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A single micro-LED manipulation system based on micro-gripper

Nanotechnology and Precision Engineering 2024年第2期7卷 45-52页

作者： Jie Bai Pingjuan Niu Erdan Gu Jianming Li Clarence Augustine TH Tee School of Mechanical Engineering Tiangong University School of Electronic and Information Engineering Tiangong University Institute of Photonics University of Strathclyde Tianjin Key Laboratory of micro Low Gravity Environment Simulation Technology Tianjin Aerospace Electromechanical Equipment Research Institute Department of Electrical and Information Engineering School of Physics and Electrical Information EngineeringZhejiang Normal University

micro-LEDs(μLEDs) have advantages in terms of brightness, power consumption, and response speed. In addition, they can also be used as micro-sensors implanted in the body via flexible electronic skin. One of the key techniques involved in the fabrication of μLED-based devices is transfer printing. Although numerous methods have been proposed for transfer printing, improving the yield of μLED arrays is still a formidable task. In this paper, we propose a novel method for improving the yield of μLED arrays transferred by the stamping method, using an innovative design of piezoelectrically driven asymmetric micro-gripper. Traditional grippers are too large to manipulate μLEDs, and therefore two micro-sized cantilevers are added at the gripper tips. A μLED manipulation system is constructed based on the micro-gripper together with a three-dimensional positioning system. Experimental results using this system show that it can be used successfully to manipulate μLED arrays.

关键词： micro-gripper micro-LED Transfer printing Manipulation

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Experimental Study on Electrostatically Actuated micro-gripper Based on Silica Process

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World Journal of Engineering and Technology 2017年第4期5卷 126-133页

作者： Pengnian Yang Yuhe Li Yong Li Qingxiang Li Department of Precision Instruments and Mechanology Tsinghua University Beijing China

The characteristics of a kind of comb-drive electrostatic actuated micro-gripper are tested. The test platform using a microscope-CCD-computer, the state information of the micro-gripper obtained by data acquisition and image processing, voltage-displacement characteristic curve is obtained and the mathematical equation is established. The analysis of the characteristic equation has shown the consistency and rationality of the theoretical design and the experimental results. The main factors that cause the difference between the theoretical design and the actual test performance are analyzed, and the design method and experimental results is obtained for the micro-gripper in the field of micro-assembly.

关键词： micro-gripper Image Process Experimental Analysis

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