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检索条件"主题词=High power pulsed magnetron sputtering"
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Microstructure and corrosion resistance of vanadium films deposited at different target-substrate distance by HPPMS
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Rare Metals 2014年 第5期33卷 587-593页
作者: Chun-Wei Li Xiu-Bo Tian Tian-Wei Liu Jian-Wei Qin Chun-Zhi Gong State Key Laboratory of Advanced Welding and Joining Harbin Institute of Technology College of Engineering and Technology Northeast Forestry University State Key Laboratory of Surface Physics and Chemistry China Academy of Engineering Physics
high power pulsed magnetron sputtering(HPPMS), a novel physical vapor deposition technology, was applied to prepare vanadium films on aluminum alloy substrate in this paper. The influence of target–substrate dista... 详细信息
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