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A hybrid chemical modification strategy for monocrystalline silicon micro-grinding:Experimental investigation and synergistic mechanism

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Chinese Journal of Aeronautics 2023年第7期36卷 147-159页

作者： Yinghui REN Kexin LI Wei LI Xiangming HUANG Xiaoman LIU Genyu CHEN Toshiro DOI College of Mechanical and Vehicle Engineering Hunan UniversityChangsha 410082China Laser Research Institute Hunan UniversityChangsha 410082China Kyushu University Fukuoka 814-0001Japan

For high performance manufacturing of micro parts and features,a hybrid chemical modification strategy is proposed to decrease critical energy barrier of mechanical removal of hard and brittle crystal material by refining localized machining *** strategy,namely UVlight and IR-laser hybrid chemical modification(UVIR-CM)strategy,includes two steps,an ultraviolet light(UV-light)catalytic advanced oxidation and an infrared laser(IR-laser)assisted selective modification based on Fenton liquid–solid reaction for monocrystalline *** modification effects of UVIR-CM strategy were investigated by surface morphology micro-observation,crosssection transmission electron microscopy(TEM)observation,Raman spectroscopy analysis and nanoindentation *** results demonstrated that varied degrees of laser texturing appeared on different strategy samples’IR-laser scanned *** the IR-laser thermal damage has been successfully inhibited due to the refraction and reflection of energy by bubbles in liquid *** for the UVIR-CM strategy,a uniform and amorphous silicate layer is detected in a certain *** UV-light promotes oxidation cycle ability of the chemical solution and ensures sufficient oxide modified layer for subsequent *** to synergism of photochemical,photothermal and kinetic effects induced by IR-laser,the modified layer displays layered structure with about 600 nm thickness,(2.7±0.60)GPa nanohardness,and(93.7±22.9)GPa indentation *** the layered structure is amorphous layer,nanocrystal and micro-twins layer from the surface to the interior of ***,it reveals that the subsequent mechanical removal will become easy due to decreasing energy barrier of monocrystalline silicon in selective ***,its original excellent mechanical properties also are maintained under a certain *** results contribute to develop a novel combined micro-machining technology to achieve collaborative manufacturin

关键词： Modification strategy monocrystalline silicon Multi-energy fields Selective surface modification

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Soil Pressure Mini-sensor Made of monocrystalline silicon and the Measurement of Its Sensitivity Coefficient

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Journal of Wuhan University of Technology(Materials Science) 2005年第4期20卷 135-137页

作者：俞晓 College of Urban Construction Wuhan University of Science and TechnologyWuhan 430070ChinaCollege of Civil Engineering & ArchitectureWuhan University of TechnologyWuhan 430070China

A calibration test was done in order to measure its sensitivity coefficient by an improved soil test *** experimental result shows that the soil pressure min-sensor made of the monocrystalline silicon（SPMMS）is proved to be good linear,high precision and less that can fetch precise data in low pressure range even near by O point,which guarantees the reliability of the soil pressure test in geotechnical engineering.

关键词： soil pressure mini-sensor monocrystalline silicon sensitivity coefficient

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Molecular Dynamics of Nanometric Processing of Ion Implanted monocrystalline silicon Surfaces

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Transactions of Tianjin University 2014年第3期20卷 203-209页

作者：陈耘辉房丰洲张效栋胡小唐 State Key Laboratory of Precision Measuring Technology and Instruments School of Precision Instrument and Opto-Electronics Engineering Tianjin University

Three-dimensional molecular dynamics simulations are carried out to study the mechanism of nanometric processing of ion implanted monocrystalline silicon surfaces. Lattice transformation is observed during implantation and nano-indentation using radial distribution function and geometric criterion damage detection. Nano-indentation is simulated to study the changes of mechanical property. Implantation analysis shows the existence of amorphous phase. Indentation process shows the lattice evolution, which is beneficial for reducing fractures during processing. The indentation results reveal the reduction of brittleness and hardness of the implanted surface. The ion fluence is in direct proportion to the damage, and inverse to the hardness of the material. Experiments of ion implar, tation, nanoindentation, nano-scratching and nanometric cutting were carried out to verify the simulation results.

关键词： molecular dynamics ion implantation monocrystalline silicon nanometric cutting

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Single-Seed Casting Large-Size monocrystalline silicon for High-Efflciency and Low-Cost Solar Cells

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Engineering 2015年第3期1卷 378-383页

作者： Bing Gao Satoshi Nakano Hirofumi Harada Yoshiji Miyamura Takashi Sekiguchi Koichi Kakimoto Research Institute for Applied Mechanics Kyushu University National Institute for Materials Science

To grow high-quality and large-size monocrystalline silicon at low cost, we proposed a single-seed casting technique. To realize this technique, two challenges—polycrystalline nucleation on the crucible wall and dislocation multiplication inside the crystal—needed to be addressed. Numerical analysis was used to develop solutions for these challenges. Based on an optimized furnace structure and operating conditions from numerical analysis, experiments were performed to grow monocrystalline silicon using the single-seed casting technique. The results revealed that this technique is highly superior to the popular high-performance multicrystalline and multiseed casting mono-like techniques.

关键词： single-seed casting monocrystalline silicon polycrystalline nucleation dislocation multiplication multicrystalline silicon

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Absorption measurement of optical thin films under high power density with a Closed Cavity

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Chinese Optics Letters 2015年第3期13卷 81-84页

作者：房晓婷袁圣付刘文广闫宝珠黄兵 College of Optoelectric Science and Engineering National University of Defence Technology

A Closed Cavity measuring platform is built on the basis of a 1000 W-class direct current （DC）-discharge drived con- tinuous-wave （CW） HF/DF chemical laser. On this platform, the absorption coefficients of optical thin films coated on the surfaces of monocrystalline silicon substrates, at the wavelength of 3.6-4.1 μm, is measured, when the power density on the surfaces of optical thin films reaches about 3.16 kW/cm^2. The measuring principle and structure of the Closed Cavity is introduced. The temperature curves and balanced temperature rises of the film-suN strate systems under test measured through the experiment is presented in this Letter. The experiments show high reliability, good repeatability and strong practicality. The Closed Cavity measuring platform is applicable for not only absorption measurement but other performance measurement of optical thin films under high power density.

关键词： Chemical lasers Laser chemistry monocrystalline silicon Substrates Thin films Tungsten

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Non-Fourier Heat Conduction based on Self-Adaptive Weight Physics-Informed Neural Networks

Non-Fourier Heat Conduction based on Self-Adaptive Weight Ph...

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第40届中国控制会议

作者： Shuyan Shi Ding Liu Zhongdan Zhao National & Local Joint Engineering Research Center of Crystal Growth Equipment and System Integration Xi'an University of Technology Shananxi Key Laboratory of Complex System Control and Intelligent Information Processing

This paper establishes the non-Fourier heat conduction model to describe the heat transfer process of mono-crystalline silicon under the condition of unstable thermal field and thermal shock in the Czochralski method.A novel differential equations solver called Physics-Informed Neural Networks（PINN） algorithm was *** with finite element method（FEM）,this method has some advantages like no grid requirement and easily *** order to deal with the unbalance of constraint condition and speed up the convergence,we propose a novel method called Self-Adaptive Weight Physics-Informed Neural Networks（SWPINN）.The comparison of the experimental results of SWPINN and COMSOL verifies the effectiveness of *** modifying the parameter of non-Fourier heat conduction model,this paper obtains the temperature distribution under different heat relaxation ***,comparison between SWPINN and PINN shows that the proposed method has faster convergence speed and higher accuracy.

关键词： Non-Fourier Heat Conduction Physics-Informed Neural Networks Partial Differential Equation monocrystalline silicon Czochralski Method

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