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Micro/nano Indentation and Single Grit Diamond Grinding Mechanism on Ultra Pure Fused Silica

Chinese Journal of Mechanical Engineering 2011年第6期24卷 963-970页

作者： ZHAO Qingliang GUO Bing STEPHENSIN David CORBETT John School of Mechatronics Engineering Harbin Institute of Technology Harbin 150001 China materials Department Cranfield University Cranfield Bedford MK43 OAL UK School of Applied Sciences Cranfield University Cranfield Bedford MK43 OAL UK

The existing research about ductile grinding of fused silica glass was mainly focused on how to carry out ductile regime material removal for generating very ＂smoothed＂ surface and investigate the machining-induced damage in the grinding in order to reduce or eliminate the subsurface *** brittle/ductile transition behavior of optical glass materials and the wear of diamond wheel are the most important factors for ductile grinding of optical *** this paper,the critical brittle/ductile depth,the influence factors on brittle/ductile transition behavior,the wear of diamond grits in diamond grinding of ultra pure fused silica（UPFS） are investigated by means of micro/nano indentation technique,as well as single grit diamond grinding on an ultra-stiff machine tool,Tetraform ＂C＂.The single grit grinding processes are in-process monitored using acoustic emission（AE） and force dynamometer *** wear of diamond grits,morphology and subsurface integrity of the machined groves are examined with atomic force microscope（AFM） and scanning electron microscope（SEM）.The critical brittle/ductile depth of more than 0.5 μm is *** compared to the using roof-like grits,by using pyramidal diamonds leads to higher critical depths of scratch with identical grinding ***,the influence of grit shapes on the critical depth is not significant as *** grinding force increased linearly with depth of cut in the ductile removal regime,but in brittle removal regime,there are large fluctuations instead of forces *** SEM photographs of the cross-section profile show that the median cracks dominate the crack patterns beneath the single ***,The SEM photographs show multi worn patterns of diamond grits,indicating an inhomogeneous wear mechanism of diamond grits in grinding of fused silica with diamond grinding *** proposed research provides the basal technical theory for improving the ultra-precision grinding of UPFS.

关键词： ultra pure fused silica (UPFS) micro/nano indentation single grit diamond grinding ductile material removal subsurface integrity diamond grits wear

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