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optimization Deployment of temperature measurement points for CZ Silicon Single Crystal Growth Equipment Based on Improved Fuzzy C-Means Clustering

Optimization Deployment of Temperature Measurement Points fo...

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第43届中国控制会议

作者： Weichao Huang Siyuan Cao Ding Lui School of Automation and Information Engineering Xi'an University of Technology Shannxi Key Laboratory of Complex System Control and Intelligent Information Processing

The inverse heat transfer method is an effective inversion algorithm for solving the heat transfer at non-measurable places of the study object. However, the current inverse heat transfer inversion method has the problems of low accuracy and difficult selection of temperature measurement point locations. To solve this problem, this paper proposes an optimization algorithm for measurement point locations based on improved fuzzy c-means clustering(IFCM). The method first generates the initial clustering center through a specific density function and introduces the Mahalanobis distance to solve the problem that the traditional fuzzy c-means clustering results depend on the initial clustering center and the results are unstable. Then, an optimized deployment algorithm based on IFCM temperature measurement points is proposed and compared with other mean value clustering algorithms. Finally, the optimal temperature measurement position on the crystal surface is selected by the IFCM temperature measurement point optimization deployment algorithm on the CZ(Czochraski)silicon single crystal growth equipment, and the inversion results of the randomly selected temperature measurement point scheme and the optimized temperature measurement point scheme are compared by the real-time inversion algorithm based on the dynamic matrix control multi-boundary heat flux, and the results of the optimized temperature measurement point scheme are obtained to be better than that of the randomly selected temperature measurement point scheme.

关键词： Fuzzy c-means clustering IFCM temperature measurement point optimization Inverse heat transfer

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