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Hydrogel-elastomer-based stretchable strain sensor fabricated by a simple projection lithography method

International Journal of Smart and Nano Materials 2021年第3期12卷 256-268页

作者： Zhenqing Li Xiangnan He Jianxiang Cheng Honggeng Li Yuan-Fang Zhang Xiaojuan Shi Kai Yu Hui Ying Yang Qi Ge Shenzhen Key Laboratory of Biomimetic Robotics and Intelligent Systems Department of Mechanical and Energy EngineeringSouthern University of Science and TechnologyShenzhenChina Guangdong Provincial Key Laboratory of Human-Augmentation and Rehabilitation Robotics in Universities Southern University of Science and TechnologyShenzhenChina Digital Manufacturing and Design Centre Singapore University of Technology and DesignSingapore Department of Mechanical Engineering University of Colorado DenverDenverCOUSA National Key Laboratory of Science and Technology on Advanced Composites in Special Environments Harbin Institute of TechnologyHarbinP.R.China

Stretchable strain sensor detects a wide range of strain variation and is therefore a key component in various *** traditional ones made of elastomers doped with conductive components or fabricated with liquid conductors,ionically conductive hydrogel-based strain sensors remain conductive under large deformations and are ***,dehydration is a challenging issue for the *** have developed hydrogel-elastomer-based strain sensors where an elastomer matrix encapsulates a hydrogel circuit to prevent its ***,the reported multistep approaches are generally *** group recently reported a multimaterial 3D printing approach that enables fast fabrication of such sensors,yet requires a self-built digital-light-processing-based multimaterial 3D ***,we report a simple projection lithography method to fabricate hydrogel-elastomer-based stretchable strain sensors within 5 *** method only requires a UV projector/lamp with photomasks;the chemicals are commercially available;the protocols for preparing the polymer precursors are friendly to users without chemistry ***,the manufacturing flexibility allows users to readily pattern the sensor circuit and attach the sensor to a 3D printed soft pneumatic actuator to enable strain sensing on the *** proposed approach paves a simple and versatile way to fabricate hydrogel-elastomer-based stretchable strain sensors and flexible electronic devices.

关键词： Ionically conductive hydrogel stretchable strain sensor projection lithography

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Feature size below 100 nm realized by UVLEDbased microscope projection photolithography

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Light(Advanced Manufacturing) 2023年第4期4卷 72-81页

作者： Lei Zheng Tobias Birr Urs Zywietz Carsten Reinhardt Bernhard Roth Hannover Centre for Optical Technologies Leibniz University Hannover30167 HannoverGermany Cluster of Excellence PhoenixD(Photonics Opticsand Engineering-Innovation Across Disciplines)30167 HannoverGermany Laboratory of Nano and Quantum Engineering 30167 HannoverGermany Bremen University of Applied Science 28199 BremenGermany

The demand for miniaturization and integration of optical elements has fostered the development of various micro-and nanofabrication *** this work,we developed a low-cost UV-LED-based microscope projection photolithography system for rapid and high-resolution *** system can be easily implemented using off-the-shelf *** allows for micro-and nanostructuring within *** optimizing the process,a minimum feature size down to approximately 85 nm was successfully *** addition,investigations on fabrication of the same structures using both costly and economic microscope objectives were *** sizes below 100 nm can be stably *** demonstrated approach extends the technology capabilities and may find applications in fields such as nanophotonics,biophotonics sensing and material science.

关键词： Microfabrication Nanofabrication Subwavelength structuring projection lithography UV-LED lithography

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