200 ms to 20 ms,and reduction of recovery time from 230 ms to 50 *** mechanical durability of the flexible sensor is also improved,with the piezoresistive performance stable over 1000 cycles of flexure *** atomic layer infiltration process offers new possibilities for the structure modification of MXene for advanced sensor applications.

关键词： MXene Atomic layer deposition Pt infiltration Piezoresistive flexible pressure sensor

Soft-template synthesis of hierarchically porous structured polydimethylsiloxane toward flexible capacitive pressure sensor

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中国科学:技术科学英文版 2023年第9期66卷 2696-2706页

作者： HE ShiXue WU Jian DUAN YanHao SU BenLong LIU ShouYao TENG Fei WANG YouShan School of Mechatronics Engineering Harbin Institute of TechnologyHarbin 150001China National Key Laboratory of Science and Technology on Advanced Composites in Special Environments Harbin Institute of TechnologyHarbin 150090China Center for Rubber Composite Materials and Structures Harbin Institute of TechnologyWeihai 264209China

flexible pressure sensors play an important role in the field of monitoring, owing to their inherent safety and the fact that they are embedded at the material level. Capacitive pressure sensors have been proven to be quite versatile, with the ability to change the sensitivity and monitoring range by modifying the pore structure of the dielectric layer(elastic modulus). In this paper, capacitive pressure sensors are devised, comprising hierarchical porous polydimethylsiloxane. Due to the inherent hollow and hierarchical micropore structure, the capacitive pressure sensor allows operation at a wider pressure range(~1000 kPa) while maintaining sensitivity(6.33 MPa-1) in the range of 0–300 k Pa. Subsequently, the capacitance output model of the sensor is optimized, which provides an overall approximation of the experimental values for the sensor performance. Additionally, the signal response of the“break up the whole into parts”(by analysis of the whole sensor in parts) is simulated and outputted by the finite element analysis. The simplified analysis model provides a good understanding of the relationship between the local pressure and the signal response of the pressure sensor. For practical applications, seal monitoring and rubber wheel pressure array system are tested, and the proposed sensor shows sufficient potential for application in large deformation elastomer products.

关键词： hierarchically porous structured flexible pressure sensor capacitive response mechanism hydrogel/silicone rubber emulsion

Nacre-inspired MXene-based film for highly sensitive piezoresistive sensing over a broad sensing range

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Bio-Design and Manufacturing 2024年第4期7卷 463-475页

作者： Gaofeng Wang Lingxian Meng Xinyi Ji Xuying Liu Jiajie Liang Shuiren Liu School of Materials Science and Engineering Zhengzhou UniversityZhengzhou 450001China School of Materials Science and Engineering National Institute for Advanced MaterialsNankai UniversityTianjin 300350China

As the main component of wearable electronic equipment,flexible pressure sensors have attracted wide attention due to their excellent sensitivity and their promise with respect to applications in health monitoring,electronic skin,and human-computer ***,it remains a significant challenge to achieve epidermal sensing over a wide sensing range,with short response/recovery time and featuring seamless conformability to the skin *** is critical since the capture of minute electrophysiological signals is important for health care *** this paper,we report the preparation of a nacre-like MXene/sodium carboxymethyl cellulose(CMC)nanocomposite film with a“brick-and-mortar”interior structure using a vacuum-induced self-assembly *** synergistic behavior of the MXene“brick”and flexible CMC“mortar”contributes to attenuating interlamellar self-stacking and creates numerous variable conductive pathways on the sensing *** resulted in a high sensitivity over a broad pressure range(i.e.,0.03-22.37 kPa:162.13 kPa^(-1);22.37-135.71 kPa:127.88 kPa^(-1);135.71-286.49 kPa:100.58 kPa^(-1)).This sensor also has a low detection limit(0.85 Pa),short response/recovery time(8.58 ms/34.34 ms),and good stability(2000 cycles).Furthermore,we deployed pressure sensors to distinguish among tiny particles,various physiological signals of the human body,space arrays,robot motion monitoring,and other related applications to demonstrate their feasibility for a variety of health and motion monitoring use cases.

关键词： flexible pressure sensor MXene Bioinspired Physiological signals Interlayer spacing

Lithographic printing inspired in-situ transfer of MXene-based films with localized topo-electro tunability for high-performance flexible pressure sensors

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Nano Research 2023年第11期16卷 12670-12679页

作者： Qiuyang Yan Yi Zhou Yin Cheng Liangjing Shi Ranran Wang Lian Gao Jing Sun State Key Laboratory of High Performance Ceramics and Superfine Microstructure Shanghai Institute of CeramicsChinese Academy of ScienceShanghai 200050China Center of Materials Science and Optoelectronics Engineering University of Chinese Academy of SciencesBeijing 100049China Department of Electrical and Computer Engineering National University of SingaporeSingapore 117583Singapore School of Chemistry and Materials Science Hangzhou Institute for Advanced StudyUniversity of Chinese Academy of SciencesHangzhou 310024China School of Materials Science and Engineering Shanghai Jiao Tong UniversityShanghai 200240China

MXene-based films have been intensively explored for construction of piezoresistive flexible pressure sensors owing to their excellent mechanical and electrical *** pressure sensitivity relies on pre-molding a flexible substrate,or regulating the micromorphology of MXene sheets,to obtain a micro-structured ***,the two avenues usually require complicated and time-consuming microfabrication or wet chemical processing,and are limited to non-adjustable topographicelectrical(topo-electro)***,we propose a lithographic printing inspired in-situ transfer(LIPIT)strategy to fabricate MXene-ink films(MIFs).In LIPIT,MIFs not only inherit ridge-and-valley microstructure from paper substrate,but also achieve localized topo-electro tunability by programming ink-writing patterns and *** MIF-based flexible pressure sensor with periodical topo-electro gradient exhibits remarkably boosted sensitivity in a wide sensing range(low detection limit of 0.29 Pa and working range of 100 kPa).The MIF sensor demonstrates versatile applicability in both subtle and vigorous pressuresensing fields,ranging from pulse wave extraction and machine learning-assisted surface texture recognition to piano-training glove(PT-glove)for piano *** LIPIT is quick,low-cost,and compatible with free ink/substrate combinations,which promises a versatile toolbox for designing functional MXene films with tailored morphological-mechanical-electrical properties for extended application scenarios.

关键词： MXene film transfer printing surface tunability flexible pressure sensor

Synergistic piezoelectricity enhanced BaTiO_(3)/polyacrylonitrile elastomer-based highly sensitive pressure sensor for intelligent sensing and posture recognition applications

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Nano Research 2023年第4期16卷 5490-5502页

作者： Junbin Yu Shuai Xian Zhenpeng Zhang Xiaojuan Hou Jian He Jiliang Mu Wenping Geng Xiaojun Qiao Le Zhang Xiujian Chou Science and Technology on Electronic Test and Measurement Laboratory North University of ChinaTaiyuan 030051China

Designing stretchable and skin-conformal self-powered sensors for intelligent sensing and posture recognition is ***,based on a multi-force mixing and vulcanization process,as well as synergistically piezoelectricity of BaTiO_(3)and polyacrylonitrile,an all-in-one,stretchable,and self-powered elastomer-based piezo-pressure sensor(ASPS)with high sensitivity is *** ASPS presents excellent sensitivity(0.93 V/104 Pa of voltage and 4.92 nA/104 Pa of current at a pressure of 10-200 kPa)and high durability(over 10,000 cycles).Moreover,the ASPS exhibits a wide measurement range,good linearity,rapid response time,and stable frequency *** components were fabricated using silicone,affording satisfactory skinconformality for sensing *** cooperation with a homemade circuit and artificial intelligence algorithm,an information processing strategy was proposed to realize intelligent sensing and *** home-made circuit achieves the acquisition and wireless transmission of ASPS signals(transmission distance up to 50 m),and the algorithm realizes the classification and identification of ASPS signals(accuracy up to 99.5%).This study proposes not only a novel fabrication method for developing self-powered sensors,but also a new information processing strategy for intelligent sensing and recognition,which offers significant application potential in human-machine interaction,physiological analysis,and medical research.

关键词： flexible pressure sensor synergistic piezoelectricity all-in-one structure high sensitivity intelligent sensing and recognition

Morphological Engineering of Sensing Materials for flexible pressure sensors and Artificial Intelligence Applications

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Nano-Micro Letters 2022年第9期14卷 1-48页

作者： Zhengya Shi Lingxian Meng Xinlei Shi Hongpeng Li Juzhong Zhang Qingqing Sun Xuying Liu Jinzhou Chen Shuiren Liu School of Materials Science and Engineering Henan Key Laboratory of Advanced Nylon Materials and ApplicationHenan Innovation Center for Functional Polymer Membrane MaterialsZhengzhou UniversityZhengzhou 450001People’s Republic of China Wenzhou Institute University of Chinese Academy of SciencesWenzhou 352001People’s Republic of China School of Mechanical Engineering Yangzhou UniversityYangzhou 225127People’s Republic of China

As an indispensable branch of wearable electronics,flexible pressure sensors are gaining tremendous attention due to their extensive applications in health monitoring,human-machine interaction,artificial intelligence,the internet of things,and other *** recent years,highly flexible and wearable pressure sensors have been developed using various materials/structures and transduction *** engineering of sensing materials at the nanometer and micrometer scales is crucial to obtaining superior sensor *** review focuses on the rapid development of morphological engineering technologies for flexible pressure *** discuss different architectures and morphological designs of sensing materials to achieve high performance,including high sensitivity,broad working range,stable sensing,low hysteresis,high transparency,and directional or selective ***,the general fabrication techniques are summarized,including self-assembly,patterning,and auxiliary synthesis ***,we present the emerging applications of high-performing microengineered pressure sensors in healthcare,smart homes,digital sports,security monitoring,and machine learning-enabled computational sensing ***,the potential challenges and prospects for the future developments of pressure sensors are discussed comprehensively.

关键词： flexible pressure sensor Morphological engineering Sensing performance Manufacturing technique Artificial intelligence

Progress in achieving high-performance piezoresistive and capacitiveflexible pressure sensors: A review

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Journal of Materials Science & Technology 2020年第8期36卷 175-188页

作者： Wufan Chen Xin Yan College of Information Science and Engineering State Key Laboratory of Synthetical Automation for Process IndustriesNortheastern UniversityShenyang110819China

Electronic skin(e-skin) and flexible wearable devices are currently being developed with broad application prospects. Transforming electronic skin(e-skin) into true ¨skin¨is the ultimate goal. Tactile sensing is a fundamental function of skin and the development of high-performance flexible pressure sensors is necessary to realize thus. Many reports on flexible pressure sensors have been published in recent years,including numerous studies on improving sensor performance, and in particular, sensitivity. In addition,a number of studies have investigated self-healing materials, multifunctional sensing, and so on. Here,we review recent developments in flexible pressure sensors. First, working principles of flexible pressure sensors, including piezoresistivity, capacitance, and piezoelectricity, are introduced, as well as working mechanisms such as triboelectricity. Then studies on improving the performance of piezoresistive and capacitive flexible pressure sensors are discussed, in addition to other important aspects of this intriguing research field. Finally, we summarize future challenges in developing novel flexible pressure sensors.

关键词： Electronic skin flexible pressure sensor Piezoresistivity Capacitive pressure sensor

CVD growth of fingerprint-like patterned 3D graphene film for an ultrasensitive pressure sensor

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Nano Research 2018年第2期11卷 1124-1134页

作者： Kailun Xia Chunya Wang Muqiang Jian Qi Wang Yingying Zhang Key Laboratory of Organic Optoelectronics and Molecular Engineering of the Ministry of Education Department of Chemistry and Center for Nano and Micro Mechanics (CNMM) Tsinghua University Beijing China

With the rapid development of wearable devices, flexible pressure sensors with high sensitivity and wide workable range are highly desired. In nature, there are many well-adapted structures developed through natural selection, which inspired us for the design of biomimetic materials or devices. Particularl3 human fingertip skin, where many epidermal ridges amplify external stimulations, might be a good example to imitate for highly sensitive sensors. In this work, based on unique chemical vapor depositions （CVD）-grown three-dimensional （3D） graphene films that mimic the morphology of fingertip skin, we fabricated flexible pressure sensing membranes, which simultaneously showed a high sensitivity of 110 （kPa）-1 for 0-0.2 kPa and wide workable pressure range （up to 75 kPa）. Hierarchical structured polydimethylsiloxane （PDMS） films molded from natural leaves were used as the supporting elastic films for the graphene films, which also contribute to the superior performance of the pressure sensors. The pressure sensor showed a low detection limit （0.2 Pa）, fast response （〈 30 ms）, and excellent stability for more than 10,000 loading/unloading cycles. Based on these features, we demonstrated its applications in detecting tiny objects, sound, and human physiological signals, showing its potential in wearable electronics for health monitoring and human/machine interfaces.

关键词： electronic skin flexible pressure sensor three-dimensional (3D)graphene film fingertip skin hierarchical structures

Porous fiber paper and 3D patterned electrodes composed high-sensitivity flexible piezoresistive sensor for physiological signal monitoring

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Science China(Technological Sciences) 2022年第5期65卷 1169-1178页

作者： HOU XiaoJuan ZHONG JiXin HE Jian YANG ChangJun YU JunBin MEI LinYu MU JiLiang GENG WenPing CHOU XiuJian Science and Technology on Electronic Test and Measurement Laboratory North University of ChinaTaiyuan030051China School of Mechanical Engineering North University of ChinaTaiyuan030051China

The research on flexible pressure sensors has drawn widespread attention in recent years,especially in the fields of health care and intelligent *** practical applications,the sensitivity of sensors directly affects the precision and integrity of weak pressure ***,a pressure sensor with high sensitivity and a wide measurement range composed of porous fiber paper and 3D patterned electrodes is ***-walled carbon nanotubes with excellent conductivity were evenly sprayed on the fiber paper to form the natural spatial conducting networks,while the copper-deposited polydimethylsiloxane films with micropyramids array were used as electrodes and flexible *** conducting paths between electrodes and fibers can be obtained when high-density micro-pyramids fall into the porous structures of the fiber paper under external pressure,thereby promoting the pressure sensor to show an ultra-high sensitivity of 17.65 kPa^(-1)in the pressure range of 0–2 kPa,16 times that of the device without patterned ***,the sensor retains a high sensitivity of 2.06 kPa^(-1)in an ultra-wide measurement range of 150 ***,the sensor can detect various physiological signals,including pulse and voice,while attached to the human *** work provides a novel strategy to significantly improve the sensitivity and measurement range of flexible pressure sensors,as well as demonstrates attractive applications in physiological signal monitoring.

关键词： flexible pressure sensor high sensitivity wide measurement range fiber paper 3D patterned electrodes physiological signal monitoring

Advancing the pressure sensing performance of conductive CNT/PDMS composite film by constructing a hierarchical-structured surface

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Nano Materials Science 2023年第4期5卷 343-350页

作者： Ye Zhao Taoyu Shen Minyue Zhang Rui Yin Yanjun Zheng Hu Liu Hongling Sun Chuntai Liu Changyu Shen Key Laboratory of Materials Processing and Mold(Zhengzhou University) Ministry of EducationNational Engineering Research Center for Advanced Polymer Processing TechnologyZhengzhou UniversityZhengzhouHenan450002China China Astronaut Research and Training Center Beijing100094China

flexible pressure sensors have attracted wide attention due to their applications to electronic skin,health monitoring,and human-machine ***,the tradeoff between their high sensitivity and wide response range remains a *** by human skin,we select commercial silicon carbide sandpaper as a template to fabricate carbon nanotube(CNT)/polydimethylsiloxane(PDMS)composite film with a hierarchical structured surface(h-CNT/PDMS)through solution blending and blade coating and then assemble the h-CNT/PDMS composite film with interdigitated electrodes and polyurethane(PU)scotch tape to obtain an h-CNT/PDMS-based flexible pressure *** on in-situ optical images and finite element analysis,the significant compressive contact effect between the hierarchical structured surface of h-CNT/PDMS and the interdigitated electrode leads to enhanced pressure sensitivity and a wider response range(0.1661 kPa^(-1),0.4574 kPa^(-1)and 0.0989 kPa^(-1)in the pressure range of 0–18 kPa,18–133 kPa and 133–300 kPa)compared with planar CNT/PDMS composite film(0.0066 kPa^(-1)in the pressure range of 0–240 kPa).The prepared pressure sensor displays rapid response/recovery time,excellent stability,durability,and stable response to different loading modes(bending and torsion).In addition,our pressure sensor can be utilized to accurately monitor and discriminate various stimuli ranging from human motions to pressure magnitude and spatial *** study supplies important guidance for the fabrication of flexible pressure sensors with superior sensing performance in next-generation wearable electronic devices.

关键词： flexible pressure sensor Hierarchical structure Polydimethylsiloxane Carbon nanotubes Electronic skin