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eddy current measurement of the thickness of top Cu film of the multilayer interconnects in the integrated circuit （IC） manufacturing process

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Frontiers of Mechanical Engineering 2015年第1期10卷 1-6页

作者： Zilian QU Yonggang MENG Qian ZHAO State Key Laboratory of Tribology Tsinghua University Beijing100084 China

This paper proposes a new eddy current method, named equivalent unit method （EUM）, for the thickness measurement of the top copper film ofmultilayer interconnects in the chemical mechanical polishing （CMP） process, which is an important step in the integrated circuit （IC） manufacturing. The influence of the underneath circuit layers on the eddy current is modeled and treated as an equivalent film thickness. By subtracting this equivalent film component, the accuracy of the thickness measure- ment of the top copper layer with an eddy current sensor is improved and the absolute error is 3 nm for sampler measurement.

关键词： CMP eddy current multilayer wafer Cuinterconnects equivalent unit

Numerical Simulation of the eddy current Effects on the Arc Splitting Process

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Plasma Science and Technology 2012年第11期14卷 974-979页

作者：杨飞荣命哲吴翊孙昊马瑞光纽春萍 State Key Lab of Electrical Insulation and Power Equipment School of Electrical EngineeringXi'an Jiaotong University

This paper focuses on a numerical simulation of the arc plasma behavior in the arc splitting process, considering the eddy currents in the electrodes and the splitter plate. Based on three-dimensional （3D） magneto-hydrodynamic （MHD） theory, a thin layer of nonlinear electrical resistance elements is used in the model to represent the voltage drop of plasma sheath and the formation of new arc root in order to include the arc splitting process in the simulation. In the arcing process, eddy currents in metal parts are generated by a time-varying magnetic field. The arc model is calculated with the time-varying magnetic field term, so that the eddy current effects can be considered. The effect of nonlinear permeability of a ferromagnetic material is also involved in the calculation. Using the simulation results for the temperature, velocity and current density distribution, the arc splitting process is analyzed in detail. The calculated results are compared with the simulation neglecting eddy currents.

关键词： arc plasma low-voltage simulation eddy current

Study of eddy current power loss in an RCS vacuum chamber

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Chinese Physics C 2012年第2期36卷 160-166页

作者： XU Shou-Yan WANG Sheng Institute of High Energy Physics(IHEP) Chinese Academy of SciencesBeijing 100049China

In a Rapid Cycling Synchrotron （RCS）, power loss due to an eddy current on the metal vacuum chamber would cause heating of the vacuum chamber. It is important to study the effect for estimating eddy current induced power loss and temperature growth. Analytical formulas for eddy current power loss for various types of vacuum chambers are derived for dipole and quadrupole repeetively. By using the prototype of dipole of CSNS/RCS, an experiment was done to test the analytical formula. The derived formulas were applied to calculating the eddy current power loss on some special structures of an RCS vacuum chamber.

关键词： eddy current power loss vacuum chamber RCS CSNS

The eddy current induced in the pulsed bump magnet for the CSNS/RCS injection

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Chinese Physics C 2011年第8期35卷 778-783页

作者：宋金星康文霍丽华郝耀斗王磊 Institute of High Energy Physics Chinese Academy of Sciences Graduate University of Chinese Academy of Sciences

The injecton pulsed bending bump magnets of Rapid Cycling Synchrotron （RCS） in China Spalla- tion Neutron Source （CSNS） consist of four horizontal bending （BH） magnets and four vertical bending （BV） magnets. The BH magnets are operated at a repetition rate of 25 Hz and are excited with a trapezoid rectangle waveform with about 1.6 milliseconds duration. The eddy current is induced in BH magnets and in the end plates it is expected to be large, so the heat generation is of our great concern. In this paper, the eddy current loss of the BH magnet has been investigated and calculated by using a coupling method of 3D electromagnetic and thermal analysis. The accuracy of the analysis is confirmed by testing the prototype BH magnet. The end plate temperature of the BH magnet provided with slit cuts has been decreased obviously and met the requirements.

关键词： eddy current BH magnet injection CSNS/RCS

Characterization of Early Fatigue Microstructure in AISI 321 Steel Using eddy current Non-destructive Methodology

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Journal of Wuhan University of Technology(Materials Science) 2013年第6期28卷 1201-1206页

作者： LIU Kunpeng ZHAO Zihua ZHANG Zheng Key Laboratory of Aerospace Materials and Performance Beihang University

Accumulative damage during early stage of fatigue in AISI 321 steel was investigated by eddy current test, atomic force microscopy, X-ray diffraction and transmission electron microscopy. Surface slip, dislocation, and strain-induced martensite were determined as the main damage types. Moreover, damage during the fatigue was found to be increased with the increasing fatigue cycles and load amplitude. The contribution of strain-induced martensite to the total eddy current amplitude （V） was enhanced with the increase in its volume fraction. Finally, a linear relationship between V I~, and the height of surface slip was established.

关键词： eddy current early stage of fatigue surface slip strain-induced martensite dislocation

NEW ALGORITHM OF IDENTIFYING SHAPE OF FLAWS OR CRACKS IN eddy current TESTING

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Applied Mathematics and Mechanics(English Edition) 2005年第11期26卷 1523-1530页

作者：庄弘炜马逸尘张志斌王应玺曹剑锋 WANG Biao College of Science Xi＇ an Jiaotong University Xi＇ an 710049 P. R. China Xi＇ an Thermal Power Research Institute Xi＇ an 710032 P. R. China 不详

eddy-current inverse technique is a very important method to reconstruct the shape of flaws or cracks. Using the domain derivative of the far-field pattern for eddy- current inverse problem with Dirichlet boundary condition, a new algorithm to recover the shape of cracks was constructed and some numerical examples were given. The algorithm demonstrates that the algorithm is feasible and correct for obtaining a reasonable reconstruction of a shape of flaws or cracks from the far-field measurements even though using less data of directions of incidence and observations for fewer wave numbers are gived.

关键词： eddy current domain derivative Nystroem method

Influence of eddy current on transient characteristics of common rail injector solenoid valve

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Journal of Beijing Institute of Technology 2015年第1期24卷 26-34页

作者：李丕茂张幽彤 Low Emission Vehicle Research Laboratory Beijing Institute of Technology

Influence of eddy current on transient characteristics of common rail injector solenoid valve was studied in this paper. Experimental investigations of drive current and power source volt- age of both drive current ascending and descending process were conducted on a common rail injec- tor solenoid valve. A new discretizing calculation method of solenoid valve flux linkage was put for- ward for the first time based on the experimental results and drive circuit principle, and flux linkage of both drive current ascending and descending process were evaluated. New inductance calculation methods for drive current ascending and descending process respectively were also presented. Influ- ence of parasitic inductance was evaluated. Results indicate that the air gap, under which the transi- ent flux linkage of the solenoid valve is the biggest, varies with drive current due to eddy current. Flux linkage of drive current descending process is bigger than that of drive current ascending process under the same drive current and the same air gap width. eddy current can reduce the delay between the time that drive current begins to descend and the time that armature begins to move downward. Inductance of drive current descending process is bigger than that of drive current as- cending process over larger scope of drive current, but the difference becomes smaller with the in- creasing of air gap width. The differences of both flux linkage and inductance between drive current ascending and descending process are caused by the eddy current in core and armature materials.

关键词： common rail injector solenoid valve transient characteristic flux linkage inductance eddy current

Influence of eddy current Induced in Steel Rails on Suspension Force of EMS High-Speed Maglev System

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Influence of Eddy Current Induced in Steel Rails on Suspensi...

Modeling Analysis and Experimental Study of the eddy current Effect on Suspension Magnet in Medium-Speed Maglev Train

第36届中国控制会议

作者： Qing Yang Jie Li National University of Defense Technology

ISBN: (纸本)9781538629185

It is a problem needs to overcome that steel rails induce eddy current when the maglev train *** of the existing studies are about lower speed operations,and there are few studies aim at the situation of EMS high-speed maglev *** paper simplifies the construction of EMS high-speed maglev train,simulates it by electromagnetic field simulation software Ansoft Maxwell,and researches the influence of eddy current induced in steel rails on Suspension Force of EMS High-Speed Maglev System in the 3D transient magnetic field.

关键词： EMS High-speed maglev train eddy current Suspension force

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Modeling Analysis and Experimental Study of the Eddy Current...