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Lau Effect Using led array for Lithography

Nanomanufacturing and Metrology 2021年第3期4卷 165-174页

作者： Xinrui Cao Patrick FeBer Stefan Sinzinger Fachgebiet Technische Optik Institut flir Mikro-und Nanotechnologien(IMN)MacroNano■Technische Universitat IlmenauIlmenauGermany

Illumination with leds is of increasing interest in imaging and *** particular,compared to lasers,leds are temporally and spatially incoherent,so that speckle effects can be avoided by the application of ***,led arrays are qualified due to their high optical output ***,led arrays have not been widely used for investigating optical effects,e.g.,the Lau *** this paper,we propose the application of an led array for realizing the Lau effect by taking into account the influence of the coherence properties of illumination on the Lau *** spatially incoherent illumination with the led array or a single led,triangular distributed Lau fringes can be *** apply the obtained Lau fringes in the optical lithography to produce analog *** to a single led,the Lau fringes using the led array have significantly higher ***,the exposure time in the lithography process is largely reduced.

关键词： Lau effect led array Lithography Spatial coherence properties of illumination

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31.38 Gb/s GaN-based led array visible light communication system enhanced with V-pit and sidewall quantum well structure

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Opto-Electronic Science 2023年第5期2卷 12-24页

作者： Zengyi Xu Wenqing Niu Yu Liu Xianhao Lin Jifan Cai Jianyang Shi Xiaolan Wang Guangxu Wang Jianli Zhang Fengyi Jiang Zhixue He Shaohua Yu Chao Shen Junwen Zhang Nan Chi Key Laboratory for the Information Science of Electromagnetic Waves(MoE) Department of Communication Science and EngineeringFudan UniversityShanghai 200433China National Institute of led on Silicon Substrate Nanchang UniversityNanchang 330096China Shanghai Engineering Research Center of Low-Earth-Orbit Satellite Communication and Applications and Shanghai Collaborative Innovation Center of Low-Earth-Orbit Satellite Communication TechnologyShanghai 200433China Peng Cheng Laboratory Shenzhen 518055China

Although the 5G wireless network has made significant advances,it is not enough to accommodate the rapidly rising requirement for broader bandwidth in post-5G and 6G *** a result,emerging technologies in higher frequencies including visible light communication(VLC),are becoming a hot *** particular,led-based VLC is foreseen as a key enabler for achieving data rates at the Tb/s level in indoor scenarios using multi-color led arrays with wavelength division multiplexing(WDM)*** paper proposes an optimized multi-color led array chip for high-speed VLC *** long-wavelength GaN-based led units are remarkably enhanced by V-pit structure in their efficiency,especially in the“yellow gap”region,and it achieves significant improvement in data rate compared with earlier *** work investigates the V-pit structure and tries to provide insight by introducing a new equivalent circuit model,which provides an explanation of the simulation and experiment *** the final test using a laboratory communication system,the data rates of eight channels from short to long wavelength are 3.91 Gb/s,3.77 Gb/s,3.67 Gb/s,4.40 Gb/s,3.78 Gb/s,3.18 Gb/s,4.31 Gb/s,and 4.35 Gb/s(31.38 Gb/s in total),with advanced digital signal processing(DSP)techniques including digital equalization technique and bit-power loading discrete multitone(DMT)modulation format.

关键词： GaN-based led led array VLC V-pit sidewall quantum well high-frequency response

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Thermal analysis of led lighting system with different fin heat sinks

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Journal of Semiconductors 2011年第1期32卷 50-52页

作者：侯峰泽杨道国张国旗 School of Mechanical & Electrical Engineering Guilin University of Electronic Technology philips Lighting Eindhoventhe Netherlands

This paper designs a 3 × 3 light emitting diode （led） array with a total power of 9 W, presents a thermal analysis of plate fin, in-line and staggered pin fin heat sinks for a high power led lighting system, and develops a 3D one-fourth finite element （FE） model to predict the system temperature distribution. Three kinds of heat sinks are compared under the same conditions. It is found that led chip junction temperature is 48.978℃ when the fins of heat sink are aligned alternately.

关键词： led thermal design led array heat sink

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