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A Generalized polymer Precursor Ink Design for 3D Printing of Functional Metal Oxides

Nano-Micro Letters 2023年第10期15卷 433-448页

作者： Hehao Chen Jizhe Wang Siying Peng Dongna Liu Wei Yan Xinggang Shang Boyu Zhang Yuan Yao Yue Hui Nanjia Zhou Key Laboratory of 3D Micro/Nano Fabrication and Characterization of Zhejiang Province School of Engineering and Research Center for Industries of the FutureWestlake UniversityHangzhou 310030People’s Republic of China Institute of Advanced Technology Westlake Institute for Advanced StudyHangzhou 310024People’s Republic of China School of Materials Science and Engineering Zhejiang UniversityHangzhou 310027People’s Republic of China School of Chemical Engineering and Advanced Materials the University of AdelaideAdelaide 5005Australia

Three-dimensional-structured metal oxides have myriad applications for optoelectronic devices.Comparing to conventional lithography-based manufacturing methods which face significant challenges for 3D device architectures,additive manufacturing approaches such as direct ink writing offer convenient,on-demand manufacturing of 3D oxides with high resolutions down to sub-micrometer scales.However,the lack of a universal ink design strategy greatly limits the choices of printable oxides.Here,a universal,facile synthetic strategy is developed for direct ink writable polymer precursor inks based on metal-polymer coordination effect.Specifically,polyethyleneimine functionalized by ethylenediaminetetraacetic acid is employed as the polymer matrix for adsorbing targeted metal ions.Next,glucose is introduced as a crosslinker for endowing the polymer precursor inks with a thermosetting property required for 3D printing via the Maillard reaction.For demonstrations,binary(i.e.,ZnO,CuO,In_(2)O_(3),Ga_(2)O_(3),TiO_(2),and Y_(2)O_(3)) and ternary metal oxides(i.e.,BaTiO_(3) and SrTiO_(3)) are printed into 3D architectures with sub-micrometer resolution by extruding the inks through ultrafine nozzles.Upon thermal crosslinking and pyrolysis,the 3D microarchitectures with woodpile geometries exhibit strong light-matter coupling in the mid-infrared region.The design strategy for printable inks opens a new pathway toward 3D-printed optoelectronic devices based on functional oxides.

关键词： 3D printing Maillard reaction polymer-assisted deposition Metal oxide Photonic crystal

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Enhancing the thermal conductivity of polymer-assisted deposited Al_2O_3 film by nitrogen doping

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Chinese Physics B 2012年第12期21卷 372-376页

作者：黄江张胤潘泰松曾波胡国华林媛 State Key Laboratory of Electronic Thin Films and Integrated Devices University of Electronic Science and Technology of China

polymer-assisted deposition technique has been used to deposit Al2O3 and N-doped Al2O3 （AION） thin films on Si（100） substrates. The chemical compositions, crystallinity, and thermal conductivity of the as-grown films have been characterized by X-ray photoelectron spectroscopy （XPS）, X-ray diffraction （XRD）, and 3-omega method, respectively. Amorphous and polycrystalline Al2O3 and AlON thin films have been formed at 700 ℃ and 1000 ℃. The thermal conductivity results indicated that the effect of nitrogen doping on the thermal conductivity is determined by the competition of the increase of Al-N bonding and the suppression of crystallinity. A 67% enhancement in thermal conductivity has been achieved for the samples grown at 700 ℃, demonstrating that the nitrogen doping is an effective way to improve the thermal performance of polymer-assisted-deposited Al2O3 thin films at a relatively low growth temperature.

关键词： nitrogen-doped Al2O3 thin film thermal conductivity polymer-assisted deposition

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