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A Novel Neuro-Fuzzy Model-Based run-to-run control for Batch Processes with Uncertainties

A Novel Neuro-Fuzzy Model-Based Run-to-run Control for Batch...

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2009中国控制与决策会议

作者： JIA Li~1,SHI Jiping~1,SONG Yang,~1,CHIU Min-Sen~2 1.Shanghai Key Laboratory of Power Station Automation Technology,Department of Automation,College of Mechatronics Engineering and Automation,Shanghai University,Shanghai 200072,China 2.Faculty of Engineering,National University of Singapore,Singapore

＜正＞In this paper,a run-to-run control with neuro-fuzzy model updating mechanism is *** strategy features the ability to learn from previous batches to obtain iteratively the optimal control profile and adjust the neuro-fuzzy model *** addition,an updating algorithm guaranteeing the global convergence of the weights of the model is developed based on the Lyapunov *** a result,model uncertainties can be *** results show that by updating the model from batch to batch,the control profile converges to the corresponding suboptimal one in the subsequent batches.

关键词： batch processes neuro-fuzzy system run-to-run control global convergence

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A Survey of run-to-run control Algorithms for High-mix Semiconductor Manufacturing Processes

A Survey of Run-to-Run Control Algorithms for High-mix Semic...

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第三十届中国控制会议

作者： MA Ming-Da,ZENG Xian-Lin,DUAN Guang-Ren 1.Center for control and Guidance Technology,Harbin Institute of Technology,Harbin 150001,P.R.China

The modeling and control of high-mix production system in semiconductor manufacturing impose great challenge for process *** different methods have been proposed to improve control performance of the high-mix *** this paper,an overview of the recent control algorithms for high-mix system is *** thread-based methods and the non-threaded state estimation methods which are studied and practiced widely in semiconductor manufacturing are discussed in *** research directions for the run-to-run control of mixed product system are pointed out based on the extensive study of current literatures.

关键词： run-to-run control Semiconductor Manufacturing High-mix process control Threads State Estimation

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run to run control Based on Adaptive Cluster Method for High-mix Semiconductor Manufacturing Processes

Run to Run Control Based on Adaptive Cluster Method for High...

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第二十九届中国控制会议

作者： David Shan-Hill WONG Shi-Shang JANG Department of Chemical Engineering National Tsing-Hua University

In the semiconductor manufacturing process,products with different recipe will be produced on the same tool or products with same recipe will be produced on different tools due to the capacity of ***,it is difficult to control a mixed run production process containing low production frequency products with high *** proposed a control scheme which combines adaptive k-means cluster method and run-to-run control to improve the performance of low frequency products in the mixed run *** products could be classified into the same group adaptively and be controlled by a EWMA *** cluster controller is updated by large and small frequency products,so the low frequency products can be improved by the information from similar large frequency *** proposed control scheme is also evaluated by an industrial application.

关键词： run-to-run control EWMA Mix Product Process k-means Cluster

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Variable EWMA controller for High Mixed Semiconductor Manufacturing Processes

Variable EWMA Controller for High Mixed Semiconductor Manufa...

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第三十届中国控制会议

作者： WONG David Shan-Hill Department of Chemical Engineering National Tsing-Hua University

＜正＞In high mixed semiconductor processes,the group and product Exponentially Weighted Moving Average（G＆P EWMA） controller is a popular model based on run-to-run ***,how to select optimum weights is the key issue in the G＆P EWMA *** this paper,an auto-tuning scheme for G＆P EWMA controller is proposed to improve the control *** weights of G＆P EWMA controller for next run are found using iterative algorithm which based on a set of previous run ***,the dataset is updated by a moving window *** auto-tuning of G＆P EWMA controller can ensure that every run is under the best *** validation of the proposed method is demonstrated by an industrial application.

关键词： run-to-run control EWMA High mixed product process

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