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Impact of flm thickness in laser‑induced periodic structures on amorphous Si flms

Frontiers of Optoelectronics 2023年第2期16卷 115-122页

作者： Liye Xu Jiao Geng Liping Shi Weicheng Cui Min Qiu College of Optical Science and Engineering Zhejiang UniversityHangzhou 310058China Key Laboratory of 3D Micro/Nano Fabrication and Characterization of Zhejiang Province School of EngineeringWestlake UniversityHangzhou 310024China Key Laboratory of Coastal Environment and Resources of Zhejiang Province(KLaCER) School of EngineeringWestlake UniversityHangzhou 310024China Institute of Advanced Technology Westlake Institute for Advanced StudyHangzhou 310024China Wuhan National Laboratory for Optoelectronics Huazhong University of Science and TechnologyWuhan 430074China

We report self-organized periodic nanostructures on amorphous silicon thin flms by femtosecond laser-induced *** dependence of structural periodicity on the thickness of silicon flms and the substrate materials is *** results reveal that when silicon flm is 200 nm,the period of self-organized nanostructures is close to the laser wavelength and is insensitive to the *** contrast,when the silicon flm is 50 nm,the period of nanostructures is much shorter than the laser wavelength,and is dependent on the ***,we demonstrate that,for the thick silicon flms,quasi-cylindrical waves dominate the formation of periodic nanostructures,while for the thin silicon flms,the formation originates from slab waveguide ***-diference time-domain method-based numerical simulations support the experimental discoveries.

关键词： laser-induced periodic surface structures(LIPSS) Ultrafast optoelectronics laser nanofabrication Quasicylindrical waves

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laser synthesis and functionalization of nanostructures

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International Journal of Extreme Manufacturing 2019年第1期1卷 38-50页

作者： Costas P Grigoropoulos laser Thermal Laboratory Department of Mechanical EngineeringUniversity of California at Berkeley6129 Etcheverry HallBerkeley CA 94720-1740United States of America

This article summarizes work at the laser Thermal Laboratory and discusses related studies on the laser synthesis and functionalization of semiconductor nanostructures and two-dimensional(2D)semiconductor *** has been carried out on the laser-induced crystallization of thin films and *** in situ transmission electron microscopy(TEM)monitoring of the crystallization of amorphous precursors in nanodomains is discussed *** directed assembly of silicon nanoparticles and the modulation of their optical properties by phase switching is *** vapor-liquid-solid mechanism has been adopted as a bottom-up approach in the synthesis of semiconducting nanowires(NWs).In contrast to furnace heating methods,laser irradiation offers high spatial selectivity and precise control of the heating mechanism in the time *** attributes enabled the investigation of NW nucleation and the early stage of nanostructure ***-and shape-selective,on-demand direct integration of oriented NWs was *** of discrete silicon NWs with nanoscale location selectivity by employing near-field laser illumination is also reported *** the properties of 2D transition metal dichalcogenides(TMDCs)by modulating the free carrier type,density,and composition can offer an exciting new pathway to various practical nanoscale *** situ Raman probing of laser-induced processing of TMDC flakes was conducted in a TEM instrument.

关键词： laser nanofabrication laser crystallization nanowire growth near field scanning optical microscopy transition metal dichalcogenides

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