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Scalable fabrication of microneedle arrays via spatially controlled uv exposure

Microsystems & Nanoengineering 2016年第1期2卷 73-81页

作者： Hidetoshi Takahashi Yun Jung Heo Nobuchika Arakawa Tesuo Kan Kiyoshi Matsumoto Ryuji Kawano Isao Shimoyama Department of Mechano-Informatics Graduate School of Information Science and Technologythe University of Tokyo7-3-1 HongoBunkyo-kuTokyo 113-8656Japan Department of Mechanical Systems Engineering Graduate School of EngineeringTokyo University of Agriculture and Technology2-24-16 Naka-choKoganei-shiTokyo 184-8588Japan Department of Mechanical Engineering and Intelligent Systems Graduate School of Informatics and Engineeringthe University of Electro-Communications1-5-1 ChofugaokaChofu-shiTokyo 182-8585Japan IRT Research Initiative the University of Tokyo7-3-1 HongoBunkyo-kuTokyo 113-8656Japan Department of Biotechnology and Life Science Graduate School of EngineeringTokyo University of Agriculture and Technology2-24-16 Naka-choKoganei-shiTokyo 184-8588Japan

This paper describes a theoretical estimation of the geometry of negative epoxy-resist microneedles prepared via inclined/rotated ultraviolet(uv)lithography based on spatially controlled uv exposure *** comparison with other methods based on uv lithography,the present method can create microneedle structures with high *** negative photoresist is exposed to inclined/rotated uv through circular mask patterns,a three-dimensional,needle-shaped distribution of the exposure dose forms in the irradiated *** the inclination angles and the exposure dose modifies the photo-polymerized portion of the photoresist,thus allowing the variation of the heights and contours of microneedles formed by using the same mask *** an experimental study,the dimensions of the fabricated needles agreed well with the theoretical predictions for varying inclination angles and exposure *** results demonstrate that our theoretical approach can provide a simple route for fabricating microneedles with on-demand *** fabricated microneedles can be used as solid microneedles or as a mold master for dissolving microneedles,thus simplifying the microneedle fabrication *** envision that this method can improve fabrication accuracy and reduce fabrication cost and time,thereby facilitating the practical applications of microneedle-based drug delivery technology.

关键词： inclined/rotated lithography microneedle array uv exposure ratio

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