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Latest developments in EUV photoresist evaluation capability at Shanghai Synchrotron Radiation Facility

Nuclear Science and Techniques 2023年第12期34卷 206-215页

作者： Zhen‑Jiang Li Cheng‑Hang Qi Bei‑Ning Li Shu‑Min Yang Jun Zhao Zhi‑Di Lei Shi‑Jie Zhu Hao Shi Lu Wang Yan‑Qing Wu Ren‑Zhong Tai Shanghai Institute of Applied Physics Chinese Academy of SciencesShanghai 201800China University of Chinese Academy of Sciences Beijing 100049China Shanghai Synchrotron Radiation Facility Shanghai 201204China ShanghaiTech University Shanghai 201210China Key Laboratory of Materials for high Power Lasers Shanghai Institute of Optics and Fine MechanicsChinese Academy of SciencesShanghai 201800China College of Materials Science and Opto‑Electronic Technology University of Chinese Academy of SciencesBeijing 100083China Shanghai University Shanghai 200444China

Evaluating the comprehensive characteristics of extreme ultraviolet(EUV)photoresists is crucial for their application in EUV lithography,a key process in modern technology.This paper highlights the capabilities of the Shanghai Synchrotron Radiation Facility(SSRF)08U1B beamline in advancing this field.Specifically,it demonstrates how this beamline can create fringe patterns with a 15-nm half-pitch on a resist using synchrotron-based EUV lithography.This achievement is vital for evaluating EUV photoresists at the advanced 5-nm node.We provide a detailed introduction to the methods and experimental setup used at the SSRF 08U1B beamline to assess an EUV photoresist.A significant part of this research involved the fabrication of high-resolution hydrogen silsesquioxane mask gratings.These gratings,with an aspect ratio of approximately 3,were created using electron beam lithography on an innovative mask framework.This framework was crucial in eliminating the impact of zeroth-order light on interference patterns.The proposed framework propose offers a new approach to mask fabrication,particularly beneficial for achromatic Talbot lithography and multicoherent-beam interference applications.

关键词： Extreme ultraviolet photoresist Interference lithography high-resolution Electron beam lithography·Hydrogen silsesquioxane Grating

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The Differences of Interstitial Lung Diseases in high-resolution Computerized Tomography and Pulmonary Function Test among Different Connective Tissue Diseases, and the Correlated Factors

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Open Journal of Rheumatology and Autoimmune Diseases 2018年第2期8卷 53-65页

作者： Zhen Jiang Wenyou Pan Jinhui Tao Xiangpei Li Department of Rheumatology and Immunology The Affiliated Huai’an No.1 People’s Hospital of Nanjing Medical University Huai’an China Department of Rheumatology and Immunology Anhui Provincial Hospital Anhui Medical University Hefei China

Objective. To study the difference of interstitial lung diseases (ILDs) in high-resolution computerized tomography and pulmonary function test among different connective tissue diseases (CTDs). Methods. 209 patients with different CTDs were recruited and underwent lung HRCT and PFT. Eerythrocyte sedimentation rate (ESR), C-reactive protein (CRP), serum ferritin (SF), anti-SSA, and so on were tested. Based on HRCT, a patient was classified into ILD group (CTD+ILD) or non-ILD group (CTD-ILD). HRCT, PFT, and laboratory markers were compared according to CTDs and CTD-associated ILDs. Results. The incidences of ILD were 79.6%, 82.0%, 89.7%, and 97.1% respectively for Rheumatoid arthritis (RA), primary Sjogren’s symptom (pSS), dermatomyositis/polymyositis (DM/PM), and systemic sclerosis (SSc) groups. RA and pSS patients exhibited more nodules, patching, ground-glass opacity, and cord shadow foci in HRCT, DM/PM and SSc patients exhibited more reticular opacity and honeycombing foci. RA and pSS patients exhibited more obstructive ventilatory disorder, small airway dysfunction and emphysema in PFT, and DM/PM and SSc patients exhibited more restrictive ventilatory disorder, mixed ventilatory disorder. ESR, CRP and SF were significantly higher in total CTD+ILD group than in total CTD-ILD group (P = 0.047, 0.006, 0.004, respectively), and higher in different CTD+ ILD groups than in comparable CTD-ILD groups (P = 0.049, 0.048, and 0.023, pSS+ILD, SSc+ILD and RA+ILD compared to pSS-ILD, SSc-ILD and RA-ILD, respectively for ESR, CRP, SF). The positive rate of anti-SSA was significantly higher in DM/PM+ILD group than in DM/PM-ILD group (P = 0.025). Conclusions. The manifestations and incidences of ILDs differ among different CTDs in HRCT and PFT, and inflammation and anti-SSA are positively correlated with ILDs in different CTDs, which provide important evidences for judging disease condition and prognosis.

关键词： Connective Tissue Diseases Interstitial lung Disease high-resolution Computerized Tomography Pulmonary Function Test Inflammation

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Borehole Heat Budget Calculator: A New Tool for the Quick Exploitation of high-resolution Temperature Profiles by Hydrogeologists

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Journal of Water Resource and Protection 2019年第2期11卷 122-147页

作者： Guillaume Meyzonnat Florent Barbecot José Antonio Corcho Alvarado Jean-Marc Lauzon Renald McCormack Antoine Tognelli Hermann Zeyen Marina Alazard Geotop-UQAM Department of Earth and Atmospheric Sciences Montreal Canada Spiez Laboratory Federal Office for Civil Protection Spiez Switzerland TechnoRem Inc. Laval Canada Envir’Eau-Puits Inc. Levis Canada CEA DAM DIF F-91297 Arpajon France Department of Earth Sciences GEOPS Laboratory Paris-Saclay University Paris-Sud University CNRS Orsay France

Distributed temperature sensing is known to provide sharp signals which are very efficient for mapping hydraulically active fractures in wellbores. high-resolution temperature sensing has specifically demonstrated its capacity to characterize very low flows in wellbores. But as sharp as they can be, temperature profiles are often difficult to decipher. The aim of the present work is to provide and to test the “Borehole Heat Budget Calculator” (BHB Calculator), which is implemented as a fast and easy to use tool for the quantitative analysis of depth-temperature profiles. The Calculator is suitable for most pumping and draining configurations, as the heat budget is generalized for modelling multidirectional flow systems within the same wellbore. The formatted worksheet allows the quick exploitation of temperature logs, and is applicable for the characterization of distributed fractures in long screened wellbores. Objectives of the heat modelling are to enhance the readability of complex depth-temperature data, as well as to quantify distribution of inflow intensities and temperatures with depth. The use of heat budget helps to clearly visualize how heat conduction and heat advection contributions are distributed along wellbores profiles. Calculations of inflow temperatures and their evolution through pumping duration is a prerequisite to infer about the nature of aquifer properties (i.e. conduits, distributed or discrete fractures, porous media), as well as to give insight information about the mapping of effective flow paths draining the aquifer. The efficiency and limitations of the BHB Calculator are being tested through high-resolution temperature logging, along with complementary flowmetering and televiewing logging in fractured aquifers located in the St-Lawrence Lowlands, Quebec, Canada.

关键词： Fractured Bedrock Aquifer high-resolution Temperature Logging Heat Budget Modelling Long Screened Wellbores

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An Integrated Framework for Road Detection in Dense Urban Area from high-resolution Satellite Imagery and Lidar Data

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Journal of Geographic Information System 2018年第2期10卷 175-192页

作者： Asghar Milan Surveying Department National Cartographic Center Tehran Iran

Automatic road detection, in dense urban areas, is a challenging application in the remote sensing community. This is mainly because of physical and geometrical variations of road pixels, their spectral similarity to other features such as buildings, parking lots and sidewalks, and the obstruction by vehicles and trees. These problems are real obstacles in precise detection and identification of urban roads from high-resolution satellite imagery. One of the promising strategies to deal with this problem is using multi-sensors data to reduce the uncertainties of detection. In this paper, an integrated object-based analysis framework was developed for detecting and extracting various types of urban roads from high-resolution optical images and Lidar data. The proposed method is designed and implemented using a rule-oriented approach based on a masking strategy. The overall accuracy (OA) of the final road map was 89.2%, and the kappa coefficient of agreement was 0.83, which show the efficiency and performance of the method in different conditions and interclass noises. The results also demonstrate the high capability of this object-based method in simultaneous identification of a wide variety of road elements in complex urban areas using both high-resolution satellite images and Lidar data.

关键词： high-resolution Satellite Images Lidar Data Object-Based Analysis Feature Extraction

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high-resolution dipole (e, e) study for optical oscillator strengths of helium

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Science China Mathematics 1996年第12期39卷 1288-1295页

作者：凤任飞杨炳忻武淑兰邢士林张芳钟志萍郭学哲徐克尊 (Department of Modern Physics University of Science and Technology of China Hefei 230027 China)

The optical oscillator strengths of helium have been studied by a high-resolution dipole (e, e) method on the recently built high-resolution fast-electron energy-loss spectrometer. The difficulties of optical measurement have been avoided and the experimental precision has been improved by using this method. The optical oscillator strength density spectrum corresponding to the 1S n’P transitions and ionization of helium has been measured in the energy loss range of 21 - 26 eV. And the same work corresponding to the autoionization resonance region has been done in energy loss ranges of 59-67 eV and 69-74 eV. The above results have also been compared with those of the previous work.

关键词： helium optical oscillator strength high-resolution dipole (e e) method discrete transition autoionization resonance.

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Study on Anti-Disturbance and high-resolution Shallow Seismic Exploration of Active Faults in Urban Regions

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Earthquake Research Advances 2003年第4期 48-57页

作者： Pan Jishun 1), Zhang Xiankang 1), Liu Baojin 1), Fan Shengming 1), Wang Fuyun 1), Duan Yonghong 1) and Zhang Hongqiang 2) 1) The Center for Geophysical Exploration, China Seismological Bureau, Zhengzhou 450002, China 2) The First Company of Railway Bridge Group of China, Zhengzhou 450003, China.

The significance of detection of urban active faults and the general situation concerning detection of urban active faults in the world are briefly introduced. In a brief description of the basic principles of anti-disturbance and high-resolution shallow seismic exploration, the stress is put on the excitation of seismic sources, the performance of digital seismographs, receiving mode and conditions, geometry as well as data acquisition, processing and interpretation in the anti-disturbance and high-resolution shallow seismic exploration of urban active faults. The study indicates that a controlled seismic source with a linear or nonlinear frequency-conversion scanning function and the relevant seismographs must be used in data acquisition, as well as working methods for small group interval, small offset, multi-channel receiving, short-array and high-frequency detectors for receiving are used. Attention should be paid to the application of techniques for static correction of refraction, noise suppressing, high-precision analysis of velocity, wavelet compressing, zero-phasing of wavelet and pre-stacking migration to data processing and interpretation. Finally, some cases of anti-disturbance and high-resolution shallow seismic exploration of urban active faults are present in the paper.

关键词： Urban active fault Shallow seismic exploration Anti-disturbance high-resolution Data acquisition Data processing

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K-bentonite beds and high-resolution integrated strati- graphy of the uppermost Ordovician Wufeng and the lowest Silurian Longmaxi formations in South China

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Science China Earth Sciences 2003年第11期46卷 1121-1133页

作者：苏文博何龙清王永标龚淑云周湖云 School of Earth Sciences and Resources China University of Geosciences Beijing 100083 China Yichang Institute of Geology and Mineral Resources China Geological Survey Yichang 443003 China Faculty of Earth Sciences China University of Geosciences Wuhan 430074 China Test Center China University of Geosciences Wuhan 430074 China

More than 20 K-bentonite beds were discovered from the Wufeng Formation and the lowest Longmaxi Formation in two sections, both adjacent to the Ordovician-Silurian (O-S) bound-ary and located in Tongzi, Guizhou Province and Yichang, Hubei Province, some 500 km apart from each other in South China. This indicates that many volcanic eruptions occurred near the southeast margin of the Yangtze Platform between the latest Ordovician and the earliest Silurian. Mainly through biostratigraphic and sequence stratigraphic studies, it was found that almost all these far-apart K-bentonite beds may be correlated with each other. This is the first time that a succession of volcanic ash deposits with high potential of correlation was discovered within a strata interval on the main platforms of China. Therefore, these K-bentonite beds may afford ex-cellent event-marker beds helpful to high-resolution research in integrated stratigraphy as well as other lines of research on the O-S boundary in South China.

关键词： K-bentonite bed, event-marker, high-resolution integrated stratigraphy, Ordovician-Silurian Boundary, Wufeng & Longmaxi formations, Yangtze Platform.

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Virtual Anatomy: The Dissecting Theatre of the Future—Implementation of Cinematic Rendering in a Large 8 K high-resolution Projection Environment

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Journal of Biomedical Science and Engineering 2017年第8期10卷 367-375页

作者： Franz A. Fellner Klaus Engel Christoph Kremer Central Radiology Institute Kepler University Hospital Medical Faculty of the Johannes Kepler University Linz Austria Medical Faculty of the Friedrich-Alexander-University Erlangen-Nürnberg Erlangen Germany Siemens Healthineers Erlangen Germany Ars Electronica Center Linz Austria

Modern computer techniques have been in use for several years to generate three-dimensional visualizations of human anatomy. Very good 3-D computer models of the human body are now available and used routinely in anatomy instruction. These techniques are subsumed under the heading “virtual anatomy” to distinguish them from the conventional study of anatomy entailing cadavers and anatomy textbooks. Moreover, other imaging procedures (X-ray, angiography, CT and MR) are also used in virtual anatomy instruction. A recently introduced three-dimensional post-processing technique named Cinematic Rendering now makes it possible to use the output of routine CT and MR examinations as the basis for highly photo-realistic 3-D depictions of human anatomy. We have installed Cinematic Rendering (enabled for stereoscopy) in a high-definition 8K 3-D projection space that accommodates an audience of 150. The space’s projection surface measures 16 × 9 meters;images can be projected on both the front wall and the floor. A game controller can be used to operate Cinematic Rendering software so that it can generate interactive real-time depictions of human anatomy on the basis of CT and MR data sets. This prototype installation was implemented without technical problems;in day-to-day, real-world use over a period of 22 months, there were no impairments of service due to software crashes or other technical problems. We are already employing this installation routinely for educational offerings open to the public, courses for students in the health professions, and (continuing) professional education units for medical interns, residents and specialists—in, so to speak, the dissecting theater of the future.

关键词： Virtual Anatomy Education Cinematic Rendering (CR) Volume Rendering (VR) high-resolution 3D Display Computed Tomography (CT) Magnetic Resonance (MR)

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Use of high-resolution Ultrasound (HRU) in the Assessment of Deep Injections of CHAP-Hyaluronic Acid (CHAP-HA) Fillers for Midface Lift

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Journal of Cosmetics, Dermatological Sciences and Applications 2018年第3期8卷 126-132页

作者： Hsiao-Tung Lee Haw-Yueh Thong Department of Radiology Shin-Kong Wu Ho-Su Memorial Hospital Taiwan Department of Dermatology Shin-Kong Wu Ho-Su Memorial Hospital Taiwan

high-resolution ultrasound (HRU) imaging is a useful tool to study hyaluronic acid (HA) filler injection in the face. It is noninvasive, quick, well-tolerated, and can provide in vivo and dynamic information. The formations of pools or pearls in HA fillers could be observed real time during injection. The plane of injection could be determined accurately, and there were no specimen manipulation artifacts. It was observed that HA gel fillers with differing production technologies showed distinct spread and distribution patterns in the periocular tissues on HRU examination. The authors used HRU to assess deep injections of CHAP-Hyaluronic Acid (CHAP-HA) fillers for midface lift. 10 patients who underwent bilateral midface deep injections using CHAP-HA filler were examined with HRU before and immediately after treatment, and in 2 weeks and one month later. The CHAP-HA appeared as hypoechoic densities within the preperiosteal plane in HRU. CHAP-HA adopted variable morphology within the tissue depending on individual tissue densities and the compliance of the tissues in the plane of injection. CHAP-HA was unidentifiable with surrounding tissue after one month in 13 of the 20 injection sites. HRU allows in vivo study of CHAP-HA injection behavior and could be a tool for further studies of HA-tissue reactions.

关键词： CHAP-Hyaluronic Acid (CHAP-HA) Filler high-resolution Ultrasound (HRU) Midface Lift Deep Injections Preperiosteal Filler Injections

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Semi-Solid and Solid Bolus Swallows in high-resolution Oesophageal Manometry for the Detection of Motility Disorders

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Open Journal of Gastroenterology 2018年第1期8卷 1-16页

作者： Jerry Zhou Catherine Sykes Vincent Ho School of Medicine Western Sydney University Sydney Australia Gastrointestinal Physiology and Urodynamics Royal Infirmary of Edinburgh Edinburgh Scotland Gastroenterology Campbelltown Hospitals Campbelltown Australia

Background/Aims: high-resolution oesophageal manometry utilises water swallows to evaluate oesophageal function. However, small volumes of water are not representative of normal eating and as a result often produce normal manometry studies in patients with dysphagia. This study sets out to establish optimal diagnostic thresholds for semi-solid solid swallows and evaluate their ability to uncover motility abnormalities in patients with motility disorders. Method: Manometry was performed using ten 5-mL single water swallows followed by two semi-solid and two solid swallows in the upright position. Normative values for the adjunctive tests were obtained from patient controls while patients with major motility disorders were used to establish the optimal diagnostic thresholds. Diagnostic thresholds identified were prospectively tested in patients with normal water swallows but oesophagus related symptoms and in those with minor and major motility disorders. Results: Normal values for semi-solid and solid were determined in patient controls (n = 100). Development of diagnostic thresholds included 120 patients with major motility disorders. Optimal diagnostic thresholds identified for oesophagogastric junction dysfunction in semi-solid and solid swallows (IRP > 15.5 mmHg). Hypercontractilty and spasm used existing thresholds (>8000 mmHg-s-cm and < 4.5 s, respectively) but modified frequency of ≥50% of adjunctive swallows. Diagnostic thresholds were applied to symptomatic patients with normal water swallows (n = 70) identifying 12/70 (17%) to have abnormal adjunctive swallows. One of 30 patients (3%) with ineffective motility had abnormal adjunctive swallow and 12 patients with oesophageal spasm, oesophagogastric junction obstruction, and hypercontractility had abnormal adjunctive swallows that moved them up the motility disorder hierarchy. Conclusions: Semi-solid and solid challenge increase diagnostic yield of motility disorders.

关键词： high-resolution Manometry Oesophagus Motility Diagnostic Classification Bolus Type

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