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All laser direct writing process for temperature sensor based on graphene and silver

Frontiers of Optoelectronics 2024年第1期17卷 45-55页

作者： Qi Li Ruijie Bai Lianbo Guo Yang Gao Shanghai Key Laboratory of Intelligent Sensing and Detection Technology School of Mechanical and Power EngineeringEast China University of Science and TechnologyShanghai 200237China North Automatic Control Technology Institute Taiyuan 030006China Wuhan National Laboratory for Optoelectronics Huazhong University of Science&TechnologyWuhan 430074China

A highly sensitive temperature sensing array is prepared by all laser direct writing(LDW)method,using laser induced silver(LIS)as electrodes and laser induced graphene(LIG)as temperature sensing layer.A finite element analysis(FEA)photothermal model incorporating a phase transition mechanism is developed to investigate the relationship between laser parameters and LIG properties,providing guidance for laser processing parameters selection with laser power of 1–5 W and laser scanning speed(greater than 50 mm/s).The deviation of simulation and experimental data for widths and thickness of LIG are less than 5%and 9%,*** electrical properties and temperature responsiveness of LIG are also *** changing the laser process parameters,the thickness of the LIG ablation grooves can be in the range of 30–120μm and the resistivity of LIG can be regulated within the range of 0.031–67.2Ω・*** percentage temperature coefficient of resistance(TCR)is calculated as−0.58%/°***,the FEA photothermal model is studied through experiments and simulations data regarding LIS,and the average deviation between experiment and simulation is less than 5%.The LIS sensing samples have a thickness of about 14μm,an electrical resistivity of 0.0001–100Ω・m is insensitive to temperature and pressure ***,for a LIS-LIG based temperature sensing array,a correction factor is introduced to compensate for the LIG temperature sensing being disturbed by pressure stimuli,the temperature measurement difference is decreased from 11.2 to 2.6°C,indicating good accuracy for temperature measurement.

关键词： laser direct writing Temperature sensor Finite element analysis laser induced graphene laser induced silver

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