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MEMS inductor fabrication and emerging applications in power electronics and neurotechnologies

Microsystems & Nanoengineering 2021年第4期7卷 1-22页

作者： Hoa Thanh Le Rubaiyet I.Haque Ziwei Ouyang Seung Woo Lee Shelley I.Fried Ding Zhao Min Qiu Anpan Han The Rowland Institute at Harvard Harvard UniversityCambridgeMAUSA Department of Mechanical Engineering Technical University of DenmarkLyngbyDenmark Department of Electrical Engineering Technical University of DenmarkLyngbyDenmark Department of Neurosurgery Massachusetts General HospitalHarvard Medical SchoolBostonMAUSA Boston VA Healthcare System BostonMAUSA Key Laboratory of 3D Micro/Nano Fabrication and Characterization of Zhejiang Province School of EngineeringWestlake UniversityHangzhouChina Institute of Advanced Technology Westlake Institute for Advanced StudyHangzhouChina

MEMS inductors are used in a wide range of applications in micro-and nanotechnology,including RF MEMS,sensors,power electronics,and Bio-MEMS.Fabrication technologies set the boundary conditions for inductor design and their electrical and mechanical performance.This review provides a comprehensive overview of state-of-the-art MEMS technologies for inductor fabrication,presents recent advances in 3D additive fabrication technologies,and discusses the challenges and opportunities of MEMS inductors for two emerging applications,namely,integrated power electronics and neurotechnologies.Among the four top-down MEMS fabrication approaches,3D surface micromachining and through-substrate-via(TSV)fabrication technology have been intensively studied to fabricate 3D inductors such as solenoid and toroid in-substrate TSV inductors.While 3D inductors are preferred for their high-quality factor,high power density,and low parasitic capacitance,in-substrate TSV inductors offer an additional unique advantage for 3D system integration and efficient thermal dissipation.These features make in-substrate TSV inductors promising to achieve the ultimate goal of monolithically integrated power converters.From another perspective,3D bottom-up additive techniques such as ice lithography have great potential for fabricating inductors with geometries and specifications that are very challenging to achieve with established MEMS technologies.Finally,we discuss inspiring and emerging research opportunities for MEMS inductors.

关键词： inductor power lithography

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High-Voltage-Gain DC-DC Converter with Three-Winding Coupled inductor

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Chinese Journal of Electrical Engineering 2019年第1期5卷 10-23页

作者： Wenjuan Liang Xuefeng Hu Hao Chen Guiyang Wu Meng Zhang Guodong Tan School of Electrical Engineering Anhui University of TechnologyMa’anshan243032 China

A novel DC-DC converter topology that uses a three-winding coupled inductor(TWCI)and a new voltagemultiplication technique is presented for achieving high voltage gain.The proposed converter comprises one boost unit,one passive absorption circuit,and two voltage-multiplier cells.The tertiary winding of the coupled inductor is connected to a capacitor and diode,and this combination acts as a secondary voltage-multiplier cell(SVMC).The SVMC,when combined with two capacitors,the secondary winding of the coupled inductor,a diode,and a switch,forms a primary voltage-multiplier cell,which can achieve a large voltage-conversion ratio that can be adjusted easily.The new voltage-multiplier technique can be used to decrease the number of capacitors and diodes,which improves the transformation efficiency.A prototype circuit with a nominal rating of 300 W is designed to verify the correctness of theoretical analysis.

关键词： Three-winding coupled inductor voltage multiplier output diode stress high step-up

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Design of Magnetic RF inductor in CMOS

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Tsinghua Science and Technology 2012年第1期17卷 78-83页

作者： Jing Zhan Tianling Ren Chen Yang Yi Yang Litian Liu Albert Wang nghua National Laboratory for Information Science and Technology Institute of MicroelectronicsTsinghua UniversityBeijing 100084China Shanghai Institute of Microsystem and Information Technology State Key Laboratory of Transducer TechnologyShanghai 200050China Department of Electrical Engineering University of CaliforniaRiversideCA 92521USA

Traditional planar inductors in Radio Frequency （RF） Integrated Circuits （ICs） are plagued by large areas, low quality, and low frequencies. This paper describes a magnetic-based CMOS-compatible RF in- ductor. Magnetic-core inductors with various ferrite-filled structures, spiral structures, and magnetic material permeabilities were simulated to show that this inductor greatly improves the inductance by up to 97% and quality factor by 18.6% over a multi-GHz frequency range. The results indicate that the inductor is a very promising and viable solution to realize miniature, high quality, and high frequency on-chip inductors for high-end RF ICs.

关键词： inductor ferrite magnetic-cored Radio Frequency （RF） Integrated Circuits （ICs）

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On-Chip inductor Technique for Improving LNA Performance Operating at 15 GHz

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Circuits and Systems 2012年第4期3卷 334-341页

作者： El-Sayed A. M. Hasaneen Nagwa Okely Electrical Engineering Department El-Minia University El-Minia Egypt

This paper presents a technique for low noise figure reduction of low-noise amplifier (LNA). The proposed LNA is designed in a source degeneration technique that offers lower noise figure. The resistance of the on-chip inductor is reduced by using multilayer that significantly reduces the thermal noise due to spiral inductor. Also, using spiral inductor as a gate inductor reduces the effect of the input parasitic capacitance on the noise figure and provides a good matching at the input and output of the LNA. The results of the LNA using multilayer on-chip inductor compared will off-chip inductor have been illustrated. It shows that the proposed technique reduces significantly the noise figure and improves the matching. The proposed LNA is designed in 0.13 μm process with 1.3 V supply voltage and simulated using Advanced Design System (ADS) software. The simulation results show that the LNA is unconditionally stable and provides a forward gain of 11.087 dB at operating frequency of 15 GHz with 1.784 dB noise figure and input and output impedance matching of –17.93 dB, and –10.04 dB.

关键词： Low Noise Amplifier On-Chip inductor Noise Figure Cascade Amplifier Scattering Matrix

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Investigation into PCB Routing Loss for Coupled inductor Based VR (Voltage Regulator) Design in Server Computing System

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Energy and Power Engineering 2017年第4期9卷 464-474页

作者： Xiaoguo Liang Jinsong Zhu Yinghua Ye Yuan-Liang Li Data Center Group in Intel Asia Pacific Research and Development Ltd. Shanghai China Date Center Group in Intel Microelectronics Asia LLC Taiwan Branch Taiwan

Coupled inductor is one appealing technology to improve transient response and reduce output decoupling significantly in interleaved multi-phase voltage regulators (VRs). One well known problem is that coupled inductor winding structure causes PCB routing path longer than discrete inductor design. This paper investigates possible PCB routing schemes for coupled inductor and conducts a fair and quantitative comparison with discrete inductor in a server VR design. Simulation and measurement are also conducted to verify the analysis.

关键词： PCB Routing Loss Coupled inductor Voltage Regulator (VR) Server

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<i>A Brief Review</i>: Stage-Convertible Power Amplifier Using Differential Line inductor

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Wireless Engineering and Technology 2012年第4期3卷 189-194页

作者： Jonghoon Park Changhyun Lee Changkun Park School of Electronic Engineering Soongsil University Seoul Korea

In this review article, a stage-convertible RF power amplifier designed with a 0.18-μm RF CMOS process is described. A method to implement a low-power matching network is an essential technology for the stage-convertible power amplifier. Various low-power matching networks with distributed active transformers as an output power combiner are compared in terms of the amounts of undesired coupling, the chip size, and the amount of power loss. The feasibility of a differential line inductor for the stage-convertible power amplifier is assessed and explained. Finally, we show that the differential line inductor is a realistic means of reducing the overall chip size, enhancing the quality factor of the matching network, and minimizing the undesired coupling between the inter-stage matching network and any output matching network. Additionally, the operating mechanism of the stage-convertible power amplifier using the differential line inductor for a low-power matching network is described in detail.

关键词： inductor Differential Line inductor Matching Network Power Amplifier Stage-Convertible

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State Variable Model for Considering the Parasitic inductor Resistance on the Open Loop Performance of DC to DC Converters

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Journal of Computer and Communications 2014年第13期2卷 41-48页

作者： Carlos Alberto Lozano Espinosa Pontificia Universidad Javeriana Santiago de Cali Colombia

This paper shows DC and small-signal circuit models for the PWM DC to DC buck, boost and back/ boost converters with the equivalent series resistance of the inductor. The DC voltage transfer function and the efficiency of the converter are derived from the DC model. Small-signal open-loop characteristics are derived from the small-signal model based on a state variable model. A design example proves the performance of the circuit and verification of the model.

关键词： DC to DC Converter Parasitic Resistance of inductor Small Signal Analysis Buck Converter Boost Converter Buck-Boost Converter

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MMCC Based Electronically Tunable Allpass Filters Using Grounded Synthetic inductor

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Circuits and Systems 2014年第4期5卷 89-97页

作者： Rabindranath Nandi Palaniandavar Venkateswaran Mousiki Kar Department of Electronics & Communication Engineering Heritage Institute of Technology Kolkata India Department of Electronics & Telecommunication Engineering Jadavpur University Kolkata India

New circuit implementations of electronically tunable first and second order allpass filter (AP) structures using a Multiplication Mode Current Conveyor (MMCC) building block are presented. The control voltage (V) of the MMCC tunes the desired phase (θ) while the time constant (τ) is adjustable by a Differential Voltage Current Conveyor Transconductance Amplifier (DVCCTA)-based synthetic lossless grounded inductor (L). The circuits are analyzed taking into account the device imperfections which show low active sensitivity features of the designs. The effects of port transfer error (ε) and that of the parasitic capacitances of the active devices had been meticulously examined which indicated that certain deviations in nominal design equations occur;these however, could be minimized with appropriate choice of the circuit passive components. Readily available AD-844 type Current Feedback Amplifier (CFA) elements are utilized for the topology implementation. Satisfactory test results on electronic θ-tunability, upto about 300 KHz, had been verified by PSPICE simulation and with hardware experimentation.

关键词： Allpass Filter MMCC DVCCTA CFA Synthetic inductor Electronic Phase Shifter

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A Fundamental Approach for Design and Optimization of a Spiral inductor

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Journal of Electrical Engineering 2018年第5期6卷 256-260页

作者： Frederick Ray I.Gomez Back-End Manufacturing&Technology STMicroelectronicsInc.Calamba CityLaguna 4027Philippines

This technical paper presents a fundamental approach for design and optimization of a spiral inductor using ASITIC(analysis and simulation of spiral inductors and transformers for ICs)and SpiralCalc(integrated spiral inductor calculator).Both tools are available for research and non-commercial purposes.inductors are key components esp.for impedance matching and are designed such that they would exhibit a high Q-factor(quality-factor)for the specific inductance and frequency range of operation.A sample value of 5.3 nH is set for this paper for the spiral inductor design using the tools.For optimum Q-factor,an octagonal geometry for spiral inductor is used for ASITIC design,to have a close comparison to that of the SpiralCalc.Design methodologies for the optimization of the spiral inductor parameters such as the inductance and the Q-factor are discussed.Results comparison between the two tools is also presented.Design tradeoffs between inductor parameters are inevitable,and these parameters affect the performance of the inductor esp.at higher frequencies.With this,it is crucial that inductors be designed carefully for their effective frequency range of operation and specific requirements of the intended application.

关键词： Spiral inductor Q-factor inductance

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An inductor Model for Analyzing the Performance of Printed Meander Line Antennas in Smart Structures

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Journal of Electromagnetic Analysis and Applications 2014年第9期6卷 244-252页

作者： Shih-Ming Yang Chih-Hsin Huang Department of Aeronautics and Astronautics National Cheng Kung University Taiwan

Meander line antenna has been considered desirable on flight vehicles to reduce drag and minimize aerodynamic disturbance;however, the antenna design and performance analysis have made mostly by trial-and-error. An inductor model by simulating the meander line sections as electrical inductors and the interconnecting radiation elements as a quasi-monopole antenna is developed to analyze the antenna performance. Experimental verifications of the printed meander line antennas embedded in composite laminated substrates show that the inductor model is effective to design and analyze. Of the 4 antennas tested, the discrepancy of resonant frequency in simulation and experiment is within 4.6%.

关键词： inductor Model Meander Line Antenna Smart Structure

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