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Tribological Performance of Different Concentrations of Al_(2)O_(3)Nanofluids on Minimum Quantity Lubrication Milling

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Chinese Journal of Mechanical Engineering 2023年第4期36卷 67-78页

作者： Xiufang Bai Juan Jiang Changhe Li Lan Dong Hafiz Muhammad Ali Shubham Sharma School of Mechanical and Automotive Engineering Qingdao University of TechnologyQingdao 266520China School of Mechanical and Electrical Engineering Qingdao Binhai UniversityQingdao 266555China Mechanical Engineering Department King Fahd University of Petroleum and MineralsDhahran 31261Saudi Arabia Department of Mechanical Engineering IK Gujral Punjab Technical UniversityMain Campus-KapurthalaJalandhar 144603India

Nanofluid minimum quantity lubrication(NMQL)is a green processing technology.Cottonseed oil is suitable as base oil because of excellent lubrication performance,low freezing temperature,and high yield.Al_(2)O_(3)nanoparticles improve not only the heat transfer capacity but also the lubrication performance.The physical and chemical proper-ties of nanofluid change when Al_(2)O_(3)nanoparticles are added.However,the effects of the concentration of nanofluid on lubrication performance remain unknown.Furthermore,the mechanisms of interaction between Al_(2)O_(3)nanoparti-cles and cottonseed oil are unclear.In this research,nanofluid is prepared by adding different mass concentrations of Al_(2)O_(3)nanoparticles(0,0.2%,0.5%,1%,1.5%,and 2%wt)to cottonseed oil during minimum quantity lubrication(MQL)milling 45 steel.The tribological properties of nanofluid with different concentrations at the tool/workpiece interface are studied through macro-evaluation parameters(milling force,specific energy)and micro-evaluation parameters(surface roughness,micro morphology,contact angle).The result show that the specific energy is at the minimum(114 J/mm^(3)),and the roughness value is the lowest(1.63μm)when the concentration is 0.5 wt%.The surfaces of the chip and workpiece are the smoothest,and the contact angle is the lowest,indicating that the tribological proper-ties are the best under 0.5 wt%.This research investigates the intercoupling mechanisms of Al_(2)O_(3)nanoparticles and cottonseed base oil,and acquires the optimal Al_(2)O_(3)nanofluid concentration to receive satisfactory tribological properties.

关键词： Milling Al_(2)O_(3)nanofluid Minimum quantity lubrication(MQL) surface micromorphology

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Investigation of aluminum gate CMP in a novel alkaline solution

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Journal of Semiconductors 2016年第1期37卷 137-144页

作者：冯翠月刘玉岭孙鸣张文倩张金王帅 Institute of Microelectronics Hebei University of Technology Tianjin 300130 China

Beyond 45 nm, due to the superior CMP performance requirements with the metal gate of aluminum in the advanced CMOS process, a novel alkaline slurry for an aluminum gate CMP with poly-amine alkali slurry is investigated. The aluminum gate CMP under alkaline conditions has two steps： stock polishing and fine polishing. A controllable removal rate, the uniformity of aluminum gate and low corrosion are the key challenges for the alkaline polishing slurry of the aluminum gate CMP. This work utilizes the complexation-soluble function of FA/O II and the preference adsorption mechanism of FA/O I nonionic surfactant to improve the uniformity of the surface chemistry function with the electrochemical corrosion research, such as OCP-TIME curves, Tafel curves and AC impedance. The result is that the stock polishing slurry （with SiO2 abrasive） contains 1 wt.% H2O2,0.5 wt.% FA/O II and 1.0 wt.% FA/O I nonionic surfactant. For a fine polishing process, 1.5 wt.% H2O2, 0.4 wt.% FA/O II and 2.0 wt.% FA/O I nonionic surfactant are added. The polishing experiments show that the removal rates are 3000 ±50 A/min and 1600 ± 60 A/dmin, respectively. The surface roughnesses are 2.05 ± 0.128 nm and 1.59 ± 0.081 nm, respectively. A combination of the functions of FA/O II and FA/O I nonionic surfactant obtains a controllable removal rate and a better surface roughness in alkaline solution.

关键词： alkaline solution aluminum CMP electrochemical surface micromorphology

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Protein adsorption behaviors on chitosan/poly(ε-caprolactone) blend films studied by quartz crystal microbalance with dissipation monitoring(QCM-D)

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Science China(Technological Sciences) 2009年第8期52卷 2275-2279页

作者： ZENG Rong ZHANG Yi LIANG ZhiHong TU Mei ZHOU ChangRen Department of Materials Science and Engineering College of Science and EngineeringJinan UniversityGuangzhou 510632China Engineering Research Center of Artificial Organs and Materials Ministry of EducationGuangzhou 510632China Experiment and Technology Center Jinan UniversityGuangzhou 510632China

Chitosan/poly(ε-caprolactone) (PCL) blend films in different mass ratios were prepared using the chitosan/PCL mixture solutions in 80 vol.-% acetic acid by spin coating. Their surface micromorphologies were assessed by atomic force microscopy (AFM). It was found that the micromorphology of chitosan/PCL blend films was in large extent related to the mass ratio of chitosan. 25 wt% chitosan/PCL blend film presented microphase separation. The protein adsorption of bovine serum albumin (BSA) onto chitosan/PCL blend films was investigated by using quartz crystal microbalance with dissipation monitoring (QCM-D) in real time. The results suggested that the amount of adsorbed BSA on the chitosan/PCL blend films decreased with the addition of chitosan, but the structure and viscoelastic properties of the adsorbed BSA layers were greatly affected by the surface micromorphology of chitosan/PCL blend films. BSA absorbed on the 25 wt% chitosan/PCL blend film with microphase separa- tion showed larger adsorption reversibility, and preferred to form a loose, dissipative layer in comparison with those on other chitosan/PCL blend films without microphase separation.

关键词： protein adsorption chitosan poly(ε-caprolactone) quartz crystal microbalance with dissipation monitoring(QCM-D) surface micromorphology

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