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FINITE ELEMENT AND EXPEMMENTAL MODAL ANALYSIS OF ULTRA-PRECISION air bearing LINEAR MOTION STAGE

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FINITE ELEMENT AND EXPEMMENTAL MODAL ANALYSIS OF ULTRA-PRECI...

International Technology and Innovation Conference 2006

作者： ZHANG Ming, ZHU Yu, REN Gexue, DUAN Guanghong, CHEN Yaying, GAO Guohua Dept. of Engineering Mechanics, Tsinghua University, Beijing 100084, China Dept. of Precision Instruments and Mechanology Tsinghua University, Beijing 100084, China

＜正＞air bearing linear motion stages with high speed and ultra high positioning performances are always used in steppers or scanners which are the most important equipments in microlithography process. Excellent structure dynamic characteristics are the base to reach their high performances. Structure resonant frequency, as one of the most important dynamic characteristics, should always be decided in the design phase. Usually, a finite element method was used to get the resonant frequency. But air bearing linear motion stage is a fluent-structure interaction（FSI） system due to the existence of gas film, which makes it difficult to do a finite element analysis as usual. A combined finite element method in which two commercial finite element codes（*** and FEMLAB ） were used to do modal analyses of the stage design along with extensive experimental validation to evaluate stage performance. Good correlation was found between the numerical and experimental results. The results showed that the new method can be used in this kind of stages which makes designers anticipate the stage dynamic characteristics in the design phase.

关键词： FEM air bearing modal analysis.

DESIGN OF A HIGH SPEED air bearing LINEAR PRECISION STAGE

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DESIGN OF A HIGH SPEED AIR BEARING LINEAR PRECISION STAGE

第二届亚洲机械电子学学术会议

作者： Gary Peter Widdowson Siu Wai Ng Jacob W.F.Cheung ASM Assembly Automation Ltd.4/F Watson Center 16 Kung Yip StreetKwai ChungN.T.Hong Kong

This paper describes the design and experimental verification of a high speed air bearing linear precision *** a direct drive linear motor and almost zero friction air bearing guide,this stage has the potential to achieve high speed and precision *** the stiffness of the air bearing is important to the dynamic performance of the stage,the selection and design of the air bearing are discussed in *** experimental stiffness is also presented.A numerical modal analysis is presented together with the experiment data of the air bearing to optimize the design and predict its *** validate the analysis,a modal test with an impulse hammer is carried *** demonstrate the system design,the running performance is investigated with a given motion profile.

关键词： air bearing Porous graphite Stiffness Modal analysis Modal test

NUMERICAL ANALYSIS ON SLIDING air bearing UNDER THE NANOMETER SPACE

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NUMERICAL ANALYSIS ON SLIDING AIR BEARING UNDER THE NANOMETE...

第七届海内外青年设计与制造科学会议

作者： Niu Rongjun and Huang Ping Mechanical Engineering College South China University of Technology China

＜正＞In this paper, the authors firstly devote to develop an improved model based on FK-Boltzmann model suitable to arbitrary Knudsen numbers. Then, an effective numerical method is developed to calculate the modified Reynolds equation for ultra-thin gas film lubrication. The application to two typical cases and numerical calculations using the modified Reynolds equations are performed. The numerical results show that the modified model and numerical method are valid for slider air bearing with nanometer spacing.

关键词： air bearing Finite difference method, Ultra-thin gas film lubrication

FINITE ELEMENT AND EXPERIMENTAL MODAL ANALYSIS OF ULTRA-PRECISION air bearing LINEAR MOTION STAGE

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FINITE ELEMENT AND EXPERIMENTAL MODAL ANALYSIS OF ULTRA-PREC...

2006年中国机械工程学会年会暨中国工程院机械与运载工程学部首届年会

作者： ZHANG Ming*, ZHU Yu, REN Gexue, DUAN Guanghong, CHEN Yaying, GAO Guohua* Dept. of Engineering Mechanics Dept. of Precision Instruments and Mechanology Tsinghua University, Beijing, 100084, China

air bearing linear motion stages with high speed and ultrahigh positioning performances are always used in steppers orscanners which are the most important equipments inmicrolithography process. Excel

关键词： FEM air bearing modal analysis.

Research of Simulation Techniques with Three Degrees of Freedom air bearing Table

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Research of Simulation Techniques with Three Degrees of Free...

Asian Simulation Conference/The 6th International conference on system Simulation and Scientific Computing

作者： XIANG Dong, BAO Gang, WANG Zuwen (Harbin Institute of Technology 459#, Haerbin, 150001, China Dalian Maritime University, Dalian, 116026, China)

air bearing table is one of the most important tools for physical simulation, which can simulate the motion of the spacecraft accurately and create environment with weightlessness and non-friction. An air bearing is usually composed of the support part, the float part and the auxiliary equipments. The air bearing is the key component which can support the table on an air film produced by the bearing and the bearing chock. The auto-balancing system could acquire the attitude information, analyze the motion of the table and move the center of mass to adjust the unbalance moment.

关键词： air bearing physical simulation auto-balancing system

Numerical modeling and analysis of plasmonic flying head for rotary near-field lithography technology

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Friction 2018年第4期6卷 443-456页

作者： Yueqiang HU Yonggang MENG State Key Laboratory of Tribology Tsinghua University

Rotary near-field lithography(RNFL) technology provides a route to overcome the diffraction limit with a high throughput and low cost for nanomanufacturing. Utilizing the advantage of the passive flying of a plasmonic head, RNFL can achieve a 10 m/s processing speed with a perfect near-field condition at dozens of nanometers. The flying performance of the plasmonic flying head(PFH) is the pivotal issue in the system. The linewidth has a strong correlation with the near-field gap, and the manufacturing uniformity is directly influenced by the dynamic performance. A more serious issue is that the unexpected contact between the PFH and substrate will result in system failure. Therefore, it is important to model and analyze the flying process of the PFH at the system level. In this study, a novel full-coupled suspension-PFH-air-substrate(SPAS) model that integrates a six-degree of freedom suspension-PFH dynamics, PFH-air-substrate air bearing lubrication, and substrate vibration, is established. The pressure distribution of the air bearing is governed by the molecular gas lubrication equation that is solved by the finite element method(FEM) with a local pressure gradient based adaptive mesh refinement algorithm using the COMSOL Multiphysics software. Based on this model, three designs of the air bearing surface are chosen to study the static, dynamic, and load/unload performance to verify whether it satisfies the design requirements of RNFL. Finally, a PFH analysis solver *** is developed based on the proposed model.

关键词： rotary near-field lithography (RNFL) coupled analysis air bearing finite element method

Dynamic performance of a long-stroke fast tool servo system

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Nanotechnology and Precision Engineering 2022年第2期5卷 38-53页

作者： Zheng Gong Dehong Huo Zengyuan Niu Wanqun Chen Kai Cheng School of Engineering Newcastle UniversityNewcastle upon Tyne NE17RUUnited Kingdom UPTech Jiangsu Industrial Technology Research InstituteKunshan 215300China School of Electromechanical Engineering Soochow UniversitySoochow 215031China School of Engineering and Design Brunel University LondonLondon UB83PHUnited Kingdom

A fast tool servo(FTS)system can be used to efficiently manufacture optical freeform *** paper investigates the dynamic performance of an FTS system driven by a voice coil motor and guided by air bearings.A simulation model and testing platform are developed to evaluate the load capacity and stiffness of the air *** mechanical dynamic performance of the designed FTS,including modal and harmonic analyses,is assessed using finite element analysis.A nonlinear relation between air-bearing stiffness and mechanical bandwidth is *** working dynamic performance is tested through system runout,tracking performance,and closed-loop *** relations between air-bearing stiffness and the mechanical and working bandwidths are established and *** experiments verify the feasibility of the FTS system with 31.05 N/μm stiffness air-bearings.

关键词： FTS Dynamic performance air bearing Stiffness

Influence of Disk Surface Bulge and Hard Disk Operating Conditions on Hard Disk Gas Film Heat Transfer

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Journal of Harbin Institute of Technology(New Series) 2021年第1期28卷 20-29页

作者： Qinyang Zeng Hongrui Ao Hongyuan Jiang School of Mechatronics Engineering Harbin Institute of TechnologyHarbin 150001China

When the hard disk is running,the cantilever of the magnetic head imposes a certain preload on the slider of the magnetic head to form a wedge space with the *** the disk rotates,the viscous gas enters the convergence gap so that the hydrodynamic pressure generates balance with the force acting on the cantilever,ensuring that the magnetic head flies above the disk in a stable altitude and forms a stable air film between the magnetic head and the disk called air *** the flight altitude is low,the bulge on the disk surface will affect the pressure distribution of air ***,the pressure affects the heat flux of air bearing by influencing the heat transfer parameters,such as thermal conductivity,dynamic viscosity,gas density,and the molecular free path of the *** this paper,heat transfer parameters influence on gas film heat transfer were *** on this,flathead slider and Tri-pad barotropic magnetic head slider were compared,and the effects of disk operating conditions at the average temperature of air bearing were also studied,such as pitch and roll angle of the magnetic head slider,the disk s speed,and the bulge on disk surface.

关键词： air bearing heat transfer Tri-pad barotropic head slider