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Implementation of sub-100 nm vertical channel-all-around(CAA) thin-film transistor using thermal atomic layer deposited IGZO channel

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Journal of Semiconductors 2024年第7期45卷 40-44页

作者： Yuting Chen Xinlv Duan Xueli Ma Peng Yuan Zhengying Jiao Yongqing Shen Liguo Chai Qingjie Luan Jinjuan Xiang Di Geng Guilei Wang Chao Zhao Beijing Superstring Academy of Memory Technology Beijing 100176China State Key Laboratory of Fabrication Technologies for Integrated Circuits Institute of MicroelectronicsChinese Academy of SciencesBeijing 100029China

In-Ga-Zn-O(IGZO) channel based thin-film transistors(TFT), which exhibit high on-off current ratio and relatively high mobility, has been widely researched due to its back end of line(BEOL)-compatible potential for the next generation dynamic random access memory(DRAM) application. In this work, thermal atomic layer deposition(TALD) indium gallium zinc oxide(IGZO) technology was explored. It was found that the atomic composition and the physical properties of the IGZO films can be modulated by changing the sub-cycles number during atomic layer deposition(ALD) process. In addition, thin-film transistors(TFTs) with vertical channel-all-around(CAA) structure were realized to explore the influence of different IGZO films as channel layers on the performance of transistors. Our research demonstrates that TALD is crucial for high density integration technology, and the proposed vertical IGZO CAA-TFT provides a feasible path to break through the technical problems for the continuous scale of electronic equipment.

关键词： In-Ga-Zn-O(IGZO) thermal atomic layer deposition vertical channel thin-film transistor

Investigation of nanofluid flow in a vertical channel considering polynomial boundary conditions by Akbari-Ganji’s method

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Theoretical & Applied Mechanics Letters 2022年第4期12卷 257-266页

作者： M.Fallah Najafabadi H.TalebiRostami Kh.Hosseinzadeh D.D.Ganji Department of Mechanical Engineering Babol Noshirvani University of TechnologyBabolIran Department of Mechanical Engineering Amirkabir University of TechnologyTehranIran

In this research,a vertical channel containing a laminar and fully developed nanofluid flow is *** channel surface’s boundary conditions for temperature and volume fraction functions are considered qth-order *** equations related to this problem have been extracted and then solved by the AGM and validated through the Runge-Kutta numerical method and another similar *** the study,the effect of parameters,including Grashof number,Brownian motion parameter,etc.,on the motion,velocity,temperature,and volume fraction of nanofluids have been *** results demonstrate that increasing the Gr number by 100%will increase the velocity profile function by 78%and decrease the temperature and fraction profiles by 20.87%and 120.75%.Moreover,rising the Brownian motion parameter in five different sizes(0.1,0.2,0.3,0.4,and 0.5)causes lesser velocity,about 24.3%at first and 4.35%at the last level,and a maximum 52.86%increase for temperature and a 24.32%rise for ψ occurs when N b rises from 0.1 to *** all N_(t) values,at least 55.44%,18.69%,for F(η),andΩ(η),and 20.23%rise for ψ(η)function is ***,enlarging the N r parameter from 0.25 to 0.1 leads F(η)to rise by 199.7%,fluid dimensionless temperature,and dimensional volume fraction to decrease by 18%and 92.3%.In the end,a greater value of q means a more powerful energy source,amplifying all velocity,temperature,and volume fraction *** main novelty of this research is the combined convection qth-order polynomials boundary condition applied to the channel ***,The AMG semi-analytical method is used as a novel method to solve the governing equations.

关键词： Akbari-Ganji’s method Nanofluid vertical channel Combined convection Polynomial boundary condition

Visualization on Flow Patterns during Condensation of R410A in a vertical Rectangular channel

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Journal of Thermal Science 2014年第3期23卷 269-274页

作者： XU Wenyun JIA Li Institute of Thermal Engineering School of Mechanical Electronic and Control Engineering Beijing Jiaotong University

The visualization experiments on HFC R410A condensation in a vertical rectangular channel （14.34mm hydraulic diameter, 160mm length） were investigated. The flow patterns and heat transfer coefficients of condensation in the inlet region were presented in this paper. Better heat transfer performance can be obtained in the inlet region, and flow regime transition in other regions of the channel was also observed. Condensation experiments were carried out at different mass fluxes （ from 1.6 kg/h to 5.2 kg/h） and at saturation temperature 28~ C. It was found that the flow patterns were mainly dominated by gravity at low mass fluxes. The effects of interfacial shear stress on condensate fluctuation are significant for the film condensation at higher mass flux in vertical flow, and con- sequently, the condensation heat transfer coefficient increases with the mass flux in the experimental conditions, The drop formation and growth process of condensation were also observed at considerably low refrigerant vapor flow rate.

关键词： flow pattern condensation vertical channel heat transfer R410A

The effect of heat transfer on the nonlinear peristaltic transport of a Jeffrey fluid through a finite vertical porous channel

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International Journal of Biomathematics 2016年第2期9卷 105-128页

作者： K. Vajravelu S. Sreenadh P. Lakshminarayana G. Sucharitha Department of Mathematics University of Central Florida Orlando Florida 32816-1364 USA Department of Mechanical Materials and Aerospace Engineering University of Central Florida Orlando Florida 32816-1364 USA Department of MathematicsSri Venkateswara University Tirupati 517502 India Department of MathematicsSree Vidyanikethan Engineering College Tirupati 517102 India

In this paper we analyze the influence of free convection on nonlinear peristaltic transport of a Jeffrey fluid in a finite vertical porous stratum using the Brinkman model. Heat is generated within the fluid by both viscous and Darcy dissipations. The coupled nonlinear governing equations are solved analytically. The expressions for the temperature, the axial velocity, the local wall shear stress and the pressure gradient are obtained. The effects of various physical parameters such as the Jeffrey parameter λ1, the permeability parameter σ and the heat source/sink parameter β are analyzed through graphs, and the results are discussed in detail. It is observed that the velocity field increases with increasing values of the Jeffrey parameter but it decreases with increasing values of the permeability parameter. It is found that the pressure rise increases with decreasing Jeffrey parameter and increasing permeability parameter. We notice that the effect of the permeability parameter a is the strongest on the bolus trapping phenomenon. For λ1 = 0, N =0, the results of the present study reduce to the results of Tripathi [Math. *** 57 （2013） 1270-1283]. Further the effect of viscous and Darcy dissipations is to reduce the rate of heat transfer in the finite vertical porous channel under peristalsis.

关键词： Peristaltic transport heat transfer Jeffrey fluid porous medium vertical channel trapping phenomena.

Natural Convection in a vertical Open-Ended channel： Comparison between Experimental and Numerical Results

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Journal of Energy and Power Engineering 2013年第7期7卷 1265-1276页

作者： Zoubir Amine Christophe Daverat Shihe Xin Stephanie Giroux-Julien Herve Pabiou Christophe Menezo University of Lyon Centre National de la Recherche Scientifique France Institut National des Sciences Appliqudes de Lyon CETHIL UMR5008 F-69621 Villeurbanne France Universite Lyon 1 CETHIL UMR5008 F-69621 Villeurbanne France Chair Institut National des Sciences Appliqudes de Lyon/Electricitd de France "Energy Innovations and Habitats "' CETHILUMRSO08 F-69621 Villeurbanne France

The present study deals with natural convection flow in a vertical open-ended channel with wall constant heat flux. The experimental and numerical investigations are both conducted using water as the working fluid. The numerical code is developed using finite differences scheme to solve the Navier-Stokes equations under the Boussinesq assumption. Concerning the experimental apparatus, it consists of two heated walls immersed in water. Temperature and velocity measurements are provided for different modified Rayleigh numbers based on the walls spacing b Rab = 1.67 x 10 6,3.6 x 10 6,8.97 x10 6,1.69 x 10 7,4.29 x 10 7. The numerical code is first validated with a numerical benchmark. Then, comparison between experimental and numerical results is performed. The code provides a satisfactory prediction of main quantities compared to the experimental results but only for the lowest Rayleigh numbers. For higher modified Rayleigh numbers, the flow becomes three-dimensional and turbulent. Therefore, 2D numerical simulations fail to predict flow and heat transfer for this range of modified Rayleigh number.

关键词： Natural convection vertical channel numerical study experimental study.

Heat transfer and flow structure in centrally-confined 2-D Rayleigh-Bénard convection

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Journal of Hydrodynamics 2024年第4期36卷 772-780页

作者： Cong Sun Jian-zhao Wu Xiao-hui Meng Cai-xi Liu Wei Xu Yu-hong Dong Quan Zhou Shanghai Institute of Applied Mathematics and Mechanics School of Mechanics and Engineering ScienceShanghai Key Laboratory of Mechanics in Energy EngineeringShanghai UniversityShanghai200072China China Electrical Equipment Group Research Institute of Science and Technology Co.Ltd. Shanghai200072China

Through direct numerical simulations,we investigated the flow structure and heat transfer of the centrally confined 2-D Rayleigh-Bénard(RB)convection over the Rayleigh number range 9×10^(5)≤Ra≤10^(9) at a fixed Prandtl number Pr=*** is found that with increasing Ra,the number of convection rolls in the central vertical channel increases from zero to *** there is no rolls in the vertical channel,the convective flow in central region is significantly influenced by the boundary layer,whereas when the convection rolls is generated in the vertical channel,the convective flows in central regions is free from the boundary layer limitation,and by defining the characteristic length,one obtains the heat transfer scaling law relation in vertical channel,i.e.,Nu_(vc)∼Ra_(vc)^(0.476±0.005),which could be the evidence of“ultimate regime”.

关键词： Rayleigh-Benard(RB)turbulence heat transport vertical channel ultimate regime

Effects of Viscous Dissipation and Periodic Heat Flux on MHD Free Convection channel FlowwithHeat Generation

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Frontiers in Heat and Mass Transfer 2024年第1期22卷 141-156页

作者： Mustafa Abdullah Robotics and Artificial Intelligence Engineering Department Faculty of EngineeringAl-Ahliyya Amman UniversityAmman19328Jordan

This study investigates the influence of periodic heat flux and viscous dissipation on magnetohydrodynamic(MHD)flow through a vertical channel with heat generation.A theoretical approach is *** channel is exposed to a perpendicular magnetic field,while one side experiences a periodic heat flow,and the other side undergoes a periodic temperature *** solutions for the governing partial differential equations are obtained using a finite difference approach,complemented by an eigenfunction expansion method for analytical *** and discussions illustrate how different variables affect the flow velocity and temperature *** offers comprehensive insights into MHD flow behavior and its interactions with the magnetic field,heat flux,viscous dissipation,and heat *** findings hold significance for engineering applications concerning fluid dynamics and heat transfer,offering valuable knowledge in this *** study concludes that the transient velocity and temperature profiles exhibit periodic patterns under periodic heat flow conditions.A temperature reduction is observed with an increase in the wall temperature phase *** contrast,an increase in the heat flux phase angle values raises the temperature values.

关键词： Magnetohydrodynamics(MHD) heat generation viscous dissipation periodic heat flux vertical channel

Flow and heat transfer of composite porous medium saturated with nanofluid

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Propulsion and Power Research 2019年第2期8卷 173-181页

作者： J.C.Umavathi K.Hemavathi Department of Mathematics Gulbarga UniversityGulbarga 585106KarnatakaIndia

The present article is concerned with the heat transfer of nanofluid saturated with porous medium sandwiched between clear viscous fluid filled in a vertical *** model is developed to analyze the behavior of nanofluids taking into account the solid volume *** governing equations are obtained based on the Darcy's law for the porous medium and Tiwari and Das model to define the *** viscous and Darcy dissipation terms are included in the energy *** transformed dimensionless governing equations are solved analytically using regular *** are carried out on the flow characteristics for different values of Grashof number,Brinkman number,solid volume fraction and porous parameter using water as base fluid and copper as *** and heat transfer are also observed using five different types of *** is found that the maximum value of Nusselt number is obtained for silver nanoparticle.

关键词： Nanofluid Porous matrix Viscous fluid vertical channel

Heat and Mass Transfer on Non-Newtonian Peristaltic Flow in a channel in Presence of Magnetic Field: Analytical and Numerical Analysis

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Applied Mathematics 2024年第8期15卷 568-583页

作者： Md. Maruf Hasan Md. Enamul Karim Md. Abdus Samad Department of Mathematics Comilla University Comilla Bangladesh Department of Applied Mathematics University of Dhaka Dhaka Bangladesh

A study has been arranged to investigate the flow of non-Newtonian fluid in a vertical asymmetrical channel using peristalsis. The porous medium allows the electrically conductive fluid to flow in the channel, while a uniform magnetic field is applied perpendicular to the flow direction. The analysis takes into account the combined influence of heat and mass transfer, including the effects of Soret and Dufour. The flow’s non-Newtonian behavior is characterized using a Casson rheological model. The fluid flow equations are examined within a wave frame of reference that has a wave velocity. The analytic solution is examined using long wavelengths and a small Reynolds number assumption. The stream function, temperature, concentration and heat transfer coefficient expressions are derived. The bvp4c function from MATLAB has been used to numerically solve the transformed equations. The flow characteristics have been analyzed using graphs to demonstrate the impacts of different parameters.

关键词： Stream Function Mass Transfer vertical channel Casson Fluid