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Propagations of Rayleigh and Love waves in ZnO films/glass substrates analyzed by three-dimensional finite element method

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Chinese Physics B 2017年第8期26卷 468-473页

作者：王艳谢英才张淑仪兰晓东 School of Electronic Science and Engineering Nanjing University of Posts and Telecommunications Laboratory of Modern Acoustics Institute of Acoustics Nanjing University

Propagation characteristics of surface acoustic waves（SAWs） in ZnO films/glass substrates are theoretically investigated by the three-dimensional（3D） finite element method. At first, for（11ˉ20） ZnO films/glass substrates, the simulation results confirm that the Rayleigh waves along the [0001] direction and Love waves along the [1ˉ100] direction are successfully excited in the multilayered structures. Next, the crystal orientations of the ZnO films are rotated, and the influences of ZnO films with different crystal orientations on SAW characterizations, including the phase velocity, electromechanical coupling coefficient, and temperature coefficient of frequency, are investigated. The results show that at appropriate h/λ, Rayleigh wave has a maximum k^2 of 2.4% in（90°, 56.5°, 0°） ZnO film/glass substrate structure; Love wave has a maximum k^2 of 3.81% in（56°, 90°, 0°） ZnO film/glass substrate structure. Meantime, for Rayleigh wave and Love wave devices, zero temperature coefficient of frequency（TCF） can be achieved at appropriate ratio of film thickness to SAW wavelength. These results show that SAW devices with higher k^2 or lower TCF can be fabricated by flexibly selecting the crystal orientations of ZnO films on glass substrates.

关键词： surface acoustic wave ZnO films electromechanical coupling coefficient temperature coefficientof frequency 3D finite element method

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Algorithm for the layout of a piezoelectric element in an elastic medium providing the maximal piezoelectric effect within a specified frequency range

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International Journal of Smart and Nano Materials 2019年第4期10卷 268-284页

作者： Dmitrii Oshmarin Nataliia Iurlova Natalia Sevodina Maksim Iurlov Department of complex problems of deformable solids mechanics Institute of Continuous Media Mechanics of the Ural Branch of RASPermRussian Federation

An algorithm for the layout of a piezoelectric that provides the most efficient performance within a specified range of vibration frequencies is proposed in this *** algorithm is based on the consideration of a special parameter within the area of a piezoelectric element’s possible *** parameter characterizes the superposition of electromechanical coupling coefficients’for all the natural vibration frequencies included in a specified frequency *** condition for defining the best option for location of the piezoelectric element in the case of several equivalent positions is *** efficiency of the proposed algorithm is shown *** electromechanical coupling coefficients were calculated numerically based on solution to the problem of natural vibrations for electroelastic bodies using a finite element *** calculations were performed to define the best location for a single piezoelectric element at the surface of a thin-walled shell having a half-cylindrical *** results are presented for natural vibration frequencies within the frequency range from 0 up to 1100 *** numerical results were obtained by solving the problem of natural vibrations with a finite element method using the ANSYS software package.

关键词： Piezoelectric element’s layout natural vibrations continuous frequency range electromechanical coupling coefficient

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Stoney formula for piezoelectric film/elastic substrate system

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Chinese Physics B 2017年第3期26卷 535-538页

作者：周旺民李望君洪圣运金杰尹姝媛 College of Mechanical Engineering Zhejiang University of Technology Hangzhou 310014 China College of Materials Science and Engineering Zhefiang University of Technology Hangzhou 310014 China College of Science Zhefiang University of Technology Hangzhou 310023 China

With the trends in miniaturization, and particularly the introduction of micro- and nano-electro-mechanical system, piezoelectric materials used in microelectronic devices are deposited usually in the form of thin film on elastic substrates. In this work, the bending of a bilayer comprising a piezoelectric film deposited on an elastic substrate, due to the mismatch, is investigated. An analytic formula relating the curvature of the bilayer to the mismatch, the electroelastic constants and the film thickness is obtained, and from this formula, a transverse piezoelectric constant d31 can be estimated. Meanwhile the influence of electrornechanical coupling coefficient on the curvature is discussed.

关键词： Stoney formula piezoelectric film bending electromechanical coupling coefficient

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PROPAGATION OF SURFACE ACOUSTIC WAVES IN PRESTRESSED ANISOTROPIC LAYERED PIEZOELECTRIC STRUCTURES

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Acta Mechanica Solida Sinica 2003年第1期16卷 16-23页

作者： Liu Hua Kuang Zhenbang Cai Zhengming Wang Tiejun Wang Zikun Department of Engineering Mechanics Shanghai Jiaotong UniversityShanghai 200240China Department of Engineering Mechanics Xi’an Jiaotong UniversityXi’an 710048China

The propagation of surface acoustic waves in layered piezoelectric structureswith initial stresses is investigated. The phase velocity equations are obtained for electricallyfree and shorted cases, respectively. Effects of the initial stresses on the phase velocity and theelectromechanical coupling coefficient for the fundamental mode of the layered piezoelectricstructures are discussed. Numerical results for the c-axis oriented film of LiNbO_3 on a sapphiresubstrate are given. It is found that the fractional change in phase velocity is a linear functionwith the initial stresses, and the electromechanical coupling factor increases with an increase ofthe absolute values of the compressive initial stresses. The results are useful for the design ofsurface acoustic wave devices.

关键词： surface acoustic waves layered piezoelectric structure phase velocity electromechanical coupling coefficient

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Study on the dual-excited piezoelectric ultrasonic transducer with full-wave vibration mode

Study on the dual-excited piezoelectric ultrasonic transduce...

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2011年全国压电和声波理论及器件应用研讨会

作者： Zhao-Feng LIANG~(1,2,3) Guang-Ping ZHOU~(1,*)Xi-Ping MO~2 Zheng-Zhong LI~1 1 Department of Electronic Engineering,Shenzhen Polytechnic,Shenzhen 518055 2 Institute of Acoustics,Chinese Academy of Sciences,Beijing 100190 3 Graduate University of Chinese Academy of Sciences,Beijing 100190

＜正＞The demand for high-power ultrasonic transducers remains strong as ultrasonic treatment technology in new areas continues to expand,such as in the chemical and food industry,in sewage sludge plants,et *** pre-stressed piezoelectric sandwich transducer has been widely used in many ultrasonic applications because of its high electro-acoustic efficiency,high mechanical strength,and easy to *** maximal transducer power is

关键词： dual-excited transducer full-wave resonance frequency equivalent circuit electromechanical coupling coefficient

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0-3型硫铝酸盐水泥基压电复合材料的研究

0-3型硫铝酸盐水泥基压电复合材料的研究

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中国硅酸盐学会2003年学术年会

作者：黄世峰徐荣华刘福田常钧程新济南大学材料学院

1引言近年来,智能材料与结构己逐渐渗入到土木工程领域中。土木工程领域中的众多大型建筑结构(如大跨桥梁、高耸建筑和核建筑等)规模庞大、结构复杂,一旦失效,后果将是灾难性的,对它们的安全性和耐久性的要求远高于一般性建筑结构。因此... 详细信息

1引言近年来,智能材料与结构己逐渐渗入到土木工程领域中。土木工程领域中的众多大型建筑结构(如大跨桥梁、高耸建筑和核建筑等)规模庞大、结构复杂,一旦失效,后果将是灾难性的,对它们的安全性和耐久性的要求远高于一般性建筑结构。因此,采用智能材料与结构对重大土木工程建筑实施在线健康监测和预报,不仅可大大减少结构的维修费用,而且还可避免对人类造成的危害。

关键词： PZT 0-3 cement based piezoelectric composites piezoelectric properties poling parameter electromechanical coupling coefficient

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