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Investigation of aluminum gate CMP in a novel alkaline solution

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Journal of Semiconductors 2016年第1期37卷 137-144页

作者：冯翠月刘玉岭孙鸣张文倩张金王帅 Institute of Microelectronics Hebei University of Technology Tianjin 300130 China

Beyond 45 nm, due to the superior CMP performance requirements with the metal gate of aluminum in the advanced CMOS process, a novel alkaline slurry for an aluminum gate CMP with poly-amine alkali slurry is investigated. The aluminum gate CMP under alkaline conditions has two steps： stock polishing and fine polishing. A controllable removal rate, the uniformity of aluminum gate and low corrosion are the key challenges for the alkaline polishing slurry of the aluminum gate CMP. This work utilizes the complexation-soluble function of FA/O II and the preference adsorption mechanism of FA/O I nonionic surfactant to improve the uniformity of the surface chemistry function with the electrochemical corrosion research, such as OCP-TIME curves, Tafel curves and AC impedance. The result is that the stock polishing slurry （with SiO2 abrasive） contains 1 wt.% H2O2,0.5 wt.% FA/O II and 1.0 wt.% FA/O I nonionic surfactant. For a fine polishing process, 1.5 wt.% H2O2, 0.4 wt.% FA/O II and 2.0 wt.% FA/O I nonionic surfactant are added. The polishing experiments show that the removal rates are 3000 ±50 A/min and 1600 ± 60 A/dmin, respectively. The surface roughnesses are 2.05 ± 0.128 nm and 1.59 ± 0.081 nm, respectively. A combination of the functions of FA/O II and FA/O I nonionic surfactant obtains a controllable removal rate and a better surface roughness in alkaline solution.

关键词： alkaline solution aluminum CMP electrochemical surface micromorphology

Corrosion behavior of Cu/Al casting-rolled clad plates in different alkaline solution

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China Foundry 2021年第5期18卷 513-520页

作者： Yi-fan Zhang Xiao-guang Yuan Xiao-jiao Zuo Hong-jun Huang Yu-lin Cheng School of Materials Science and Engineering Shenyang University of technologyShenyang 110870China

The effect of pH value and different kinds of anions on the corrosion behavior of Cu/Al casting-rolled clad plates in the alkaline solution was evaluated by means of scanning electron microscopy(SEM),energy dispersive spectroscopy(EDS),X-ray diffraction(XRD),weight loss analysis,3D confocal laser scanning microscopy(CLSM)and electrochemical *** show the corrosion mainly occurs on the aluminum *** corrosion resistance of the Cu/Al decreases as the pH value *** pH≥12,the dissolution of the film layer is faster than the passivation *** addition of Cl^(-)ions reduces the corrosion resistance of the Cu/Al clad plates,which leads to pitting *** higher the concentration of Cl^(-)ions,the more prone the pitting to *** addition of SO_(4)^(2-)ions causes the denudation of the *** corrosion resistance of the Cu/Al is better in the alkaline solution containing NO_(3)^(-)ions than that in the solution containing Cl^(-)ions or SO_(4)^(2-)*** adding SO_(4)^(2-),NO^(3)^(-)and Cl^(-)to the pure alkaline solution,the corrosion resistance of the Cu/Al clad plates decreases.

关键词： Cu/Al clad plates alkaline solution pH anions electrochemistry casting-rolled

Enhancing hydrogen electrocatalytic oxidation on Ni_(3)N/MoO_(2)in-plane heterostructures in alkaline solution

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Chinese Journal of Catalysis 2022年第12期43卷 3154-3160页

作者： Lulu An Shaofeng Deng Xuyun Guo Xupo Liu Tonghui Zhao Ke Chen Ye Zhu Yuxi Fu Xu Zhao Deli Wang Key laboratory of Material Chemistry for Energy Conversion and Storage(Ministry of Education) Hubei Key Laboratory of Material Chemistry and Service FailureSchool of Chemistry and Chemical EngineeringHuazhong University of Science and TechnologyWuhan 430074HubeiChina Department of Applied Physics Research Institute for Smart EnergyThe Hong Kong Polytechnic UniversityHong KongChina

Nickel(Ni)-based materials act as one of the most promising candidates as platinum-group-metal-free(PGM-free)electrocatalysts for hydrogen oxidation reaction(HOR)in alkaline ***,the electrocatalytic activity of pure Ni is significantly limited due to the sluggish kinetics under alkaline *** accelerate the kinetics,constructing heterostructures and nitride structures have been developed as two representative ***,we combined the two methods and presented a facile synthesis of the sheet-like Ni_(3)N/MoO_(2)in-plane heterostructures for enhanced HOR in alkaline *** to Ni or Ni_(3)N,the Ni_(3)N/MoO_(2)in-plane heterostructures exhibited a significantly increased mass activity by 8.6-fold or 4.4-fold,*** studies revealed that the enhanced activity of Ni_(3)N/MoO_(2)could be attributed to the weakened hydrogen adsorption and strengthened hydroxyl *** work provides a facile approach to design high-efficiency catalysts for hydrogen-oxidation catalysis and beyond.

关键词： Nickel nitride In-plane heterostructures Adsorption Hydrogen oxidation reaction alkaline solution

Corrosion behavior of dissimilar copper/brass joints welded by friction stir lap welding in alkaline solution

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Journal of Central South University 2019年第6期26卷 1573-1581页

作者： Kamran AMINI Farhad GHARAVI Department of Mechanical Engineering Tiran BranchIslamic Azad UniversityIsfahanIran Center for Advanced Engineering Research Majlesi BranchIslamic Azad UniversityIsfahanIran Department of Materials Engineering Sirjan BranchIslamic Azad UniversitySirjanIran

This study was done to evaluate the nugget zone(NZ)corrosion behavior of dissimilar copper/brass joints welded by friction stir lap welding(FSLW)in a solution of 0.015 mol/L borax(pH 9.3).To this end,dissimilar copper/brass plates were welded with two dissimilar heat inputs(low and high)during the welding *** high and low heat inputs were conducted with 710 r/min,16 mm/min and 450 r/min,25 mm/min,*** open circuit potential(OCP)measurements,electrochemical impedance spectroscopy(EIS)and Tafel polarization tests,the electrochemical behavior of the specimens in borate buffer solution was *** the help of scanning electron microscope(SEM),the morphology of welded specimen surfaces was examined after immersion in the test *** to the results,the NZ grain size and resistance improvement reduced due to the nugget zone corrosion with a decreased heat *** results obtained from Tafel polarization and EIS indicated the improved corrosion behavior of the welded specimen NZ with a decrease in the heat input during the welding process unlike the copper and brass ***,an increased heat input during the welding process shows a reduction in the conditions for forming the passive films with higher protection behavior.

关键词： friction stir welding copper brass alloy corrosion behavior alkaline solution dissimilar joint

Conductivity method of alkaline solution in evaluating the spontaneous polarization property of tourmaline

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Conductivity method of alkaline solution in evaluating the s...

Effect of temperature on the stress corrosion cracking of 304 Laustenitic stainless steels in alkaline solution

2012 China Functional Materials Technology and Industry Forum

作者： Jun-ping Meng Jie liu Xiao-li Huo Juan Li Hebei University of technology Institute of Power Source and Ecomaterials Science

The spontaneous polarization property of mineral tourmaline was evaluated by the conductivity method of alkaline *** conductivity changing rate of the alkaline solution(k) was adopted as the evaluation *** this paper,the deionized water and alkaline solution were treated by mineral tourmaline powders,*** conductivity values were tested by a Digital Conductivity *** this basis,the conductivity difference was *** results showed that,the changing rate k increased as the spontaneous polarization *** 010,the spontaneous polarization was strongest.

关键词： Tourmaline Spontaneous polarization alkaline solution Conductivity Evaluation

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Effect of temperature on the stress corrosion cracking of 30...

Understanding the hydroxyl adsorption behavior at Pt electrode surface in high-temperature alkaline solutions

2014中国功能材料科技与产业高层论坛

作者： Liuyi Huang Huaiqiu Zhu Fangfang Zhang Xiaowei Wang Zhejiang Provincial Special Equipment Inspection and Research Institute

A slow strain rate tensile（SSRT）test was carried out to investigate the stress corrosion cracking（SCC）behavior of the sensitized 304L austenitic stainless steels（ASSs）in alkaline solution（0.5M NaOH）.Mechanical properties and fracture morphology evolutions of the 304L ASSs were studied as a function of temperature through slow speed tensile tester and scanning electron microscopy（SEM）.The results showed that the tensile strengthand percentage elongation after fracture significantly reduced as the test temperature *** examination revealed both ductile and brittle fracture features for the specimens tested in different ***,the proportion of brittle fracture characteristics changed with the temperature.

关键词： Stress Corrosion 304L stainless steel SSRT alkaline solution

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Chinese Journal of Chemical Engineering 2023年第2期54卷 173-179页

作者： Bo Pan Biao Liu Shaona Wang Yeqing Lv Hao Du Yi Zhang National Engineering Laboratory for Hydrometallurgical Cleaner Production Technology Key Laboratory of Green Process and EngineeringInstitute of Process EngineeringChinese Academy of SciencesBeijing 100190China University of Chinese Academy of Sciences Beijing 100190China

Since the application in fuel cell,the electrochemical adsorption of hydroxyl has received considerable attention in recent *** most research mainly focus on the room temperature,in this paper,the electrochemical adsorption of hydroxyl in alkaline solution at high temperature was *** unusual oxidation peak was observed at-0.27 V,suggesting new behavior of hydroxyl adsorption *** is known two kinds of cation hydrated clusters exist in alkaline solution,(H_(2)O)_(x-1)M^(+)-H_(2)O-O_(ad)H and(H_(2)O)_xM^(+)-O_(ad)*** K^(+)and Cs^(+),the cluster shows unstable structure due to the weak interaction between hydrated cation and OH^(-)especially at high ***,For Li^(+),Na^(+)the cluster structure would be stable,as the interaction force between the hydrated cation and OH^(-)is so *** was revealed that the unusual oxidation peak has some relationship with the(H_(2)O)_(x-1)M^(+)-H_(2)O-O_(ad)H cluster(K^(+)and Cs^(+))absorbed at Pt electrode *** the temperature was raised,(H_(2)O)_(x-1)M^(+)-H_(2)O-and-O_(ad)H was disconnected,then the O_(ad)H absorbed at Pt surface got *** on the SEM observation,it was showed the unusual electrochemical oxidation reaction would generate platinum oxides,blocking the reactive sites at Pt electrode surface,thus reducing the electrochemical reactivity of Pt ***,parameters of alkaline concentration and temperature were systematically studied,it was found that increase temperature or alkaline concentration was in favor of the unusual oxidation *** study provides more understanding of hydroxyl adsorption behavior at Pt electrode surface for the high temperature water solution environment.

关键词： alkaline solution Hydroxyl adsorption Cationic species High temperature Cationic hydrated clusters

Effect and mechanism of changes in physical structure and chemical composition of new biochar on Cu(Ⅱ)adsorption in an aqueous solution

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Soil Ecology Letters 2022年第3期4卷 237-253页

作者： Shengnan Yuan Zhongxin Tan Hubei Key Laboratory of Soil Environment and Pollution Remediation Key Laboratory of Arable Land Conservation(Middle and Lower Reaches of Yangtze River)Ministry of Agriculture and Rural AffairsCollege of Resources and EnvironmentHuazhong Agricultural UniversityWuhan 430070China

To improve the adsorption effect of biochar on heavy metal Cu(II),we prepared new biochar and explored its modification process influence on original biochar’s physical structure and chemical composition as well as its adsorption mechanism for Cu(II)in an aqueous *** research work,we have reached some significant conclusions:(1)The modified biochar(M2-800)can adsorb Cu(II)at the rate of 98.039 mg g–1,38.8 times higher than that of the original biochar C800(2.525 mg g–1);(2)The biochar modification process boosts its etching and pore expansion,helping Cu(II)enter the inner surface of the adsorbent,but chemical adsorption is still the most essential fixation method for Cu(II);(3)The alkaline modification process promotes the formation of oxygen-containing functional groups,in which–OH/–COOH and iron ions would form C-O-Fe structures such as hydroxyl bridges(Fe-O–)and carboxy bridges(Fe-OOC–);(4)Carboxyl is the primary site of Cu(II)fixation in M2-800,and M2-800 has higher electronegativity(–47.8 mV)and larger pH(11.61),so that Cu(II)can be removed by electrostatic attraction and precipitation.

关键词： Modified biochar alkaline solution C-O-Fe structure Cu(II)adsorption Mechanism

Study on the properties of polyaniline for med in KOH solution

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西南师范大学学报(自然科学版) 1999年第5期24卷 562-565页

作者： Li Nianbing 1,Zhang Shengtao 2,Ding Peidao 3 1 College of Chemistry and Chemical Engineering,Southwest China Normal University,Chongqing 400715 2 College of Chemistry and Chemical Engineering,Chongqing University,Chongqing 400044 3 College of Materi 西南师范大学重庆重庆大学重庆

Electropolymerization of aniline in KOH solution and properties of the polymer were studied by in situ reflex ellipsometry, cyclic voltammetry and fluorescence spectroscopic method. The process of electropolymerization of aniline was different in alkaline and in acidic aqueous media. The complex refractive indices and the fluorescence spectra indicated that the polyaniline was a sort of luminous material.

关键词： polyaniline electropolymerization alkaline solution ellipsometry fluorescence luminous material