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A hybrid chemical modification strategy for monocrystalline silicon micro-grinding:Experimental investigation and synergistic mechanism

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Chinese Journal of Aeronautics 2023年第7期36卷 147-159页

作者： Yinghui REN Kexin LI Wei LI Xiangming HUANG Xiaoman LIU Genyu CHEN Toshiro DOI College of Mechanical and Vehicle Engineering Hunan UniversityChangsha 410082China Laser Research Institute Hunan UniversityChangsha 410082China Kyushu University Fukuoka 814-0001Japan

For high performance manufacturing of micro parts and features,a hybrid chemical modification strategy is proposed to decrease critical energy barrier of mechanical removal of hard and brittle crystal material by refining localized machining *** strategy,namely UVlight and IR-laser hybrid chemical modification(UVIR-CM)strategy,includes two steps,an ultraviolet light(UV-light)catalytic advanced oxidation and an infrared laser(IR-laser)assisted selective modification based on Fenton liquid–solid reaction for monocrystalline *** modification effects of UVIR-CM strategy were investigated by surface morphology micro-observation,crosssection transmission electron microscopy(TEM)observation,Raman spectroscopy analysis and nanoindentation *** results demonstrated that varied degrees of laser texturing appeared on different strategy samples’IR-laser scanned *** the IR-laser thermal damage has been successfully inhibited due to the refraction and reflection of energy by bubbles in liquid *** for the UVIR-CM strategy,a uniform and amorphous silicate layer is detected in a certain *** UV-light promotes oxidation cycle ability of the chemical solution and ensures sufficient oxide modified layer for subsequent *** to synergism of photochemical,photothermal and kinetic effects induced by IR-laser,the modified layer displays layered structure with about 600 nm thickness,(2.7±0.60)GPa nanohardness,and(93.7±22.9)GPa indentation *** the layered structure is amorphous layer,nanocrystal and micro-twins layer from the surface to the interior of ***,it reveals that the subsequent mechanical removal will become easy due to decreasing energy barrier of monocrystalline silicon in selective ***,its original excellent mechanical properties also are maintained under a certain *** results contribute to develop a novel combined micro-machining technology to achieve collaborative manufacturin

关键词： modification strategy Monocrystalline silicon Multi-energy fields selective surface modification

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