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Nanometer-Order Contouring Control in a Feed Drive System Using Linear Ball Guides by Applying a Combination of Modified Disturbance Observer and Repetitive Control

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Nanomanufacturing and Metrology 2021年第2期4卷 118-129页

作者： Tomofumi Ohashi Hitoshi Shibata Shigeru Futami Ryuta Sato THK Co. Ltd.4-9-16 HigashikoujiyaOta-kuTokyoJapan Advanced Manufacturing Systems Laboratory Kobe University2-1 RokkodaiNada-kuKobeHyogoJapan

This paper proposes a quadrant glitch compensation method to achieve nanometer-level accuracy of contouring control for a feed drive system using linear ball *** proposed method is a combination of a modified disturbance observer(“disturbance suppressor”)and an improved repetitive control *** motion tests with 1 mm amplitude and 0.1 Hz driving frequency were conducted using a single-axis feed drive system to verify the quadrant glitch compensation ability of this ***,the repeatability of the quadrant glitches in the experimental system was verified,which is the most important characteristic required for compensation via repetitive ***,by applying the combination of disturbance suppressor and conventional repetitive control,the amplitudes of the quadrant glitches were decreased to less than 1 nm;in other words,the ratio of the magnitude of the quadrant glitch to the amplitude of the position reference was less than 1/1,000,***,for both compensation schemes mentioned before,vibrations were generated when the feed speed ***,the amplitudes increased with the number of *** reason for the vibrations was identified as the repetitive control *** suppress these vibrations,the repetitive control was applied only to narrowed regimes near the quadrant ***,the maximum contouring error was decreased to 2 *** addition,the nonlinear spring behavior of the linear ball guides was confirmed to affect the stability of the control systems.

关键词： Quadrant glitch Feed drive system Contouring control Repetitive control Disturbance observer nonlinear spring behavior

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