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Tip-and laser-based 3D Nanofabrication in Extended Macroscopic Working Areas

Nanomanufacturing and Metrology 2021年第3期4卷 132-148页

作者： Ingo Ortlepp Thomas Frohlich Roland FuBl Johann Reger Christoph Schaffel Stefan Sinzinger Steffen Strehle ReneTheska Lena Zentner Jens-Peter Zollner Ivo WRangelow Carsten Reinhardt Tino Hausotte Xinrui Cao Oliver Dannberg Florian Fern David Fischer Stephan Gorges Martin Hofmann Johannes Kirchner Andreas Meister Taras Sasiuk Ralf Schienbein Shraddha Supreeti Laura Mohr-Weidenfeller Christoph Weise Christoph Reuter Jaqueline Stauffenberg Eberhard Manske Institute of Process Measurement and Sensor Technology Technische Universitat IlmenauEhrenbergstrasse 2998693 IlmenauGermany Control Engineering Group Technische Universitat IlmenauIlmenauGermany Optical Engineering Group.Technische Universitat Ilmenau IlmenauGermany Microsystems Technology Group.Technische Universitat Ilmenau IlmenauGermany Precision Engineering Group.Technische Universitat Ilmenau IlmenauGermany Compliant Systems Group Technische Universitat IlmenauIlmenauGermany Micro-and Nanoelectronic Systems Group Technische Universitat IlmenauIlmenauGermany Nanoscale Systems Group.Technische Universitat Ilmenau IlmenauGermany Division for Research Service and Technology Transfer Technische Universitat IlmenauIlmenauGermany Electronics Technology Group.Technische Universitat Ilmenau IlmenauGermany IMMS Institut flir Mikroelektronik-und Mechatronik-Systeme Gemeinniitzige GmbH(IMMS GmbH) IlmenauGermany Fachgebiet Technische Physik City University of Applied SciencesBremenGermany Lehrstuhl fiir Fertigungsmesstechnik Friedrich-Alexander-U niversitat(FAU)Erlangen-NiirnbergGermany JUMO GmbH&Co.KG FuldaGermany Asphericon GmbH JenaGermany

The field of optical lithography is subject to intense research and has gained enormous ***,the effort necessary for creating structures at the size of 20 nm and below is considerable using conventional *** effort and the resulting financial requirements can only be tackled by few global companies and thus a paradigm change for the semiconductor industry is conceivable:custom design and solutions for specific applications will dominate future development(Fritze in:Panning EM,Liddle JA(eds)Novel patterning *** society for optics and ***,Bellingham,***://***/10.1117/12.2593229).For this reason,new aspects arise for future lithography,which is why enormous effort has been directed to the development of alternative fabrication ***,the technologies emerging from this process,which are promising for coping with the current resolution and accuracy challenges,are only demonstrated as a proof-of-concept on a lab scale of several square *** scale is not adequate for the requirements of modern lithography;therefore,there is the need for new and alternative cross-scale solutions to further advance the possibilities of unconventional *** challenges arise because of the technical progress in various other fields,realizing new and unique functionalities based on nanoscale effects,e.g.,in nanophotonics,quantum computing,energy harvesting,and life *** platforms for basic research in the field of scale-spanning nanomeasuring and nanofabrication are necessary for these tasks,which are available at the Technische Universitiit Ilmenau in the form of nanopositioning and nanomeasuring(NPM)*** this equipment,the limits of technical structurability are explored for high-performance tip-based and laser-based processes for enabling real 3D nanofabrication with the highest precision in an adequate working range of several thousand cubic millimete

关键词： Nanomeasuring Nanopositioning Nanomanufacturing Scale-spanning Tip-based laser-based Nanofabrication

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Review of materials used in laser-aided additive manufacturing processes to produce metallic products

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Frontiers of Mechanical Engineering 2019年第3期14卷 282-298页

作者： Xiaodong NIU Surinder SINGH Akhil GARG Harpreet SINGH Biranchi PANDA Xiongbin PENG Qiujuan ZHANG Intelligent Manufacturing Key Laboratory of Ministry of Education Shantou University Shantou 515063 China Shantou Ruixiang Mould Co. Ltd. Jinping S&T Park Shantou 515064 China Department of Mechanical Engineering Indian Institute of Technology Ropar Rupnagar 140001 India IDMEC Institute Superior Tecnico Universidade de Lisboa 1649-004 Lisboa Portugal

Rapid prototyping (RP) or layered manufacturing (LM) technologies have been extensively used to manufacture prototypes composed mainly of plastics, polymers, paper, and wax due to the short product development time and low costs of these technologies. However, such technologies, with the exception of selective laser melting and sintering, are not used to fabricate metallic products because of the resulting poor life, short cycle, poor surface finish, and low structural integrity of the fabricated parts. The properties endowed by these parts do not match those of functional parts. Therefore, extensive research has been conducted to develop new additive manufacturing (AM) technologies by extending existing RP technologies. Several AM technologies have been developed for the fabrication of metallic objects. These technologies utilize materials, such as Ni-, A1-, and Ti-based alloys and stainless steel powders, to fabricate high-quality functional components. The present work reviews the type of materials used in laserbased AM processes for the manufacture of metallic products. The advantages and disadvantages of processes and different materials are summarized, and future research directions are discussed in the final section. This review can help experts select the ideal type of process or technology for the manufacturing of elements composed of a given alloy or material (Ni, Ti, Al, Pb, and stainless steel).

关键词： direct metal deposition laser-based manufacturing rapid manufacturing selective laser meltiiTg additive manufacturing

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Characterization of the Crystal Structure of Sesame Seed Cake Burned by Nd: YAG laser

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Journal of Materials Science and Chemical Engineering 2018年第4期6卷 121-131页

作者： Muna A. Pn Gawbah Abdelrahman A. Elbadawi Yousef A. Alsabah Mohammed U. Orsod Ali A. S. Marouf Physics Department Faculty of Education-Seyoun Hadhramout University Hadhramout Yemen Department of Physics Faculty of Science and Technology Al Neelain University Khartoum Sudan Faculty of Basic Studies Future University Khartoum Sudan Department of Physics Faculty of Education and Applied Science Hajjah University Hajjah Yemen College of Science Sudan University of Science and Technology Khartoum Sudan Institute of laser Sudan University of Science and Technology Khartoum Sudan

This paper reports obtaining of useful and high-value materials from sesame seed cake (SSC). For this purpose, SSC sample was burned for 30 s using Nd: YAG laser with output power 60 W. The products of this process and non-burned SSC were characterized by X-ray diffractometer (XRD), energy dispersive x-ray (EDX) and Fourier transform infrared (FTIR) so as to investigate its crystal structure and chemical components. XRD results of the SSC before burning process showed amorphous silica, rhombohedral phase of carbon, monoclinic phase of aluminum chloride, the hexagonal phase of moissanite-4H, (yellow, black) and hexagonal phase of graphite-2H, C (black). While the results of the burned SSC sample showed that the burning process using the power of Nd: YAG laser cased in appearing of crystalline hexagonal phase for silica and Carbon Nitride and converting the rhombohedral phase of Carbon into hexagonal phase. FTIR showed a number of absorbance peaks assigned to silica.

关键词： Crystal Structure FTIR Hexagonal Carbon laser-based Combustion Sesame Seed Cake Sesame Oil Cake Silica XRD

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