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Sensitivity Improvements for picosecond Ultrasonic Thickness Measurements in Gold and Tungsten Nanoscale Films

Nanomanufacturing and Metrology 2024年第2期7卷 1-12页

作者： Jiaqi Dong Chengyuan Yao Yuanhao Zhu Shaojie Li Bowen Liu JinTao Fan Chunguang Hu Youjian Song Minglie Hu Key Laboratory of Opto-Electronic Information Science and Technology of Ministry of Education School of Precision Instruments and Opto-Electronics EngineeringTianjin UniversityTianjin 300072China State Key Laboratory of Precision Measuring Technology and Instruments Tianjin UniversityTianjin 300072China

picosecond ultrasonics,as a nondestructive and noncontact method,can be employed for nanoscale metallic film thickness *** sensitivity of the system,which determines the measurement precision and practicability of this technique,is often limited by the weak intensity of the ultrasonic *** solve this problem,we investigate the distinct mechanisms involved in picosecond ultrasonic thickness measurement for two types of metals,namely tungsten(W)and gold(Au).For thickness measurement in W films,theory and simulation show that optimizing the pump and probe laser wavelengths,which determine the intensity and shape of the ultrasonic signal,is critical to improving measurement sensitivity,while for Au film measurements,where acoustic-induced beam distortion is dominant,the signal intensity can be optimized by selecting an appropriate aperture size and sample *** above approaches are validated in experiments.A dual-wavelength pump-probe system is constructed based on a passively mode-locked ytterbium-doped fiber *** smoothing method and multipeak Gaussian fitting are employed for the extraction of ultrasonic *** measurement precision is achieved in a series of W and Au films with thicknesses of 43-750 *** work can be applied to various high-precision,noncontact measurements of metal film thickness in the semiconductor industry.

关键词： picosecond ultrasonics Thickness measurement Optical pump-probe Beam distortion technique

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