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Chlorine-free emission disposal of spent acid etchant in a three-compartment ceramic membrane reactor

Chinese Journal of Chemical Engineering 2020年第1期28卷 271-278页

作者： Fanglu Yuan Lele Cui Peipei Ding Wenheng Jing State Key Laboratory of Materials-Oriented Chemical Engineering National Engineering Research Center for Special Separation MembraneCollege of Chemical EngineeringNanjing Tech UniversityNanjing 211800China

Electrochemical technologies for the on-site treatment of spent acid etchant have received great attention due their ease of operation and economic benefits. On the other hand, a large amount of Cl2 is generated during the electrolysis process, which leads to potential environmental risks. In the present work, a novel threecompartment ceramic membrane flow reactor, including a cathode chamber, an anode chamber, and a gas absorption chamber was developed. The three chambers were divided by an Al2O3 ceramic membrane and a breathable hydrophobic anode diffusion electrode(ADE). The Cl2 evolution onset potential of the ADE was increased to 1.19 V from 1.05 V of the graphite felt, effectively inhibiting the chlorine evolution reaction(CER).The anode-generated Cl2 diffused into the gas absorption chamber through the ADE and was eventually consumed by the H2O2 adsorbent. Cu could be recovered without emitting chlorine due to the special structure of reactor. The current efficiency of copper precipitation and cathode reduction from Cu2+to Cu+reached 97.7%at a working current of 150 m A. These results indicated that the novel membrane reactor had high potential for application in the copper recovery industry.

关键词： Spent acid etchant Chlorine evolution reaction Anode diffusion electrode Three-compartment reactor Ceramic membrane

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STUDIES　ON　HOMOGENEOUS　SCAVENG　REACTION　IN　　CONFINED　etchant　LAYER　TECHNIQUE　FOR　NANOLITHOGRAPHY　（I）　──As　（III）　SCAVENGING　BROMINE　REACTION

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Chinese Chemical Letters 1995年第3期6卷 243-246页

作者： Lian Yong SU Jin LUO Zhong Hua LIN Zhao Wu TIAN (The State Key Laboratory for Physical Chemistry of the Solid Surface,Xiamen University,Xiamen 361005) Xiamen Univ State Key Lab Phys Chem Solid Surface Xiamen 361005 Peoples R China

It is reported that the As(III) scavenging bromine reaction rate constant can be determined by means of measuring the limiting current of a rotating disk electrode (RDE).The As(III) scavenging bromine second order reactionrate constants in sulfuric acid are 3.6×10￣5Lmol￣-1.s￣-1 at 20℃ and 8.9×10￣5Lmol￣-1s￣-1at 41℃ respectively. The activation energy is 33 KJ.mol-1.The results showsthat As (III) can be used as scavenging etchant of bromine in submicrometerand three-dimension lithography.

关键词：保保悖悖 BROMINE CONFINED etchant HOMOGENEOUS LAYER NANOLITHOGRAPHY ON REACTION SCAVENG SCAVENGING STUDIES TECHNIQUE III As

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Selective separation of copper by membrane-electro-winning and its application in etchant recycling

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Journal of Central South University of Technology 2005年第Z1期12卷 94-97页

作者： LI De-liang CHEN Ren-hua Institute of Environmental Engineering Central South Forest University Changsha 410004 China Changsha Luyi Environmental Technology Co Ltd Changsha 410008 China

A close-looped process based on the membrane separation and electrolysis is proposed to regenerate the copper etchant in-situ, recover copper on-site and reuse it. It is characterized by selective separation of copper from the spent etchant, which is accomplished by the ion exchange membrane-electrowinning, and at the same time the other components useful for etching are reclaimed. The experiments show that at least 90 % of electricity efficiency for copper removal can be maintained and the optimum condition for membrane-electrowinning is: cell voltage 2 -2.5 V, operating temperature 40 - 50 ℃ and current density 500 - 1 500 A/m2. The regenerated etchant can be suc cessfully reused to etch copper after adjusting its composition to the normal range, and its recycling property is as good as that of the fresh etchant after 50 times of use-disposal-regeneration cycles.

关键词： copper etchant membrane-electrowinning(M-E) recycle selective separation

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