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Au maskless patterning for vacuum packaging using the electrochemical method

Nanotechnology and Precision Engineering 2018年第3期1卷 191-196页

作者： Bo Xie Deyong Chen Junbo Wang Jian Chen Wen Hong Institute of Electronics Chinese Academy of Sciences

The interconnection of wires is an important issue in vacuum-packaged microelectromechanical systems devices because of the difficulties of hermetical sealing and electrical *** paper presents an approach of Au film selective patterning on highly uneven surfaces for wire interconnections of devices in which silicon-oninsulator(SOI)wafers are anodically bonded to *** Au film on the handle layer,functioned as an anode,was selectively removed with electrochemical dissolution in a chloride *** choice of etchant solution and etching conditions were optimized to improve the process efficiency,resulting in a high yield of gold portions within the via holes for wire *** proposed wire interconnection technology was employed to fabricate a vacuum-packaged resonant pressure sensor as a proof-of-concept *** wire bonding and vacuum package were achieved as well as a Q factor that does not decrease over a *** a platform technology,this method provides a new approach of wire interconnection for vacuum-packaged devices based on SOI–glass anodic bonding.

关键词： Vacuum packaging Wire interconnection Selective gold etching maskless pattern Highly uneven surface Electrochemical etching

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maskless Microscopic Lithography through Shaping Ultraviolet Laser with Digital Micro-mirror Device

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Optics and Photonics Journal 2013年第2期3卷 227-231页

作者： Xiang-Yu Ding Yu-Xuan Ren Rong-De Lu 2Institute of Biochemistry and Cell Biology Shanghai Institutes for Biological Sciences CAS Shanghai China 3National Center for Protein Sciences (Shanghai) Shanghai Institutes for Biological Sciences CAS Shanghai China Department of Physics University of Science and Technology of China Hefei China

Laser shaping was introduced to maskless projection soft lithography by using digital micro-mirror device (DMD). The predesigned intensity pattern was imprinted onto the DMD and the input laser beam with a Gaussian or quasi-Gaussian distribution will carry the pattern on DMD to etch the resin. It provides a method of precise control of laser beam shapes and?photon-induced curing behavior of resin. This technology provides an accurate micro-fabrication of microstructures used for micro-systems. As a virtual mask generator and a binary-amplitude spatial light modulator, DMD is equivalent to the masks in the conventional exposure system. As the virtual masks and shaped laser beam can be achieved flexibly, it is a good method of precision soft lithography for 2D/3D microstructures.

关键词： Digital Micro-mirror Device (DMD) Laser Shaping maskless Projection Soft Lithography

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