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Study of the 6.x nm short wavelength radiation spectra of laser-produced erbium plasmas for BEUV lithography

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Plasma Science and Technology 2023年第6期25卷 41-51页

作者：吴涛王倩陈柳安陆培祥 Hubei Key Laboratory of Optical Information and Pattern Recognition School of Optical Information and Energy EngineeringWuhan Institute of TechnologyWuhan 430205People's Republic of China Guangdong Intelligent Robotics Institute Dongguan 523808People's Republic of China

Beyond extreme ultraviolet(BEUV)radiation with a wavelength of 6.x nm for lithography is responsible for reducing the source wavelength to enable continued miniaturization of semiconductor *** this work,the Required BEUV light at 6.x nm wavelength was generated in dense and hot Nd:YAG laser-produced Er *** spectral contributions from the 4p–4d and 4d–4f transitions of singly,doubly and triply excited states of Er XXIV–Er XXXII in the BEUV band were calculated using Cowan and the Flexible Atomic *** was also found that the radiative transitions between multiply excited states dominate the narrow wavelength window around 6.x *** the assumption of collisional radiative equilibrium of the laser-produced Er plasmas,the relative ion abundance in the experiment was *** the Boltzmann quantum state energy level distribution and Gram–Charlier fitting function of unresolved transition arrays(UTAs),the synthetic spectrum around 6.x nm was finally obtained and compared with the experimental *** spatio-temporal distributions of electron density and electron temperature were calculated based on radiation hydrodynamic simulation in order to identify the contributions of various ionic states to the UTAs arising from the Er plasmas near 6.x nm.

关键词： laser-produced plasmas unresolved transition array collisional radiative equilibrium

Effect of dielectronic recombination on charge-state distribution in laser-produced plasma based on steady-state collisional-radiative models

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Plasma Science and Technology 2020年第10期22卷 39-44页

作者： Haidong LU Maogen SU Qi MIN Shiquan CAO Siqi HE Chenzhong DONG Yanbiao FU Key Laboratory of Atomic and Molecular Physics&Functional Material of Gansu Province College of Physics and Electronic EngineeringNorthwest Normal UniversityLanzhou 730070People's Republic of China Joint Laboratory of Atomic and Molecular Physics Northwest Normal University and Institute of Modern Physics of Chinese Academy of SciencesLanzhou 730070People's Republic of China

Armed with four different steady-state collisional-radiative(CR) models,we investigated the effect of dielectronic recombination(DR) on the charge-state distribution in laser-produced silicon plasma. To assess this effect,we performed a series of temporally resolved spectra of highly charged Si ions in the extreme ultraviolet *** initio calculations of the DR rate coefficients were done for Si^(6+)–Si^(4+) ions. We also analyzed the evolution of the collisional ionization, radiative recombination, three-body recombination, photo-ionization, and DR rate coefficients as a function of electron temperature. The electron temperature and electron density for different delay times were obtained by comparing the normalized experimental and simulated spectra. The ion fraction and average charge state from the four different CR models were also obtained. The results indicate that the DR process has a greater influence in the stage of plasma evolution that cannot be neglected in plasma diagnoses.

关键词： dielectronic recombination laser-produced plasmas collisional-radiative model charge-state distribution

Population Diagnostics of a Hot NaBr Plasma by Detailed Simulation of Absorption Spectra

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Chinese Physics Letters 2006年第9期23卷 2506-2509页

作者：靳奉涛曾交龙袁建民 Department of Physics National University of Defense Technology Changsha 410073

The experimental absorption spectra of a hot NaBr plasma are theoretically studied by using a detailed level accounting model. The sodium and bromine absorption spectra have been well reproduced respectively in the approach of local thermodynamic equilibrium, in which the populations between and within ions are obtained by solving the Saha-Boltzmann equation. The temperature of bromine however is found to be much lower than the one of sodium. Such discrepancy indicates that thermodynamic equilibrium is not reached between the sodium and bromine atoms during the measurement.

关键词： laser-produced plasmas PINCH X-RAYS TRANSMISSION SPECTRUM IRON plasmas OPACITY

Dielectronic Recombination of Sn^10＋ Ions and Related Satellite Spectra

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Chinese Physics Letters 2008年第3期25卷 927-929页

作者：符彦飙董晨钟苏茂根 Gerry O'Sullivan College of Physics and Electronic Engineering Northwest Normal University Lanzhou 730070 School of Physics University College Dublin Beifield Dublin 4 Ireland

Based on the multi-configuration Dirac-Fock method, theoretical calculations are carried out for the dielectronic recombination （DR） rate coefficients and the collision excitation rate coefficients of Sn^10＋ ions. It is found that the total DR rate coefficient has its maximum value between 10eV and 100eV and is greater than either the radiative recombination or three-body recombination rate coefficients （the number of free electrons per unit is 10^21 cm^3） for the ease of Te 〉 1 eV. Therefore, DR can strongly influence the ionization balance of laser produced multi-charged tin ions. The related dieleetronie satellite cannot be ignored at low temperature Te 〈 5 eV.

关键词： laser-produced plasmas RATE COEFFICIENTS EMISSION LINE NI

Filaments in high-speed counter-streaming plasma interactions driven by high-power laser pulses

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Science China(Physics,Mechanics & Astronomy) 2013年第12期56卷 2381-2385页

作者： YUAN DaWei LI YuTong SU LuNing LIAO GuoQian YIN ChuanLei ZHU BaoJun ZHANG Jie Beijing National Laboratory for Condensed Matter Physics Institute of PhysicsChinese Academy of Sciences

Interactions of two counter-streaming plasmas driven by high power laser pulses are studied on Shenguang II laser *** structures were observed in the interaction region after the electrostatic shockwave *** analysis and observations indicate that the filaments are because of collisionless mechanisms,which are caused by the electromagnetic instability,such as the beam-Weibel *** experiments were also carried out for comparison and no filaments were generated.

关键词： laser-produced plasmas coilisionless shock waves Weibel instability

Extreme ultraviolet spectral characteristic analysis of highly charged ions in laserproduced Cu plasmas

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Plasma Science and Technology 2023年第4期25卷 156-163页

作者：李麦娟苏茂根李昊阳敏琦曹世权孙对兄张登红董晨钟 Key Laboratory of Atomic and Molecular Physics&Functional Material of Gansu Province College of Physics and Electronic EngineeringNorthwest Normal UniversityLanzhou 730070People’s Republic of China Gansu International Scientific and Technological Cooperation Base of laser Plasma Spectroscopy Lanzhou 730070People’s Republic of China

This paper reports the results of spectral measurements and a theoretical analysis of the temporal and spatial evolution of laser-produced Cu plasma in vacuum in the range of 8–14 *** time dependence of the extreme ultraviolet band spectrum at different positions near the target surface was obtained and found to be dominated by three broad-band *** 3p and 3d excitations of Cu5+–Cu9+ions were calculated using the Hartree–Fock theory with configuration *** characteristics of the spectral line distribution for the 3p–nd and 3d–nf transition arrays were *** on the steady-state collisional radiation model and the normalized Boltzmann distribution,the complex spectral structure in the band of 13–14 nm is accurately explained through consistency comparisons and benchmarking between the experimental and theoretical simulation spectra,demonstrating that the structure mainly stems from the overlapping contribution of the 3d–4f and 3p–3d transition arrays for the Cu5+–Cu9+*** results may help in studying the radiation characteristics of isoelectronic series highly-charged ions involving the 3d excitation process.

关键词： laser-produced plasmas highly-charged Cu ions spatio-temporal resolved emission spectrum

High-energy X-ray Curved Crystal Spectrograph for laser Fusion Experiments

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High-energy X-ray Curved Crystal Spectrograph for Laser Fusi...