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review of micromachined optical accelerometers:from mg to sub-μg

Opto-Electronic Advances 2021年第3期4卷 1-24页

作者： Qianbo Lu Yinan Wang Xiaoxu Wang Yuan Yao Xuewen Wang Wei Huang Frontiers Science Center for Flexible Electronics(FSCFE) Shaanxi Institute of Flexible Electronics(SIFE)&Shaanxi Institute of Biomedical Materials and Engineering(SIBME)Northwestern Polytechnical UniversityXi'an 710072China MIIT Key Laboratory of Flexible Electronics(KLoFE) Northwestern Polytechnical UniversityXi’an 710072China The Key Laboratory of Information Fusion Technology Ministry of EducationSchool of AutomationNorthwestern Polytechnical UniversityXi'an 710072China Wuhan National Laboratory for Optoelectronics-Huazhong University of Science and Technology Wuhan 430074China

Micro-Opto-Electro-Mechanical Systems(MOEMS)accelerometer is a new type of accelerometer which combines the merits of optical measurement and Micro-Electro-Mechanical Systems(MEMS)to enable high precision,small volume and anti-electromagnetic disturbance measurement of *** recent years,with the in-depth research and development of MOEMS accelerometers,the community is flourishing with the possible applications in seismic monitoring,inertial navigation,aerospace and other industrial and military *** have been a variety of schemes of MOEMS accelerometers,whereas the performances differ greatly due to different measurement principles and corresponding application *** paper aims to address the pressing issue of the current lack of systematic review of MOEMS *** to the optical measurement principle,we divide the MOEMS accelerometers into three categories:the geometric optics based,the wave optics based,and the new optomechanical *** the most widely studied category,the wave optics based accelerometers are further divided into four sub-categories,which is based on grating interferometric cavity,Fiber Bragg Grating(FBG),Fabry-Perot cavity,and photonic crystal,*** a brief introduction to the measurement principles,the typical performances,advantages and disadvantages as well as the potential application scenarios of all kinds of MOEMS accelerometers are discussed on the basis of typical *** paper also presents the status and development tendency of MOEMS accelerometers to meet the ever-increasing demand for high-precision acceleration measurement.

关键词： accelerometer Micro-Opto-Electro-Mechanical Systems(MOEMS) integrated optics accelerometer review

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