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Visualization of MF/Diesel RCCI Combustion Process and Soot Emission

Journal of Thermal Science 2024年第2期33卷 779-792页

作者： HUANG Chen NI Xiao GE Dameng LI Song ZHANG Wanzhi LIU Jinping ZHANG Tingting School of Mechanical and Electronic Engineering Shandong Agricultural UniversityTaian271018China Shandong Provincial Engineering Laboratory of Agricultural Equipment Intelligence Taian271018China Taian Technician Institute Taian271000China Sinotruk Taian Wuyue Special Vehicle Co. Ltd.Taian271000China School of Mechanical Engineering Shaanxi University of TechnologyHanzhong723001China School of Mechanical Engineering Anyang Institute of TechnologyAnyang455000China

Based on the optical engine,the ignition characteristics,combustion process and soot emission characteristics of diesel under different 2-Methylfuran(MF) atmospheres were investigated by high-speed photography and in-cylinder combustion analysis technology.The results show that at the same main injection timing,the ignition time of reactivity controlled compression ignition(RCCI) combustion mode is earlier than pure diesel combustion,and the ignition point is concentrated near the nozzle.Diesel acts as a spark plug to ignite the mixture,but the flame develops slowly in the early stages and the pressure in the cylinder rises slowly.Compared with pure diesel,RCCI combustion model has smaller peak values of in-cylinder pressure and heat release rate,shorter ignition delay period,earlier combustion phase and shorter combustion duration.At main spray time at 6℃A BTDC and 12℃A BTDC,with the increase of MF premixing ratio from 0 to 0.75,the peak cylinder pressure decreased by 19.6% and 26% respectively.In addition,with the increase of the MF heat value ratio,the area of kl factor> 1.5 in the combustion chamber decreased and the space integral natural luminescence(SINL) peak value decreased by 48.37%,and the soot formation rate and yield decreased significantly.However,when the MF heat value ratio was too large(75% of the total calorific value),the ignition delay period increased,and misfire occurred at the main injection timing of 0℃A BTDC.The RCCI mode of MF/diesel dual fuel has better stability,and better control effect can be obtained at different main inj ection timing.

关键词： 2-methylfuran RCCI visualization two-color method kl factor

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Lithography process for KrF in the sub-0.11μm node

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Journal of Semiconductors 2009年第9期30卷 146-150页

作者：赵宇航朱骏童家榕曾璇 State Key Laboratory of ASIC & System Department of MicroelectronicsFudan University Shanghai IC Research and Development Center

Currently, 200 mm wafer foundry companies are beginning to explore production feasibility under ground rules smaller than 0.11 μm while maintain the cost advantages of KrF exposure tool systems. The kl factor under 0.11 μm at 248 nm illumination will be below 0.35, which means the process complexity is comparable with 65 nm at 193 nm illumination. In this paper, we present our initial study in the CD process window, mask error factor and CD through pitch performance at the 0.09 μm ground rule for three critical layers--gate poly, metal and contact. The wafer data in the process window and optical proximity will be analyzed. Based on the result, it is shown that the KrF tool is fully capable of sub 0.11 μm node mass production.

关键词： kl factor KrF photo resist lithography

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