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Low-Microwave Loss coplanar waveguides Fabricated on High-Resistivity Silicon Substrate

Journal of Semiconductors 2006年第1期27卷 1-4页

作者：杨华朱洪亮谢红云赵玲娟周帆王圩中国科学院半导体研究所光电子研究发展中心北京100083

Three kinds of coplanar waveguides （CPWs） are designed and fabricated on different silicon substrates---common low-resistivity silicon substrate （LRS）, LRS with a 3μm-thick silicon oxide interlayer, and high-resistivity silicon （HRS） substrate. The results show that the microwave loss of a CPW on LRS is too high to be used, but it can be greatly reduced by adding a thick interlayer of silicon oxide between the CPW transmission lines and the LRS.A CPW directly on HRS shows a loss lower than 2dB/cm in the range of 0-26GHz and the process is simple,so HRS is a more suitable CPW substrate.

关键词： coplanar waveguides high-resistivity silicon microwave loss high frequency optoelectronic packaging

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Anomalous Temperature Dependence of the Quality Factor in a Superconducting coplanar Waveguide Resonator

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Chinese Physics Letters 2014年第6期31卷 190-194页

作者：周品嘉王轶文韦联福 Quantum Optoelectronics Laboratory School of Physics Southwest Jiaotong University Chengdu 610031 State Key Laboratory of Optoelectronic Materials and Technologies School of Physics and Engineering Sun Yat-Sen University Guangzhou 510275

We present the measurements of the temperature dependence of the internal quality factor （O,i） of a microwave resonator, well below the superconducting transition temperature. The device is a quarter-wavelength niobium （Tc = 9.2 K） coplanar waveguide resonator. The measured ｜S21｜ parameter shows typically the skewed Lorentzian distributions, from which the fitted quality factor monotonically decreases with the temperature increasing from 30ink to 900mK. It is observed that for the lower temperature range （i.e., at T 〈 700 mK） the temperature dependence of the fitted Qi deviates significantly from the predictions of the usual Mattis-Bardeen theory. The measured 3 dB internal quality factor Qi also verifies such an anomalous temperature dependence. Physically, this phenomenon could be attributed dominantly to the effects of the two-level systems in the device, rather than the usual temperature-dependent complex conductance.

关键词： SUPERCONDUCTING composites ELECTRIC resonators ELECTROMECHANICAL devices TRANSITION temperature THERMOPHYSICAL properties coplanar waveguides

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Quasi-static Finite-element Analysis For MEMS Transmission Lines

Quasi-static Finite-element Analysis For MEMS Transmission L...

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1999 International Conference on Computational Electromagnetics and Its Applications(ICCEA’99)

作者： Wang Ying Zhu Shouzheng Lai Zongsheng Dept.Of EE East China Normal University

ISBN: (纸本)0780358023

＜正＞Microelectromechnical systems（MEMS） technology is considered as one of key technologies in the new-coming century,In this paper,the quasi-static finite element method （FEM） is applied to analyze MEMS microwave transmission lines,the finite-grounded coplanar *** capacitance per unit length and intrinsic impedance of the line are derived. Dillerent materials are calculated to find the proper design parameters.

关键词： micromechanical devices coplanar waveguides capacitance electric impedance waveguide theory coplanar transmission lines transmission line theory finite element analysis MEMS transmission lines quasi-static finite-element analysis microelectromechanical systems FEM microwave transmission lines finite-grounded coplanar waveguide capacitance per unit length intrinsic impedance

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