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Study on PECVD SiO_2 /Si_3 N_4 double-layer electrets with different thicknesses

Science China(Technological Sciences) 2011年第8期54卷 2123-2129页

作者： ZOU XuDong ZHANG JinWen National Key Laboratory of Science and Technology on Micro/Nano Fabrication Institute of Microelectronics Peking University Beijing 100871 China

In this paper, performance of PECVD SiO 2 /Si 3 N 4 double layers electrets with different thicknesses were investigated detailedly in respect of chargeability, storage charge stability in high temperature and reliability in high humidity environment. Samples with different thicknesses of Si 3 N 4 and SiO 2 were prepared on Pyrex 7740 glass substrates and characterized by isothermal and high humidity charge decay. The results of experiment approved that the PECVD SiO 2 /Si 3 N 4 double layers electrets on glass substrate has as good chargeability and charge stability in high temperature and high humidity environment as thermal oxidation or APCVD/LPCVD ones on silicon substrates. The experiment results indicated that a Si 3 N 4 layer no less than 50 nm is necessary for good charge stability in high temperature and a Si 3 N 4 layer thicker than 500 nm decreases the chargeability. Even a 2 nm Si 3 N 4 layer is enough to significantly improve the charge stability in high humidity environment. Thick SiO 2 layer can increase the surface potential of electrets under the same charging condition and its charge stability in high temperature. However, the electrets with high surface potential also exhibit poor uniformity of charge stability in high humidity environment.

关键词： PECVD SiO 2 /Si 3 N 4 double layer electrets thicknesses

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Unique Charge Storage Characteristics of FEP//THV//FEP Sandwich Electret Membrane Polarized by Thermally Charging Technology

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Chinese Physics Letters 2014年第12期31卷 123-126页

作者：陈钢进雷明凤肖慧明吴玲 Lab of Eleetrets and Its Application Hangzhou Dianzi University Hangzhou 310018

Nowadays, electrets have been widely applied in acoustic electric sensors such as microphones and other actuators due to its lasting and stable electrostatic field. Recently, research has focus on the application of micro-electro-mechanical systems （MEMS）, especially on electret generator for energy harvesting,where vibration energy can be changed into electrical energy by relative displacement between two electret layers when vibrating. Many kinds of configurations for the electret generator have been proposed, in which the theoretical power output is proportional to the surface charge density of the electret. Therefore, it is crucial to develop a new novel electret with an extremely high surface charge density and long-term stability for electret generators with large power output.

关键词： SPACE charge PROPENE TETRAFLUOROETHYLENE THERMAL analysis electrets MEMBRANES (Technology) POLARIZATION (Electricity)

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Electret Characteristics of Hybrid Films Consisting of Porous Polytetrafluoroethylene and Teflon Fluoroethylenepropylene with COrona Charging

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Chinese Physics Letters 2002年第12期19卷 1856-1858页

作者：陈钢进 RudiDanz 等 StateKeyLaboratoryofSiliconMaterials zhejiangUniversityHangzhou310027 ZhejiangUniversityofScienceandTechnology Hangzhou310027 FraunhoferInstituteofAppliedPolymerResearch GolmGerm

We have prepared hybrid films consisting of porous polytetrafluoroethylene (PTFE) and Teflon fluoroethylenepropylene (FEP) and we have investigatedtheir charge dynamics of injection, transport and trapping using corona charging, isothermal and thermally stimulatedsurface-potential decay measurements. The results indicate that the hybrid film samples show different electret characteristics whencharged through side PTFE or side FEP. The samples charged negatively through side porous PTFE show the best charge stability. Their chargedynamics differs very much from a single film. The effect of corona polarity on the electret behaviour in the hybrid film is very *** experimental results are explained with the three structure level model of charge storage in electrets.

关键词： CHARGES Charging HYBRID Electric charge electrets trapping Films Polytetrafluoroethylene charging Hybrid electric vehicles CHARGING(ACCOUNTTNG)

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The Use of Electromagnetic Forces of the Earth in Manual and Physiotherapy

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Journal of Human Physiology 2020年第1期2卷 10-15页

作者： Yuri Pivovarenko Research and Training Center“Physical and Chemical Materials Science”Under Kyiv Taras Shevchenko University and NAS of Ukraine KievUkraine

Physiotherapists usually ignore the electric polarization of human bodies that occurs under the influence of the electromagnetic forces of the *** is irrational,since the positive or negative electrification of human tissues has the opposite effect on both their properties and functional *** physiotherapists must take into account the polarizing effect of the electromagnetic forces of the Earth when analysing the functional states of the tissues of the human body is shown *** also shows how these electromagnetic forces can be used by manual and physiotherapists.

关键词： Manual therapy Physiotherapy electrets Yoga

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