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ice lithography for 3D nanofabrication

Science Bulletin 2019年第12期64卷 865-871页

作者： Ding Zhao Anpan Han Min Qiu National Centre for Nano Fabrication and Characterization Technical University of DenmarkKongens Lyngby2800Denmark Department of Mechanical Engineering Technical University of DenmarkKongens Lyngby2800Denmark Key Laboratory of 3D Micro/Nano Fabrication and Characterization of Zhejiang Province School of EngineeringWestlake UniversityHangzhou 310024China Institute of Advanced Technology Westlake Institute for Advanced StudyHangzhou 310024China

Nanotechnology and nanoscience are enabled by nanofabrication. Electron-beam lithography, which makes 2 D patterns down to a few nanometers, is one of the fundamental pillars of ***, significant progress in 3 D electron-beam-based nanofabrication has been made, such as the emerging ice lithography technology, in which ice thin-films are patterned by a focused electronbeam. Here, we review the history and progress of ice lithography, and focus on its applications in efficient 3 D nanofabrication and additive manufacturing or nanoscale 3 D printing. The finest linewidth made using frozen octane is below 5 nm, and nanostructures can be fabricated in selected areas on non-planar surfaces such as freely suspended nanotubes or nanowires. As developing custom instruments is required to advance this emerging technology, we discuss the evolution of ice lithography instruments and highlight major instrumentation advances. Finally, we present the perspectives of 3 D printing of functional materials using organic ices. We believe that we barely scratched the surface of this new and exciting research area, and we hope that this review will stimulate cutting-edge and interdisciplinary research that exploits the undiscovered potentials of ice lithography for 3 D photonics, electronics and 3 D nanodevices for biology and medicine.

关键词： Nanotechnology Nanofabrication Electron-beam lithography ice lithography 3D nanofabrication Additive manufacturing organic ice

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