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An MWCNT-doped SnO_2 thin film NO_2 gas sensor by rf reactive magnetron sputtering

Journal of Semiconductors 2010年第2期31卷 23-28页

作者：林伟黄世震陈文哲 College of Material Science and Engineering Fuzhou University College of Physics and Information Engineering Fuzhou University Fujian Key Laboratory of Microelectronics and Integrated Circuits

An MWCNT-doped （multi-walled carbon nanotube） Sn02 thin film NO2 gas sensor, prepared by radio frequency reactive magnetron sputtering, showed a high sensitivity to ultra-low concentrations of NO2 in the parts per billion range. X-ray diffraction, X-ray photoelectron spectroscopy, and scanning electron microscopy （SEM） characterizations indicated that the MWCNTs were affected by the morphology of the SnO2 thin film and the particle size. The properties of the MWCNT-doped SnO2 sensor, such as sensitivity, selectivity, and response-recovery time, were investigated. Experimental results revealed that the MWCNT-doped SnO2 thin film sensor response to NO2 gas depended on the operating temperature, NO2 gas concentration, thermal treatment conditions, film thickness, and so on. The mechanism of the gas-sensing property of the MWCNT-doped SnO2 thin film sensor was investigated and showed that the improved gas-sensing performance should be attributed to the effects between MWCNTs （p-type） and SnO2 （n-type） semiconductors.

关键词： Sn02 multi-walled carbon nanotube rf reactive magnetron sputtering NO2 sensor

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Tribological performance under different environments of Ti-C-N composite films for marine wear-resistant parts

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International Journal of Minerals,Metallurgy and Materials 2023年第1期30卷 144-155页

作者： Hongbo Ju Rui Zhou Jing Luan Ch Sateesh Kumar Lihua Yu Junhua Xu Junfeng Yang Bowei Zhang Filipe Fernandes School of Materials Science and Engineering Jiangsu University of Science and TechnologyZhenjiang 212003China CEMMPRE—Centre for Mechanical Engineering Materials and Processes Department of Mechanical EngineeringUniversity of CoimbraCoimbra 3030-788Portugal CFAA University of the Basque Country UPV/EHUBilbao 48170Spain ISEP-School of Engineering Polytechnic of PortoPorto 4200-072Portugal Key Laboratory of Materials Physic Institute of Solid State PhysicsHefei Institute of Physical SciencesChinese Academy of SciencesHefei 230031China Institute for Advanced Materials and Technology University of Science and Technology BeijingBeijing 100083China

The need for reducing the wear in mechanical parts used in the industry makes self-lubricant films one of the sustainable solutions to achieve long-term protection under different environmental *** purpose of this work is to study the influence of C additions on the tribological behavior of a magnetron-sputtered TiN film in air,water,and *** results show that the addition of C into the TiN binary film induced a new amorphous phase,and the films exhibited a dual phase of fcc(face-centered cubic)-TiN and amorphous *** antifriction and wear-resistance properties were enhanced in air and water by adding 19.1at%***,a further increase in the C concentration improved anti-frictional properties but also led to higher wear *** the amorphous phase induced microbatteries and accelerated the corrosion of TiN phases in seawater,the negative abrasion state was detected for all Ti-C-N films due to the adhesion of the tribocorrosion debris on the wear track.

关键词： rf reactive magnetron sputtering Ti-C-N films microstructure tribological properties in air/water/seawater

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