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Reactive ion etching of Si_2Sb_2Te_5 in CF_4/Ar plasma for a nonvolatile phase-change memory device

Journal of Semiconductors 2013年第5期34卷 126-130页

作者：李俊焘刘波宋志棠姚栋宁冯高明何敖东彭程封松林 State Key Laboratory of Functional materials for Informatics Shanghai Institute of Microsystem and Information TechnologyChinese Academy of Sciences University of Chinese Academy of Sciences United Laboratory Semiconductor Manufacturing International Corporation

phase change random access memory （PCRAM） is one of the best candidates for next generation non- volatile memory, and phase change SiESbETe5 material is expected to be a promising material for PCRAM. In the fabrication of phase change random access memories, the etching process is a critical step. In this paper, the etching characteristics of Si2Sb2Te5 films were studied with a CF4/Ar gas mixture using a reactive ion etching system. We observed a monotonic decrease in etch rate with decreasing CF4 concentration, meanwhile, Ar concentration went up and smoother etched surfaces were obtained. It proves that CF4 determines the etch rate while Ar plays an im- portant role in defining the smoothness of the etched surface and sidewall edge acuity. Compared with GeESbETe5, it is found that Si2Sb2Te5 has a greater etch rate. Etching characteristics of Si2SbETe5 as a function of power and pressure were also studied. The smoothest surfaces and most vertical sidewalls were achieved using a CF4/Ar gas mixture ratio of 10/40, a background pressure of 40 mTorr, and power of 200 W.

关键词： reactive ion etching phase-change material Si2Sb2Te5

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Research of Thermal Energy Storage Technology in the Solar Thermodynamic Power

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Journal of Power and Energy Engineering 2016年第7期4卷 42-49页

作者： Yueru Zhang North China Electric Power University Beijing China

Recently, although renewable energy has a great development, primary source is still thermal power generation, which uses fossil fuel as the energy source. Supply and demand of fossil fuel are essential for social and economy development. However, development pattern that excessively relies on the natural source is impossible to provide a sustainable development way for us. As a result, we should combine renewable energy with new energy technology as the aim of economy. It means that it is urgent to exploit new energy. Meanwhile, the ratio of energy waste cannot be ignored. How to decrease energy waste is also significant. Construction sector costs a lot of energy, which is mainly used for heating and refrigeration. In the new energy generation technology, thermal energy can be transformed to electricity with combination of BIPV and thermal energy storage technology. Photovoltaic generation has a great progress in the building construction. As a result, the thermal energy storage technology becomes the key link in the production chain. In this paper, feasibility of applying phase-change material (PCM) in the thermal energy storage will be analyzed. And analysis results are provided with a relative mathematical model.

关键词： New Energy Power Generation Sensible Heat Storage Latent Heat Storage phase-change material

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