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第七届海内外青年设计与制造科学会议

作者： Yiliu Tu and Ming Xia Department of Mechanical and Manufacturing Engineering University of Calgary Calgary AB Canada T2N 1N4

＜正＞Femtosecond laser micromachining is a new approach emerging in MEMS area in recent years. Although some applications have been reported, this technology is still not matured and not understood very well. Femtosecond lasers currently show much promise as potential effective tools in micromachining or micro-system applications, which include industrial material processing, biomedicine, photonics, and semiconductors. This paper reviewed femtosecond laser technology with emphasis on mode-locked technology and chirped pulsed amplification （CPA）. We described the most important difference between femtosecond laser and traditional lasers, which is multiphoton absorption during laser material interaction. We introduced the configuration and principle of our femtosecond laser micromachining workstation and the status of micromachining with femtosecond laser pulses in the literature. Some advantages and applications such as processing different materials including transparent materials and creating very fine features （on the order of tens of nm） are presented. Finally, we suggested several future efforts that are parameter selection and optimization of micromachining processing, development of process and tolerance control algorithms, development of sensors and measurement methods, and development of the theory and methods of design for the femtosecond laser micromachining application. To achieve these targets effectively we proposed a "free force" 3D micromachining concept using lasers including femtosecond laser to create micro and nanostructures.

关键词： laser micromachining Femtosecond laser Ultrafast laser laser Ablation

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ANALYSIS OF NANO CHANNEL FORMATION IN QUARTZ CUBES BY laser-INDUCED PROCESS

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Acta Mechanica Sinica 2004年第2期20卷 125-131页

作者：秦水介李文荣 Laboratory for Photoelectric Technology and Application Guizhou UniversityGuiyang 550025China Center for Micro and Nano SystemsThe Chinese University of Hong KongHong Kong SARChina LNMInstitute of MechanicsChinese Academy of SciencesBeijing 100080China Center for Micro and Nano Systems The Chinese University of Hong KongHong Kong SARChina

A novel laser processing technique was developed for making channels in the nano regime in this paper.A Nd:YAG laser was used to dry fabricate micro channels(25μm～100μm di- ameter)in a 1 cm^3 fused silica substrate by thermal-induced *** controlling the locations of these initiating micro channels on a silica cube,1D-controllable self-connecting nano fractures can be formed as rectangular *** nano channels are smooth and with extremely high aspect ratio(～10~4 depth to width ratio).A possible mechanism is proposed to explain the formation of the nano *** laser-based nano channel fabrication technique is fast and inexpensive,and with potential applications in capillary electrophoresis and electro-osmosis driven nano-filtration.

关键词： laser micromachining nano channel laser-induced splitting fracture mechanics

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维普期刊数据库

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Single femtosecond laser beam induced nanogratings in transparentmedia - Mechanisms and applications

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Journal of Materiomics 2019年第1期5卷 1-14页

作者： Bo Zhang Xiaofeng Liu Jianrong Qiu State Key Laboratory of Modern Optical Instrumentation College of Optical Science and EngineeringZhejiang UniversityHangzhou310027China College of Material Science and Engineering Zhejiang UniversityHangzhou310027China

Single femtosecond laser beam induced nanograting structure in transparent media has attracted extensive attention in many fields of science and technology in the past *** the excellent physicochemical properties and promising applications,it will continue to be a hot topic in the field of laser-matter interaction in the *** the recent ten years,both fundamental research and practical application have gained tremendous *** have witnessed the finding of novel fresh phenomena,imaginative physical models and promising technologies related to femtosecond laser induced nanogratings in transparent ***,despite those achievements,numerous issues related to mechanism,material dependence and process are still far from completely *** review will focus on recent research progress including basic properties,theory models,control methods and potential *** in recent five years are discussed in detail and several core issues are specially *** future developing trend is also prospected.©2019 The Chinese Ceramic Society.

关键词： Femtosecond laser laser micromachining Nanograting Transparent medium Self-assembly

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